JPS6335434U - - Google Patents

Info

Publication number
JPS6335434U
JPS6335434U JP12958686U JP12958686U JPS6335434U JP S6335434 U JPS6335434 U JP S6335434U JP 12958686 U JP12958686 U JP 12958686U JP 12958686 U JP12958686 U JP 12958686U JP S6335434 U JPS6335434 U JP S6335434U
Authority
JP
Japan
Prior art keywords
gas
combustion
ultrafine powder
suspended
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12958686U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12958686U priority Critical patent/JPS6335434U/ja
Publication of JPS6335434U publication Critical patent/JPS6335434U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図はそれぞれ本考案の実施例を示
すブロツク図、第3図、第4図は従来の実施例を
示すブロツク図である。
FIGS. 1 and 2 are block diagrams showing an embodiment of the present invention, and FIGS. 3 and 4 are block diagrams showing a conventional embodiment.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] シランガスを原料ガスとした気相合成による超
微粉末セラミツクス原料製造装置において、水素
を含有する排気ガスを燃焼する燃焼装置を設け、
前記燃焼装置の高温燃焼ガスを原料ガス又は超微
粉末を浮遊する反応ガス予熱装置及び超微粉末を
浮遊する反応ガスの気相加熱装置に導入するよう
に構成されたことを特徴とする超微粉末セラミツ
クス原料の製造装置。
In an apparatus for producing ultrafine powder ceramic raw materials by vapor phase synthesis using silane gas as a raw material gas, a combustion device is installed to burn exhaust gas containing hydrogen,
The ultrafine combustion apparatus is characterized in that the high temperature combustion gas of the combustion device is introduced into a reaction gas preheating device in which raw material gas or ultrafine powder is suspended, and a vapor phase heating device for the reaction gas in which ultrafine powder is suspended. Manufacturing equipment for powdered ceramic raw materials.
JP12958686U 1986-08-27 1986-08-27 Pending JPS6335434U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12958686U JPS6335434U (en) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12958686U JPS6335434U (en) 1986-08-27 1986-08-27

Publications (1)

Publication Number Publication Date
JPS6335434U true JPS6335434U (en) 1988-03-07

Family

ID=31026288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12958686U Pending JPS6335434U (en) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPS6335434U (en)

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