JPS6334393U - - Google Patents
Info
- Publication number
- JPS6334393U JPS6334393U JP12738486U JP12738486U JPS6334393U JP S6334393 U JPS6334393 U JP S6334393U JP 12738486 U JP12738486 U JP 12738486U JP 12738486 U JP12738486 U JP 12738486U JP S6334393 U JPS6334393 U JP S6334393U
- Authority
- JP
- Japan
- Prior art keywords
- stator
- rotor
- circumferential direction
- large number
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005452 bending Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12738486U JPS6334393U (de) | 1986-08-20 | 1986-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12738486U JPS6334393U (de) | 1986-08-20 | 1986-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6334393U true JPS6334393U (de) | 1988-03-05 |
Family
ID=31022085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12738486U Pending JPS6334393U (de) | 1986-08-20 | 1986-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6334393U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006090231A (ja) * | 2004-09-24 | 2006-04-06 | Boc Edwards Kk | ターボ分子ポンプ固定翼の製造方法および真空ポンプ |
| WO2006137333A1 (ja) * | 2005-06-22 | 2006-12-28 | Edwards Japan Limited | ターボ分子ポンプ、およびターボ分子ポンプの組み立て方法 |
| WO2007004542A1 (ja) * | 2005-07-01 | 2007-01-11 | Boc Edwards Japan Limited | ターボ分子ポンプ |
-
1986
- 1986-08-20 JP JP12738486U patent/JPS6334393U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006090231A (ja) * | 2004-09-24 | 2006-04-06 | Boc Edwards Kk | ターボ分子ポンプ固定翼の製造方法および真空ポンプ |
| WO2006137333A1 (ja) * | 2005-06-22 | 2006-12-28 | Edwards Japan Limited | ターボ分子ポンプ、およびターボ分子ポンプの組み立て方法 |
| WO2007004542A1 (ja) * | 2005-07-01 | 2007-01-11 | Boc Edwards Japan Limited | ターボ分子ポンプ |
| JP5276321B2 (ja) * | 2005-07-01 | 2013-08-28 | エドワーズ株式会社 | ターボ分子ポンプ |