JPS6333436B2 - - Google Patents
Info
- Publication number
- JPS6333436B2 JPS6333436B2 JP58238487A JP23848783A JPS6333436B2 JP S6333436 B2 JPS6333436 B2 JP S6333436B2 JP 58238487 A JP58238487 A JP 58238487A JP 23848783 A JP23848783 A JP 23848783A JP S6333436 B2 JPS6333436 B2 JP S6333436B2
- Authority
- JP
- Japan
- Prior art keywords
- oil
- separation tank
- electrode plates
- wastewater
- water separation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 24
- 239000002351 wastewater Substances 0.000 claims description 19
- 238000000926 separation method Methods 0.000 claims description 17
- 238000000746 purification Methods 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 6
- 239000005416 organic matter Substances 0.000 description 5
- 238000005342 ion exchange Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000084 colloidal system Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000003995 emulsifying agent Substances 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000693 micelle Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
- C02F1/463—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis by electrocoagulation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/46—Apparatus for electrochemical processes
- C02F2201/461—Electrolysis apparatus
- C02F2201/46105—Details relating to the electrolytic devices
- C02F2201/4612—Controlling or monitoring
- C02F2201/46125—Electrical variables
- C02F2201/4613—Inversing polarity
Landscapes
- Water Treatment By Electricity Or Magnetism (AREA)
Description
【発明の詳細な説明】
本発明は、例えば自動車等の洗浄を行なつた後
の廃水の如き油分及び浮遊物等を多量に含んだ廃
水を再利用可能とする如く浄化することを主たる
目的とする廃水浄化装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The main purpose of the present invention is to purify wastewater containing a large amount of oil and suspended matter, such as wastewater after washing automobiles, etc., so that it can be reused. The present invention relates to wastewater purification equipment.
自動車に対する洗浄を行なつた後の洗車廃水に
は、無機酸化物の疎水性コロイド、泥土より抽出
されてくるフミン酸鉄、並びに洗車時に使用する
洗剤（乳化剤となる）によつて油分が白濁してミ
セルとなつて分散している。すなわち、洗車廃水
には浮遊物質、油及び洗剤によつて微粒の油分が
ヘルムホルツ二重層を形成して非常に安定した状
態となつて白濁している。 After washing a car, the waste water from the car wash has a cloudy oil content due to hydrophobic colloids of inorganic oxides, iron humate extracted from mud, and the detergent (which acts as an emulsifier) used during car washing. and become micelles and disperse. That is, fine particles of oil in car wash wastewater form a Helmholtz double layer due to suspended substances, oil, and detergent, resulting in a very stable state and a cloudy appearance.
本発明は、上述した如き洗車廃水に対して電極
板を利用して電気的に電子を与えて中和せしめる
ことによつて、水和膜を除去してこれを等電点に
至らせ、以つて、油分を水から分離させて該油分
を完全に除去する如き方式採用の廃水浄化装置に
係るものであつて、本発明の特徴とする処は、上
記した電極板に対する有機物付着に基くイオン交
換の阻害性と云う問題発生の解消化を図つたこと
にある。 The present invention uses electrode plates to electrically supply electrons to the above-mentioned car wash wastewater to neutralize it, thereby removing the hydration film and bringing it to the isoelectric point. The present invention relates to a wastewater purification device that employs a method of separating oil from water and completely removing the oil. The aim is to eliminate the problem of hindrance.
以下、本発明の構成を図面について詳細に説明
する。 Hereinafter, the configuration of the present invention will be explained in detail with reference to the drawings.
