JPS6153849U - - Google Patents
Info
- Publication number
- JPS6153849U JPS6153849U JP13808684U JP13808684U JPS6153849U JP S6153849 U JPS6153849 U JP S6153849U JP 13808684 U JP13808684 U JP 13808684U JP 13808684 U JP13808684 U JP 13808684U JP S6153849 U JPS6153849 U JP S6153849U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum apparatus
- discharge
- voltage
- discharge gap
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002265 prevention Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
図面は本考案の一実施例装置の回路図である。 The drawing is a circuit diagram of a device according to an embodiment of the present invention.
Claims (1)
の圧力が或る範囲になつたとき上記放電間隙に発
生するグロー放電の放電電流を検出して真空装置
本体側の高圧電源をOFFする構成で、上記放電
間隙に印加する直流電圧の電源回路を交流を倍圧
整流回路で昇圧直流化する回路とした真空装置に
おける放電防止装置。 A discharge gap is provided in the vacuum apparatus main body, and when the pressure within the vacuum apparatus reaches a certain range, the discharge current of glow discharge generated in the discharge gap is detected and the high voltage power supply on the vacuum apparatus main body side is turned off. A discharge prevention device for a vacuum apparatus, wherein the power supply circuit for the DC voltage applied to the discharge gap is a circuit that converts AC into DC voltage by a voltage doubler rectifier circuit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984138086U JPH0446365Y2 (en) | 1984-09-11 | 1984-09-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984138086U JPH0446365Y2 (en) | 1984-09-11 | 1984-09-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6153849U true JPS6153849U (en) | 1986-04-11 |
JPH0446365Y2 JPH0446365Y2 (en) | 1992-10-30 |
Family
ID=30696482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984138086U Expired JPH0446365Y2 (en) | 1984-09-11 | 1984-09-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0446365Y2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51128000A (en) * | 1975-04-30 | 1976-11-08 | Hitachi Ltd | Discharge protection device |
JPS527783A (en) * | 1975-07-09 | 1977-01-21 | Hitachi Ltd | Vacuum deterioration detecting device for vacuum breaker |
JPS5258575A (en) * | 1975-11-08 | 1977-05-14 | Japan Radio Co Ltd | Apparatus for measuring vacuum degree of vacuum switch valve |
-
1984
- 1984-09-11 JP JP1984138086U patent/JPH0446365Y2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51128000A (en) * | 1975-04-30 | 1976-11-08 | Hitachi Ltd | Discharge protection device |
JPS527783A (en) * | 1975-07-09 | 1977-01-21 | Hitachi Ltd | Vacuum deterioration detecting device for vacuum breaker |
JPS5258575A (en) * | 1975-11-08 | 1977-05-14 | Japan Radio Co Ltd | Apparatus for measuring vacuum degree of vacuum switch valve |
Also Published As
Publication number | Publication date |
---|---|
JPH0446365Y2 (en) | 1992-10-30 |