JPS6333154U - - Google Patents
Info
- Publication number
- JPS6333154U JPS6333154U JP1986125906U JP12590686U JPS6333154U JP S6333154 U JPS6333154 U JP S6333154U JP 1986125906 U JP1986125906 U JP 1986125906U JP 12590686 U JP12590686 U JP 12590686U JP S6333154 U JPS6333154 U JP S6333154U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- mask substrate
- pellicle frame
- pericles
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012528 membrane Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125906U JPS6333154U (fr) | 1986-08-20 | 1986-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125906U JPS6333154U (fr) | 1986-08-20 | 1986-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6333154U true JPS6333154U (fr) | 1988-03-03 |
Family
ID=31019212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986125906U Pending JPS6333154U (fr) | 1986-08-20 | 1986-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6333154U (fr) |
-
1986
- 1986-08-20 JP JP1986125906U patent/JPS6333154U/ja active Pending