第１図は本発明の一実施形態を示したものであ
り、同図に於て、１は廃水導入用パイプ、２は該
パイプ１を介して導入された廃水を過するため
のフイルターである。３は廃水案内路、４は該案
内路３と下端部に於て連通させた電気的油水分離
槽であつて、その底面には該分離槽４内を曝気雰
囲気に保つための気泡発生機構が形成されてい
る。尚、第１図に示す実施例にあつては底板４ａ
に無数の小孔４ｂ，４ｂ……を穿設すると共にそ
の下面に貯気室４ｃを形成し、該貯気室４ｃ内に
供気パイプ４ｄを介して空気を送り込むことに依
り小孔４ｂ，４ｂ……からの空気噴出に基き分離
槽４内に気泡群を発生させるように構成してある
が、これ以外、例えば、多数の空気噴出孔を穿設
したパイプを槽底に配設するか、適宜発泡用盤体
を槽底に設置する等なしても良い。すなわち、油
水分離槽４内を気泡群発生に基く曝気雰囲気に保
たれるものであれば如何なる手段であつても良
い。 FIG. 1 shows an embodiment of the present invention, in which 1 is a pipe for introducing waste water, and 2 is a filter for passing the waste water introduced through the pipe 1. . Reference numeral 3 denotes a wastewater guideway, and 4 an electric oil-water separation tank connected to the guideway 3 at its lower end, and a bubble generating mechanism is provided on the bottom of the separation tank 4 to maintain an aerated atmosphere. It is formed. In addition, in the embodiment shown in FIG. 1, the bottom plate 4a
By drilling countless small holes 4b, 4b, . . . , forming an air storage chamber 4c on the lower surface thereof, and sending air into the air storage chamber 4c through an air supply pipe 4d, the small holes 4b, 4b... The structure is such that a group of bubbles is generated in the separation tank 4 based on the air jetted from 4b..., but in addition to this, for example, a pipe with a large number of air jetting holes may be arranged at the bottom of the tank. Alternatively, a foaming board may be appropriately installed at the bottom of the tank. That is, any means may be used as long as it maintains the inside of the oil-water separation tank 4 in an aerated atmosphere based on the generation of bubble groups.
また、上記した電気的油水分離槽４内には下記
する如き形態を具えた電極板群Ａを収装すると共
に、該分離槽４の上方にしてかつ該槽内収容の廃
水の水位とほぼ一致する位置にスカム除去皿５が
設けられており、該除去皿５を介してすくうが如
くして取出された油滴は不図示の油溜槽に導かれ
るように構成されている。 In addition, an electrode plate group A having the following configuration is housed in the electrical oil-water separation tank 4 described above, and is placed above the separation tank 4 and approximately at the same level as the wastewater contained in the tank. A scum removal tray 5 is provided at a position where the scum removal tray 5 is removed, and the oil droplets scooped out through the scum removal tray 5 are guided to an oil reservoir (not shown).
処で、上記した電極板群Ａであるが、これは本
発明の要部構成とするものであり、以下、該電極
板群Ａの構成を説明する。 Now, the above-mentioned electrode plate group A constitutes a main part of the present invention, and the structure of the electrode plate group A will be explained below.
第１図及び第２図に於て、６，６……はアルミ
ニウム製等の電極板単体であつて、該電極板単体
６，６……は夫々互いに平行する如く仕切り状に
固定化して成るものである。尚、図示の実施例に
あつては該電極板単体は斜状となしてあるが、こ
れを垂直状となしても良い。また、該電極板単体
６，６……は第２図に示す如く互いに隣り合うも
の同志は電極が相違する如き電気的結線が成され
ており、更に該電極はスイツチＳ及びタイマーＴ
を介して所定時間毎に切換えられるように構成し
てある。すなわち、第２図に示す如き状態に於
て、左から奇数番目の電極板単体には（＋）の電
気がまた同偶数番目の電極板単体には（−）の電
気が流されているが、所定時間の経過後はタイマ
ーＴの働きでスイツチＳが切換えられ、各電極板
単体６，６……には上記の逆の電気が流されるよ
うに構成してある。尚、各電極板単体６，６……
に流す電気は、15Vで500mmＡ程度の微電力であ
り、またタイマーＴに基く電極切換え時間は30〜
40分程度である。 In Figs. 1 and 2, 6, 6... are single electrode plates made of aluminum or the like, and the single electrode plates 6, 6... are fixed in a partition shape so as to be parallel to each other. It is something. In the illustrated embodiment, the electrode plate itself is oblique, but it may also be vertical. Further, as shown in FIG. 2, the electrode plates 6, 6, .
It is configured such that it can be switched at predetermined time intervals via. In other words, in the state shown in Figure 2, (+) electricity is flowing through the odd-numbered electrode plates from the left, and (-) electricity is flowing through the even-numbered electrode plates. After a predetermined period of time has elapsed, a switch S is switched by the action of a timer T, and electricity is applied to each electrode plate 6, 6, . . . in the opposite direction. In addition, each electrode plate alone 6, 6...
