JPS6339934U - - Google Patents

Info

Publication number
JPS6339934U
JPS6339934U JP13375986U JP13375986U JPS6339934U JP S6339934 U JPS6339934 U JP S6339934U JP 13375986 U JP13375986 U JP 13375986U JP 13375986 U JP13375986 U JP 13375986U JP S6339934 U JPS6339934 U JP S6339934U
Authority
JP
Japan
Prior art keywords
drive mechanism
shutter
filter
light irradiator
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13375986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0246045Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986133759U priority Critical patent/JPH0246045Y2/ja
Publication of JPS6339934U publication Critical patent/JPS6339934U/ja
Application granted granted Critical
Publication of JPH0246045Y2 publication Critical patent/JPH0246045Y2/ja
Expired legal-status Critical Current

Links

JP1986133759U 1986-09-02 1986-09-02 Expired JPH0246045Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986133759U JPH0246045Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986133759U JPH0246045Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-02 1986-09-02

Publications (2)

Publication Number Publication Date
JPS6339934U true JPS6339934U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-15
JPH0246045Y2 JPH0246045Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-05

Family

ID=31034366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986133759U Expired JPH0246045Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPH0246045Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321324A (en) * 1976-08-11 1978-02-27 Toyota Motor Corp Heater for engine intake
JPS59196735A (ja) * 1983-04-20 1984-11-08 Matsushita Electric Ind Co Ltd 紫外線照射装置
JPS6045247A (ja) * 1983-05-23 1985-03-11 フユージヨン・セミコンダクター・システムズ フオトレジストの硬化方法及び硬化装置
JPS6114724A (ja) * 1984-06-30 1986-01-22 Ushio Inc 半導体ウエハ−への紫外線照射方法
JPS62295420A (ja) * 1986-06-16 1987-12-22 Ushio Inc レジスト処理方法
JPS62295417A (ja) * 1986-06-16 1987-12-22 Ushio Inc レジスト処理方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321324A (en) * 1976-08-11 1978-02-27 Toyota Motor Corp Heater for engine intake
JPS59196735A (ja) * 1983-04-20 1984-11-08 Matsushita Electric Ind Co Ltd 紫外線照射装置
JPS6045247A (ja) * 1983-05-23 1985-03-11 フユージヨン・セミコンダクター・システムズ フオトレジストの硬化方法及び硬化装置
JPS6114724A (ja) * 1984-06-30 1986-01-22 Ushio Inc 半導体ウエハ−への紫外線照射方法
JPS62295420A (ja) * 1986-06-16 1987-12-22 Ushio Inc レジスト処理方法
JPS62295417A (ja) * 1986-06-16 1987-12-22 Ushio Inc レジスト処理方法

Also Published As

Publication number Publication date
JPH0246045Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-05

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