JPS6338951Y2 - - Google Patents
Info
- Publication number
- JPS6338951Y2 JPS6338951Y2 JP18864781U JP18864781U JPS6338951Y2 JP S6338951 Y2 JPS6338951 Y2 JP S6338951Y2 JP 18864781 U JP18864781 U JP 18864781U JP 18864781 U JP18864781 U JP 18864781U JP S6338951 Y2 JPS6338951 Y2 JP S6338951Y2
- Authority
- JP
- Japan
- Prior art keywords
- coupler
- face
- ultrasonic
- plate
- resonant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000889 atomisation Methods 0.000 claims description 10
- 238000005452 bending Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 description 15
- 239000000446 fuel Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
Landscapes
- Special Spraying Apparatus (AREA)
- Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18864781U JPS5893631U (ja) | 1981-12-19 | 1981-12-19 | 超音波霧化装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18864781U JPS5893631U (ja) | 1981-12-19 | 1981-12-19 | 超音波霧化装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5893631U JPS5893631U (ja) | 1983-06-24 |
JPS6338951Y2 true JPS6338951Y2 (zh) | 1988-10-13 |
Family
ID=29992377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18864781U Granted JPS5893631U (ja) | 1981-12-19 | 1981-12-19 | 超音波霧化装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5893631U (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2604850B2 (ja) * | 1989-03-31 | 1997-04-30 | 松下電器産業株式会社 | スパッタ装置および薄膜製造方法 |
-
1981
- 1981-12-19 JP JP18864781U patent/JPS5893631U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5893631U (ja) | 1983-06-24 |
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