The electricity flowing through is a minute power of about 500mmA at 15V, and the electrode switching time based on timer T is 30~
It takes about 40 minutes.
上記した電極板群Ａに基く油水分離作用は次の
通りである。 The oil-water separation effect based on the electrode plate group A described above is as follows.
電気的油水分離槽４内に導かれた廃水は、当然
乍ら、油の微粒子の存在によりやや白濁している
が、該油の微粒子の分子について考えると、これ
は第３図に示す如くその外周に（＋）電荷を帯び
た微小な油滴ａであり、かつその外側には該
（＋）電荷に対応する（−）電子を帯びてヘルム
ホルツ二重層を形成しているので、何時までも微
小油滴ａを電子の結合により切り離して浮上する
ことができない。 Naturally, the wastewater introduced into the electrical oil-water separation tank 4 is slightly cloudy due to the presence of oil particles, but if we consider the molecules of the oil particles, this is as shown in Figure 3. It is a minute oil droplet a with a (+) charge on its outer periphery, and a Helmholtz double layer is formed on the outside with (-) electrons corresponding to the (+) charge. The minute oil droplet a cannot be separated and floated by electron bonding.
ところが、前述した如く電気が流されている電
極板単体６，６……の各（＋）極板と（−）極板
間の電位に基き廃水中に（＋）イオンと（−）イ
オンとが発生して、上記油滴ａに於けるヘルムホ
ルツ二重層の外層たる（−）電子と水中の（＋）
イオンとが荷電中和し、かつ同油滴ａの（＋）電
荷と水中の（−）イオンとが荷電中和することと
なり、従つて、ゼーター電位が０、即ち等電点と
なつて微小油滴ａは水と共に上昇し、油滴ａは水
面で水から分離すると共に、スカム除去皿５を介
して取出されるわけである。 However, as mentioned above, based on the potential between the (+) and (-) electrode plates of the single electrode plates 6, 6... to which electricity is flowing, (+) ions and (-) ions are generated in the wastewater. occurs, and the (-) electrons, which are the outer layer of the Helmholtz double layer in the oil droplet a, and the (+) electrons in the water
The ions neutralize the charge, and the (+) charge on the oil droplet a and the (-) ion in the water neutralize the charge. Therefore, the zeta potential becomes 0, that is, the isoelectric point, and becomes extremely small. The oil droplets a rise together with the water, are separated from the water at the water surface, and are taken out through the scum removal pan 5.
一方、上記の如きイオン交換処理中に、（＋）
側の電極板単体表面には、水中のエマルジヨン表
面が（−）に帯電しているため、水中の有機物が
吸着されることとなる。このような有機物が多量
に付着した場合絶縁状態となり、イオン交換処理
に齟齬をきたすこととなるが、その以前にタイマ
ーＴが作動して今迄（＋）側の電極板であつたも
のが（−）側に切換えられることとなり、その有
機物吸着を解消させこれを離脱させることとな
る。更に、このような有機物付着阻止効果は、既
述した如く油水分離槽４内は曝気雰囲気に保たれ
ているため、気泡の上昇力に基き各電極板単体
６，６……に対する洗浄作用が奏されることに依
つても達成化されることとなる。 On the other hand, during the ion exchange treatment as described above, (+)
Since the surface of the emulsion in water is negatively charged (-) on the surface of the single electrode plate on the side, organic matter in the water is adsorbed. If a large amount of such organic matter adheres, it will become insulating and cause a discrepancy in the ion exchange process, but before that happens, the timer T will start and the electrode plate that was on the (+) side will become ( -) side, the organic matter adsorption is eliminated and the organic matter is released. Furthermore, this effect of inhibiting the adhesion of organic substances is achieved because the inside of the oil/water separation tank 4 is maintained in an aerated atmosphere as described above, so that the cleaning action on each electrode plate alone 6, 6, etc. is achieved based on the upward force of the bubbles. It will also be achieved depending on what is done.
