JPS6339170U - - Google Patents

Info

Publication number
JPS6339170U
JPS6339170U JP13179886U JP13179886U JPS6339170U JP S6339170 U JPS6339170 U JP S6339170U JP 13179886 U JP13179886 U JP 13179886U JP 13179886 U JP13179886 U JP 13179886U JP S6339170 U JPS6339170 U JP S6339170U
Authority
JP
Japan
Prior art keywords
cores
circumferential direction
wound around
utility
processing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13179886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0650543Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986131798U priority Critical patent/JPH0650543Y2/ja
Publication of JPS6339170U publication Critical patent/JPS6339170U/ja
Application granted granted Critical
Publication of JPH0650543Y2 publication Critical patent/JPH0650543Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1986131798U 1986-08-27 1986-08-27 プラズマ処理装置 Expired - Lifetime JPH0650543Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986131798U JPH0650543Y2 (ja) 1986-08-27 1986-08-27 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986131798U JPH0650543Y2 (ja) 1986-08-27 1986-08-27 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6339170U true JPS6339170U (US06650917-20031118-M00005.png) 1988-03-14
JPH0650543Y2 JPH0650543Y2 (ja) 1994-12-21

Family

ID=31030583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986131798U Expired - Lifetime JPH0650543Y2 (ja) 1986-08-27 1986-08-27 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0650543Y2 (US06650917-20031118-M00005.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372790A (en) * 1976-12-10 1978-06-28 Hitachi Ltd Evaporating apparatus by sputtering
JPS57192267A (en) * 1981-05-19 1982-11-26 Toshiba Corp Dry etching apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372790A (en) * 1976-12-10 1978-06-28 Hitachi Ltd Evaporating apparatus by sputtering
JPS57192267A (en) * 1981-05-19 1982-11-26 Toshiba Corp Dry etching apparatus

Also Published As

Publication number Publication date
JPH0650543Y2 (ja) 1994-12-21

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