JPS6340571U - - Google Patents
Info
- Publication number
- JPS6340571U JPS6340571U JP13365286U JP13365286U JPS6340571U JP S6340571 U JPS6340571 U JP S6340571U JP 13365286 U JP13365286 U JP 13365286U JP 13365286 U JP13365286 U JP 13365286U JP S6340571 U JPS6340571 U JP S6340571U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- purge
- negative pressure
- pressure chamber
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000003463 adsorbent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13365286U JPH0315811Y2 (cs) | 1986-08-31 | 1986-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13365286U JPH0315811Y2 (cs) | 1986-08-31 | 1986-08-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6340571U true JPS6340571U (cs) | 1988-03-16 |
JPH0315811Y2 JPH0315811Y2 (cs) | 1991-04-05 |
Family
ID=31034159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13365286U Expired JPH0315811Y2 (cs) | 1986-08-31 | 1986-08-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0315811Y2 (cs) |
-
1986
- 1986-08-31 JP JP13365286U patent/JPH0315811Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0315811Y2 (cs) | 1991-04-05 |