７は既述した電気的油水分離槽４の上面に対し
連通用通路８を介してその下面において連通する
如く画設した最終浄化用槽であつて、その内部に
は過用フイルター９が収装されている。１０は
該浄化用槽７の上部に取付けた給水パイプであつ
て、浄化済み水を再利用のため供給するためのも
のである。 Reference numeral 7 denotes a final purification tank which is connected to the upper surface of the electrical oil-water separation tank 4 at its lower surface via a communication passage 8, and an overuse filter 9 is housed inside the tank. has been done. Reference numeral 10 is a water supply pipe attached to the upper part of the purification tank 7, and is for supplying purified water for reuse.
尚、本発明は前記した電気的油水分離槽４部分
の構成に特徴を有するものであり、従つて、他の
部分は適宜な構成であつて可とする。換言する
と、本発明は一連の浄化工程中の所要段に実施す
るものである。 It should be noted that the present invention is characterized by the configuration of the four parts of the electric oil-water separation tank described above, and therefore, the other parts can be configured as appropriate. In other words, the present invention is implemented at required stages in a series of purification steps.
すなわち本発明は互いに平行する仕切り状に固
定化して成る所要枚数の電極板単体６，６……
に、互いに隣り合うもの同志は異なる極の電気が
通電されるような電気的結線を施し、かつ、該電
極板単体６，６……に対する通電を所定時間毎に
（＋）（−）の電極を切換えるためのタイマーＴを
具え、更に、その内部が気泡発生に基く曝気雰囲
気に保たれるように構成した電気的油水分離槽４
を、一連の浄化工程中の所要段に設けたことを特
徴とする廃水浄化装置を要旨構成とするものであ
る。 That is, in the present invention, a required number of single electrode plates 6, 6, 6, 6, 6, 6...
The adjacent ones are electrically connected so that electricity of different polarities is applied, and electricity is applied to the electrode plates 6, 6... at predetermined intervals between the (+) and (-) electrodes. An electric oil-water separation tank 4 is equipped with a timer T for switching the oil-water separation tank 4 and is further configured to maintain an aerated atmosphere based on the generation of bubbles inside the tank.
The gist of the present invention is a wastewater purification apparatus characterized in that the following are provided at required stages in a series of purification steps.
本発明は上記の如き構成を採用したから、例え
ば自動車に対する洗浄を行なつた後の廃水浄化用
として利用した場合、該廃水中には通常ではその
除去が極めて困難とされる微細な油分に対する浄
化処理が極めて容易に達成化される。また、本発
明にあつては、電極板単体６，６……はその互い
に隣り合うもの同志は異なる極の電気を通電させ
るような電気的結線を施してあるから、在来の如
く電気的に貴卑のある金属板を電極板単体として
用い、両極板の奏する起電力に基きイオン的中和
を成すように構成したものに比して、その効率は
著しく卓越化されるばかりでなく、使用する電極
板単体はすべてアルミニウム製等単一のもので事
足り、在来の如く二種類の金属板を用いなければ
ならないための製造上及び管理上の煩雑性は全く
解消化されることとなる。 Since the present invention employs the above configuration, when it is used for purifying wastewater after washing automobiles, for example, it purifies fine oil components that are normally extremely difficult to remove from the wastewater. Processing is very easily accomplished. Furthermore, in the present invention, since the electrode plates 6, 6, . Compared to a structure that uses a noble metal plate as a single electrode plate and performs ionic neutralization based on the electromotive force produced by the two electrode plates, its efficiency is not only significantly improved, but it is also easier to use. All the electrode plates need to be made of aluminum or the like, and the complexity in manufacturing and management caused by having to use two types of metal plates as in the conventional method can be completely eliminated.
更に本発明は電極板単体６，６……に対する通
電を所定時間毎に（＋）（−）の電極を切換える
ためのタイマーＴを具えているから、電極板単体
に対する有機物付着は各電極板単体の定期的極性
変化に基き良く回避され、これの付着に基きイオ
ン交換処理効率の低下を招くような弊害を絶無と
する。また、電気的油水分離槽４内は気泡発生に
よる曝気雰囲気に保たれているため、気泡の上昇
力に基き各電極板単体６，６……に対する洗浄作
用が奏され前記極性切換えと相俟つて、有機物付
着に基因するイオン交換効率低下と云うような心
配を絶無とする。 Furthermore, since the present invention is equipped with a timer T for switching the current supply to the electrode plates 6, 6, . This is effectively avoided based on the periodic polarity changes of the ions, and there is no adverse effect such as a decrease in ion exchange processing efficiency due to the adhesion of the ions. Furthermore, since the interior of the electrical oil/water separation tank 4 is maintained in an aerated atmosphere due to the generation of bubbles, a cleaning action is exerted on each electrode plate unit 6, 6, etc. based on the rising force of the bubbles, and in conjunction with the polarity switching described above. There is no need to worry about a decrease in ion exchange efficiency due to organic matter adhesion.
