JPS6333554U - - Google Patents
Info
- Publication number
- JPS6333554U JPS6333554U JP12800086U JP12800086U JPS6333554U JP S6333554 U JPS6333554 U JP S6333554U JP 12800086 U JP12800086 U JP 12800086U JP 12800086 U JP12800086 U JP 12800086U JP S6333554 U JPS6333554 U JP S6333554U
- Authority
- JP
- Japan
- Prior art keywords
- ion pump
- power supply
- supply device
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第1図は本考案の一実施例の構成図、第2図は
イオンポンプの起動状態を説明するための図、第
3図はイオンポンプよりの放出ガスを説明するた
めの図である。
1:スイツチ、2:〓スライダツク〓、3:ト
ランス、4:直流高圧発生部、5:モータ、6:
モータ駆動回路、7:調整器、8:制御回路、9
:保護回路、AC:商用電源、B:イオンポンプ
、P:ペニング真空計。
FIG. 1 is a block diagram of an embodiment of the present invention, FIG. 2 is a diagram for explaining the starting state of the ion pump, and FIG. 3 is a diagram for explaining the gas discharged from the ion pump. 1: Switch, 2: Slider, 3: Transformer, 4: DC high pressure generator, 5: Motor, 6:
Motor drive circuit, 7: Regulator, 8: Control circuit, 9
: Protection circuit, AC: Commercial power supply, B: Ion pump, P: Penning vacuum gauge.
Claims (1)
に高圧を印加するイオンポンプ電源装置において
、該電源の始動に伴つて該イオンポンプに印加す
る電圧を自動的に徐々に上昇させるための手段を
備えることを特徴とするイオンポンプ電源装置。 (2) 前記手段による電圧上昇の傾きを変化させ
る手段を備える前記実用新案登録請求の範囲第(1
)項記載のイオンポンプ電源装置。[Claims for Utility Model Registration] (1) In an ion pump power supply device that applies high pressure to the ion pump in order to operate the pump, the voltage applied to the ion pump is automatically gradually increased as the power supply starts. An ion pump power supply device characterized by comprising means for raising the ion pump to . (2) Utility model registration claim No. 1, which includes means for changing the slope of voltage increase by the means
) The ion pump power supply device described in item ).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12800086U JPS6333554U (en) | 1986-08-22 | 1986-08-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12800086U JPS6333554U (en) | 1986-08-22 | 1986-08-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6333554U true JPS6333554U (en) | 1988-03-04 |
Family
ID=31023272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12800086U Pending JPS6333554U (en) | 1986-08-22 | 1986-08-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6333554U (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6053157B2 (en) * | 1980-10-14 | 1985-11-22 | エレクトリツク パワ− リサ−チ インスチテユ−ト インコ−ポレ−テツド | Drilling device and method for underground cable replacement and removal |
-
1986
- 1986-08-22 JP JP12800086U patent/JPS6333554U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6053157B2 (en) * | 1980-10-14 | 1985-11-22 | エレクトリツク パワ− リサ−チ インスチテユ−ト インコ−ポレ−テツド | Drilling device and method for underground cable replacement and removal |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5991486U (en) | pump control device | |
JPS6333554U (en) | ||
JPS6383999U (en) | ||
JPS6196790U (en) | ||
JPS6284394U (en) | ||
JPS6170342U (en) | ||
JPS6371495U (en) | ||
JPS62104533U (en) | ||
JPS6153849U (en) | ||
JPS6426341U (en) | ||
JPS6251993U (en) | ||
JPS6196792U (en) | ||
JPS61159729U (en) | ||
JPH0210641U (en) | ||
JPS61161945U (en) | ||
JPS6355798U (en) | ||
JPS6240440U (en) | ||
JPH0383443U (en) | ||
JPS5323412A (en) | Voltage switching device | |
JPH0232135U (en) | ||
JPS602158U (en) | Supply/exhaust fan capacity control circuit | |
JPS61162138U (en) | ||
JPS61141940U (en) | ||
JPS62111563U (en) | ||
JPS6430692U (en) |