JPS6336033U - - Google Patents
Info
- Publication number
- JPS6336033U JPS6336033U JP12711686U JP12711686U JPS6336033U JP S6336033 U JPS6336033 U JP S6336033U JP 12711686 U JP12711686 U JP 12711686U JP 12711686 U JP12711686 U JP 12711686U JP S6336033 U JPS6336033 U JP S6336033U
- Authority
- JP
- Japan
- Prior art keywords
- mark
- alignment
- alignment mark
- dimensions
- marks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12711686U JPS6336033U (tr) | 1986-08-22 | 1986-08-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12711686U JPS6336033U (tr) | 1986-08-22 | 1986-08-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6336033U true JPS6336033U (tr) | 1988-03-08 |
Family
ID=31021558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12711686U Pending JPS6336033U (tr) | 1986-08-22 | 1986-08-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6336033U (tr) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5612745A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Production of semiconductor device |
JPS57112021A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS59188648A (ja) * | 1983-04-11 | 1984-10-26 | Oki Electric Ind Co Ltd | マスク合せキ− |
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1986
- 1986-08-22 JP JP12711686U patent/JPS6336033U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5612745A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Production of semiconductor device |
JPS57112021A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS59188648A (ja) * | 1983-04-11 | 1984-10-26 | Oki Electric Ind Co Ltd | マスク合せキ− |