JPS6336217A - Diffraction grating for varying quantity of light - Google Patents

Abstract

PURPOSE:To obtain a grating adequate for a light control means by preliminarily forming plural sets, each set of which consists of two lines of conductive films paralleled adjacently to each other on an insulating substrate in such a manner that said films are spaced from each other and covering the regions from the central region sandwiched by the film and film constituting the set to the similar region continuous thereto with flat plate members respectively consisting of piezoelectric materials. CONSTITUTION:Plural sets of the set 21 consisting of two lines of the conductive films paralleled adjacently to each other are spaced from each other via 20-50mum intermediate regions 22 and are formed on the surface of the insulating substrate 1 consisting of SiO2, etc. The flat plate members 3 of the piezo-electric materials consisting of Pb(Zr, Ti)O3 of about 1,000Angstrom thickness are pressed to the intermediate regions 22 from the middle of two lines of the films 2 to the middle of the adjacent films 2 in a manner that the members do not contact each other. The means for controlling quantity of light which can control the quantity of light continuously by passing the electric current of the controlled magnitude to the members 3 to deform the surface of the members 3 to wave or wrinkle shapes is obtd. by constituting the grating in the above-mentioned manner.

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] This is a variable light amount diffraction grating used to adjust the tip of a laser irradiation device, etc.

On an insulating substrate, a plurality of pairs of two conductive films adjacent to each other and parallel to each other are formed separated by one phase 1j, and -1-
The insulating substrate 1- of 1-1, so as to cover the area from the central area of the area sandwiched between the conductive films constituting the group to the similar area next to it, Another object of the present invention is to construct a variable light amount diffraction grating that can be used as a light amount adjusting means by bringing a plurality of piezoelectric plate-shaped members into contact with each other so as not to contact each other.

[Industrial application field]

The present invention relates to a variable light amount diffraction grating. In particular, the present invention relates to a variable light amount diffraction grating that can be used as a light amount adjusting means.

[Conventional technology]

When using light, it is generally necessary to adjust the amount of light. However, with the exception of incandescent lamps, it is not always easy to adjust the amount of light as a light source.

In particular, with lasers and the like, it is nearly impossible to adjust the amount of light. Therefore, conventionally, filters and apertures have been mainly used as light amount adjusting means.

[Problem that the invention seeks to solve]

Light intensity adjustment means such as filters and apertures generally have complex mechanisms, large external dimensions, and are inconvenient to handle.In particular, filters have drawbacks such as the impossibility of continuously adjusting the light intensity. It was hard to escape. Furthermore, it is naturally impossible to automatically correct an unexpected change in the amount of light from the light source.

The purpose of the present invention is to eliminate these drawbacks,
A light amount adjustment means having the advantage of having a small external size, easy handling, and being able to continuously adjust the light amount, and also be able to automatically adjust the light amount as necessary. The purpose of the present invention is to provide a variable light amount diffraction grating that can be used as a light amount variable diffraction grating.

[Means for solving problems]

The means taken by the present invention to achieve the above object are as follows: As shown in the exploded perspective view of FIG.
A plurality of sets 21 of two conductor films 2 adjacent to each other and parallel to each other are formed spaced apart from each other, and a central region of the two conductor films 2 (two conductor films 2 It covers the area 22 from the center area of the area sandwiched between the conductor M 2 and the conductor film 2 constituting the group 21 to the middle area between the two adjacent conductor films 2. Then, the above insulating substrate l
Second, a plurality of piezoelectric plate-like members 3 are brought into contact with each other so as not to contact each other to form a variable light amount diffraction grating.

Nao, the piezoelectric material is Pb (Zr, 'r+) 0
PZT, PLZT, etc. of grade 3 are suitable.

[Effect]

The flat plate member 3 made of piezoelectric material has the property of expanding in the direction of current when electricity is applied to it, so as shown in FIG. 2 as the positive electrode 4 and the other conductor film 2 as the negative electrode 5, when electricity is applied, the piezoelectric flat plate members 3 are brought into contact with each other and deformed as shown in the figure, and their surfaces are no longer flat. Become wavy or wrinkled. Moreover, the degree of this wavy or wrinkled shape can be controlled by controlling the magnitude of the current applied to the flat plate member 3 made of piezoelectric material.

