JPS6336035U - - Google Patents

Info

Publication number
JPS6336035U
JPS6336035U JP12908186U JP12908186U JPS6336035U JP S6336035 U JPS6336035 U JP S6336035U JP 12908186 U JP12908186 U JP 12908186U JP 12908186 U JP12908186 U JP 12908186U JP S6336035 U JPS6336035 U JP S6336035U
Authority
JP
Japan
Prior art keywords
drive shaft
partition wall
drive
utility
vacuum chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12908186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0642330Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986129081U priority Critical patent/JPH0642330Y2/ja
Publication of JPS6336035U publication Critical patent/JPS6336035U/ja
Application granted granted Critical
Publication of JPH0642330Y2 publication Critical patent/JPH0642330Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1986129081U 1986-08-25 1986-08-25 駆動装置 Expired - Lifetime JPH0642330Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986129081U JPH0642330Y2 (ja) 1986-08-25 1986-08-25 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986129081U JPH0642330Y2 (ja) 1986-08-25 1986-08-25 駆動装置

Publications (2)

Publication Number Publication Date
JPS6336035U true JPS6336035U (enrdf_load_stackoverflow) 1988-03-08
JPH0642330Y2 JPH0642330Y2 (ja) 1994-11-02

Family

ID=31025334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986129081U Expired - Lifetime JPH0642330Y2 (ja) 1986-08-25 1986-08-25 駆動装置

Country Status (1)

Country Link
JP (1) JPH0642330Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017546A (ja) * 2001-06-29 2003-01-17 Nsk Ltd 位置決め装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148827A (en) * 1980-04-21 1981-11-18 Hitachi Ltd Shifting mechanism for sample of electron ray device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148827A (en) * 1980-04-21 1981-11-18 Hitachi Ltd Shifting mechanism for sample of electron ray device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017546A (ja) * 2001-06-29 2003-01-17 Nsk Ltd 位置決め装置

Also Published As

Publication number Publication date
JPH0642330Y2 (ja) 1994-11-02

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