JPS6338330U - - Google Patents

Info

Publication number
JPS6338330U
JPS6338330U JP13053186U JP13053186U JPS6338330U JP S6338330 U JPS6338330 U JP S6338330U JP 13053186 U JP13053186 U JP 13053186U JP 13053186 U JP13053186 U JP 13053186U JP S6338330 U JPS6338330 U JP S6338330U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing jig
semiconductor
arrangement direction
wafer arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13053186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13053186U priority Critical patent/JPS6338330U/ja
Publication of JPS6338330U publication Critical patent/JPS6338330U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Packaging Frangible Articles (AREA)
JP13053186U 1986-08-27 1986-08-27 Pending JPS6338330U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13053186U JPS6338330U (en:Method) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13053186U JPS6338330U (en:Method) 1986-08-27 1986-08-27

Publications (1)

Publication Number Publication Date
JPS6338330U true JPS6338330U (en:Method) 1988-03-11

Family

ID=31028120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13053186U Pending JPS6338330U (en:Method) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPS6338330U (en:Method)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61111557A (ja) * 1984-11-06 1986-05-29 Mitsubishi Electric Corp 半導体ウエハの移し替え装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61111557A (ja) * 1984-11-06 1986-05-29 Mitsubishi Electric Corp 半導体ウエハの移し替え装置

Similar Documents

Publication Publication Date Title
JPS6338330U (en:Method)
JPS62154646U (en:Method)
JPS62106867U (en:Method)
JPS63110042U (en:Method)
JPS62179255U (en:Method)
JPH01139436U (en:Method)
JPS6389247U (en:Method)
JPS63177047U (en:Method)
JPS63119245U (en:Method)
JPS6190785U (en:Method)
JPS5863755U (ja) 半導体製造治具
JPS6331038U (en:Method)
JPS6169832U (en:Method)
JPH0170337U (en:Method)
JPS58194125U (ja) パレツト
JPS62177036U (en:Method)
JPH01139435U (en:Method)
JPS5823809U (ja) 半導体ウエ−ハ搬送用シユ−ト
JPH0173925U (en:Method)
JPS605130U (ja) 半導体ウエハ用キヤリヤ
JPS60151135U (ja) ウエ−ハキヤリヤ
JPS61121739U (en:Method)
JPS6252933U (en:Method)
JPS58157549U (ja) ワ−ク搬送台
JPS58153447U (ja) ワ−ク整列治具