Therefore, when this wavy or wrinkled surface is irradiated with light, the plurality of piezoelectric flat plate members 3 function as a diffraction grating, and the amount of reflected light R responds to the degree of the wavy or wrinkled surface. and decrease.

In this way, the amount of reflected light R can be controlled by controlling and changing the current flowing through the flat plate member 3 made of piezoelectric material.

〔Example〕

Hereinafter, a variable light amount diffraction grating according to an embodiment of the present invention will be further described with reference to the drawings.

Refer to FIG. 1 again. On an insulating substrate 1 made of silicon dioxide or the like, a plurality of sets 21 of two conductor films 2 adjacent to each other and parallel to each other are arranged.
-50 ILm apart.

A region between two conductive films 2 (two conductive films 2
to cover the area 22 from the center area of the area sandwiched between the conductor films 2 constituting the group 21 to the middle area between the two adjacent conductor films 2. , a piezoelectric material P b (Z r , T t
) A plurality of flat plate members 3 made of PZT, PLZT, etc., such as Oa, are brought into contact with an insulating substrate l'- without contacting each other and, if necessary, being insulated from each other.

Refer to Figure 2 again One conductor film 2 constituting a set 21 of two conductor films 2
A variable light amount diffraction grating is manufactured by using the conductor film 2 as the positive electrode 4 and the other conductive film 2 as the negative electrode 5.

Positive electrode 4 of the light quantity variable diffraction grating manufactured as above
When electricity is applied between the negative electrode 5 and the piezoelectric flat plate member 3
are stretched and abutted against each other, deforming as shown so that their surfaces are no longer flat and become wavy or wrinkled. Moreover, the degree of this wavy or wrinkled shape can be controlled by controlling the magnitude of the current applied to the flat plate member 3 made of piezoelectric material.

When the light@tunable diffraction grating manufactured as described above is irradiated with incident light as shown with L, the amount of reflected light R decreases in response to the degree of wavy or wrinkled shape. Therefore, the amount of reflected light R can be controlled by controlling and changing the current flowing through the flat plate member 3 made of piezoelectric material.
By using this reflected light R, it is possible to continuously adjust the amount of light.

〔Effect of the invention〕

As explained above, the variable light amount diffraction grating according to the present invention includes a plurality of sets of two conductive films adjacent to each other and parallel to each other and spaced apart from each other on an insulating substrate. The conductor films are placed on the insulating substrate and in contact with each other so as to cover an area from the center area of the area sandwiched between the conductor films constituting the above group to a similar area next to it. Since the structure is made up of a plurality of piezoelectric plate-shaped members in contact with each other to prevent The surface is controlled to be wavy or wrinkled, the external dimensions are small, easy to handle, and the amount of light can be continuously adjusted.
Further, it can be used as a light μ adjusting means that can also automatically adjust the amount of light if necessary.

[Brief explanation of drawings]

FIG. 1 is an exploded perspective view of a variable light amount diffraction grating according to an embodiment of the present invention. FIG. 2B2 is an explanatory diagram (cross-sectional view) of the operation of a variable light amount diffraction grating according to an embodiment of the present invention. - Insulating substrate, 2... Two conductive films, 21◆... Set of two conductive films, 22... Between central regions of sets of two conductive films. area, 3.φ.flat plate-shaped member of piezoelectric material, 4..positive electrode.

Claims (1)

[Claims] A set (2) of two conductor films (2) that are adjacent and parallel to each other.
An insulating substrate (1) formed by forming a plurality of sets of 1) spaced apart from each other, and a set (21) of two conductive films (2) adjacent to each other and parallel to each other, the central regions of the set (21) are mutually adjacent to each other. The area between (22
) A plurality of flat plate-like members (3) made of piezoelectric material are provided on the insulating substrate (1) so as to be in contact with each other without contacting each other. Variable light intensity diffraction grating.