JPS6339934U - - Google Patents
Info
- Publication number
- JPS6339934U JPS6339934U JP13375986U JP13375986U JPS6339934U JP S6339934 U JPS6339934 U JP S6339934U JP 13375986 U JP13375986 U JP 13375986U JP 13375986 U JP13375986 U JP 13375986U JP S6339934 U JPS6339934 U JP S6339934U
- Authority
- JP
- Japan
- Prior art keywords
- drive mechanism
- shutter
- filter
- light irradiator
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
Description
第１図はこの考案の一実施例を示す光照射器の
要部構成を示す断面図、第２図は従来の紫外線照
射器の要部構成を示す断面図である。
図中．１：ランプ、２：ミラー、３：ブロワ、
４：光透過板、１０ａ，１０ｂ：シヤツター、１
１：シヤツター駆動機構、１２：フイルタ、１３
：フイルタ駆動機構。
FIG. 1 is a sectional view showing the main part of a light irradiator according to an embodiment of this invention, and FIG. 2 is a sectional view showing the main part of a conventional ultraviolet irradiator. In the figure. 1: lamp, 2: mirror, 3: blower,
4: Light transmission plate, 10a, 10b: Shutter, 1
1: Shutter drive mechanism, 12: Filter, 13
: Filter drive mechanism.
Claims (1)
ンプと、このランプの前方に配置したシヤツター
と、このシヤツターを制御信号によつて駆動する
シヤツター駆動機構と、前記シヤツターの前方も
しくは後方に配置したフイルタと、このフイルタ
を制御信号によつて駆動するフイルタ駆動機構と
、前記ランプを冷却するためのブロワとによつて
構成される光照射器であつて、この光照射器は、
その前面に取付けた光透過板と他の側面とによつ
て、後部に設けた空気流通用の入出口以外を気密
に構成されたことを特徴とする光照射器。 (2) シヤツター駆動機構とフイルタ駆動機構は
制御信号によつて各々独立に駆動することを特徴
とする実用新案登録請求の範囲第(1)項記載の光
照射器。 (3) シヤツター駆動機構とフイルタ駆動器機構
は相互に関連して駆動することができることを特
徴とする実用新案登録請求の範囲第(1)項記載の
光照射器。[Claims for Utility Model Registration] (1) At least one lamp having a mirror disposed behind it, a shutter disposed in front of the lamp, a shutter drive mechanism for driving the shutter in accordance with a control signal, and A light irradiator consisting of a filter placed in front or behind the shutter, a filter drive mechanism that drives the filter in response to a control signal, and a blower for cooling the lamp. The irradiator is
A light irradiator characterized in that the light transmitting plate attached to the front side and the other side surfaces make the light irradiator airtight except for the entrance and exit for air circulation provided at the rear. (2) The light irradiator according to claim 1, wherein the shutter drive mechanism and the filter drive mechanism are each independently driven by a control signal. (3) The light irradiator according to claim 1, wherein the shutter drive mechanism and the filter drive mechanism can be driven in relation to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986133759U JPH0246045Y2 (en) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986133759U JPH0246045Y2 (en) | 1986-09-02 | 1986-09-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6339934U true JPS6339934U (en) | 1988-03-15 |
| JPH0246045Y2 JPH0246045Y2 (en) | 1990-12-05 |
Family
ID=31034366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986133759U Expired JPH0246045Y2 (en) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246045Y2 (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321324A (en) * | 1976-08-11 | 1978-02-27 | Toyota Motor Corp | Heater for engine intake |
| JPS59196735A (en) * | 1983-04-20 | 1984-11-08 | Matsushita Electric Ind Co Ltd | Ultraviolet ray irradiation apparatus |
| JPS6045247A (en) * | 1983-05-23 | 1985-03-11 | フユージヨン・セミコンダクター・システムズ | Method and apparatus for hardening photoresist |
| JPS6114724A (en) * | 1984-06-30 | 1986-01-22 | Ushio Inc | Irradiation of semiconductor wafer by ultraviolet ray |
| JPS62295420A (en) * | 1986-06-16 | 1987-12-22 | Ushio Inc | Processing method for resist |
| JPS62295417A (en) * | 1986-06-16 | 1987-12-22 | Ushio Inc | Processing method for resist |
-
1986
- 1986-09-02 JP JP1986133759U patent/JPH0246045Y2/ja not_active Expired
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321324A (en) * | 1976-08-11 | 1978-02-27 | Toyota Motor Corp | Heater for engine intake |
| JPS59196735A (en) * | 1983-04-20 | 1984-11-08 | Matsushita Electric Ind Co Ltd | Ultraviolet ray irradiation apparatus |
| JPS6045247A (en) * | 1983-05-23 | 1985-03-11 | フユージヨン・セミコンダクター・システムズ | Method and apparatus for hardening photoresist |
| JPS6114724A (en) * | 1984-06-30 | 1986-01-22 | Ushio Inc | Irradiation of semiconductor wafer by ultraviolet ray |
| JPS62295420A (en) * | 1986-06-16 | 1987-12-22 | Ushio Inc | Processing method for resist |
| JPS62295417A (en) * | 1986-06-16 | 1987-12-22 | Ushio Inc | Processing method for resist |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0246045Y2 (en) | 1990-12-05 |
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