本発明は以上のように構成至簡にして卓越した
作用効果を奏するものであるから、廃水浄化装置
としてその利用価値はとみに高いものがある。 As described above, the present invention has a simple structure and exhibits excellent functions and effects, and therefore has high utility value as a wastewater purification device.
第１図は本発明の一実施例とする排水処理装置
の断面図、第２図は本発明の要部たる電極板単体
部分を示す説明用略図、第３図は同電極板単体の
作用を示す説明用略図である。
４……電気的油水分離槽、Ａ……電極板群、６
……電極板単体、Ｓ……スイツチ、Ｔ……タイマ
ー。
Fig. 1 is a cross-sectional view of a wastewater treatment device according to an embodiment of the present invention, Fig. 2 is an explanatory schematic diagram showing a single electrode plate, which is the main part of the present invention, and Fig. 3 is a diagram showing the function of the single electrode plate. FIG. 4... Electric oil/water separation tank, A... Electrode plate group, 6
...Single electrode plate, S...switch, T...timer.
Claims (1)
要枚数の電極板単体６，６……に、互いに隣合う
もの同志は異なる極の電気が通電されるような電
気的結線を施し、かつ、該電極板単体６，６……
に対する通電を所定時間毎に（＋）（−）の電極
を切換えるためのタイマーＴを具えた乳化油含有
廃水浄化用たる電気的油水分離槽４の内部を、上
記電極板単体６，６……に対する洗浄のために気
泡発生に基づく曝気雰囲気に保たれるように構成
し、当該電気的油水分離槽４を、一連の浄化工程
中の所要段に設けたことを特徴とする廃水浄化装
置。1. A required number of single electrode plates 6, 6... fixed in the form of parallel partitions are electrically connected so that adjacent ones are energized with electricity of different polarities, and Single board 6, 6...
The inside of the electric oil-water separation tank 4 for purifying wastewater containing emulsified oil, which is equipped with a timer T for switching the energization between the (+) and (-) electrodes at predetermined time intervals, is constructed using the electrode plates 6, 6, . . . A wastewater purification apparatus is constructed to maintain an aerated atmosphere based on the generation of bubbles for cleaning, and is characterized in that the electric oil-water separation tank 4 is provided at a required stage in a series of purification steps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23848783A JPS60129181A (en) | 1983-12-16 | 1983-12-16 | Device for cleaning up waste water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23848783A JPS60129181A (en) | 1983-12-16 | 1983-12-16 | Device for cleaning up waste water |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60129181A JPS60129181A (en) | 1985-07-10 |
| JPS6333436B2 true JPS6333436B2 (en) | 1988-07-05 |
Family
ID=17030971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23848783A Granted JPS60129181A (en) | 1983-12-16 | 1983-12-16 | Device for cleaning up waste water |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60129181A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6283087A (en) * | 1985-10-07 | 1987-04-16 | Agency Of Ind Science & Technol | Treatment of waste water containing emulsified oil |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4925763A (en) * | 1972-07-05 | 1974-03-07 | ||
| JPS50120159A (en) * | 1974-03-09 | 1975-09-20 | ||
| JPS579877A (en) * | 1980-05-16 | 1982-01-19 | Varian Associates | Final point detection in physical etching process |
-
1983
- 1983-12-16 JP JP23848783A patent/JPS60129181A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4925763A (en) * | 1972-07-05 | 1974-03-07 | ||
| JPS50120159A (en) * | 1974-03-09 | 1975-09-20 | ||
| JPS579877A (en) * | 1980-05-16 | 1982-01-19 | Varian Associates | Final point detection in physical etching process |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60129181A (en) | 1985-07-10 |
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