JPS6335434U - - Google Patents
Info
- Publication number
- JPS6335434U JPS6335434U JP12958686U JP12958686U JPS6335434U JP S6335434 U JPS6335434 U JP S6335434U JP 12958686 U JP12958686 U JP 12958686U JP 12958686 U JP12958686 U JP 12958686U JP S6335434 U JPS6335434 U JP S6335434U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- combustion
- ultrafine powder
- suspended
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 4
- 239000002994 raw material Substances 0.000 claims 4
- 238000002485 combustion reaction Methods 0.000 claims 3
- 239000000843 powder Substances 0.000 claims 3
- 239000000919 ceramic Substances 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000000567 combustion gas Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 238000003786 synthesis reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第1図、第2図はそれぞれ本考案の実施例を示
すブロツク図、第3図、第4図は従来の実施例を
示すブロツク図である。
FIGS. 1 and 2 are block diagrams showing an embodiment of the present invention, and FIGS. 3 and 4 are block diagrams showing a conventional embodiment.
Claims (1)
微粉末セラミツクス原料製造装置において、水素
を含有する排気ガスを燃焼する燃焼装置を設け、
前記燃焼装置の高温燃焼ガスを原料ガス又は超微
粉末を浮遊する反応ガス予熱装置及び超微粉末を
浮遊する反応ガスの気相加熱装置に導入するよう
に構成されたことを特徴とする超微粉末セラミツ
クス原料の製造装置。 In an apparatus for producing ultrafine powder ceramic raw materials by vapor phase synthesis using silane gas as a raw material gas, a combustion device is installed to burn exhaust gas containing hydrogen,
The ultrafine combustion apparatus is characterized in that the high temperature combustion gas of the combustion device is introduced into a reaction gas preheating device in which raw material gas or ultrafine powder is suspended, and a vapor phase heating device for the reaction gas in which ultrafine powder is suspended. Manufacturing equipment for powdered ceramic raw materials.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12958686U JPS6335434U (en) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12958686U JPS6335434U (en) | 1986-08-27 | 1986-08-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6335434U true JPS6335434U (en) | 1988-03-07 |
Family
ID=31026288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12958686U Pending JPS6335434U (en) | 1986-08-27 | 1986-08-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6335434U (en) |
-
1986
- 1986-08-27 JP JP12958686U patent/JPS6335434U/ja active Pending
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