JPS6339164U - - Google Patents
Info
- Publication number
- JPS6339164U JPS6339164U JP12932386U JP12932386U JPS6339164U JP S6339164 U JPS6339164 U JP S6339164U JP 12932386 U JP12932386 U JP 12932386U JP 12932386 U JP12932386 U JP 12932386U JP S6339164 U JPS6339164 U JP S6339164U
- Authority
- JP
- Japan
- Prior art keywords
- target material
- shield
- high voltage
- target
- voltage electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013077 target material Substances 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000005477 sputtering target Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129323U JPH0220210Y2 (US07923587-20110412-C00022.png) | 1986-08-25 | 1986-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129323U JPH0220210Y2 (US07923587-20110412-C00022.png) | 1986-08-25 | 1986-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6339164U true JPS6339164U (US07923587-20110412-C00022.png) | 1988-03-14 |
| JPH0220210Y2 JPH0220210Y2 (US07923587-20110412-C00022.png) | 1990-06-01 |
Family
ID=31025800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986129323U Expired JPH0220210Y2 (US07923587-20110412-C00022.png) | 1986-08-25 | 1986-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220210Y2 (US07923587-20110412-C00022.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113734A (ja) * | 1983-11-26 | 1985-06-20 | Fukashi Uragami | 四輪駆動車両 |
| JPH0413868A (ja) * | 1990-05-02 | 1992-01-17 | Anelva Corp | スパッタリング装置 |
| JP2008001988A (ja) * | 2006-06-23 | 2008-01-10 | Applied Materials Inc | 改善されたｐｖｄターゲット |
| JP2013528706A (ja) * | 2010-05-14 | 2013-07-11 | アプライド マテリアルズ インコーポレイテッド | 改善された粒子低減のためのプロセスキットシールド |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58497U (ja) * | 1981-06-26 | 1983-01-05 | 株式会社日立製作所 | ア−スシ−ルド板 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58497B2 (ja) * | 1975-11-04 | 1983-01-06 | 新日本製鐵株式会社 | ケツシヨウスイオフクムコウセキニヨル シヨウケツコウ ノ セイゾウホウホウ |
-
1986
- 1986-08-25 JP JP1986129323U patent/JPH0220210Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58497U (ja) * | 1981-06-26 | 1983-01-05 | 株式会社日立製作所 | ア−スシ−ルド板 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113734A (ja) * | 1983-11-26 | 1985-06-20 | Fukashi Uragami | 四輪駆動車両 |
| JPH0413868A (ja) * | 1990-05-02 | 1992-01-17 | Anelva Corp | スパッタリング装置 |
| JP2008001988A (ja) * | 2006-06-23 | 2008-01-10 | Applied Materials Inc | 改善されたｐｖｄターゲット |
| JP2013528706A (ja) * | 2010-05-14 | 2013-07-11 | アプライド マテリアルズ インコーポレイテッド | 改善された粒子低減のためのプロセスキットシールド |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220210Y2 (US07923587-20110412-C00022.png) | 1990-06-01 |
