JPS6332785U - - Google Patents
Info
- Publication number
- JPS6332785U JPS6332785U JP12696786U JP12696786U JPS6332785U JP S6332785 U JPS6332785 U JP S6332785U JP 12696786 U JP12696786 U JP 12696786U JP 12696786 U JP12696786 U JP 12696786U JP S6332785 U JPS6332785 U JP S6332785U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chuck
- electromagnetic switching
- chuck structure
- vacuuming
- energized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12696786U JPS6332785U (enExample) | 1986-08-20 | 1986-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12696786U JPS6332785U (enExample) | 1986-08-20 | 1986-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6332785U true JPS6332785U (enExample) | 1988-03-02 |
Family
ID=31021268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12696786U Pending JPS6332785U (enExample) | 1986-08-20 | 1986-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6332785U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0578491U (ja) * | 1992-03-30 | 1993-10-26 | 株式会社芝浦製作所 | ワーク搬送装置 |
| JP2003086667A (ja) * | 2001-09-12 | 2003-03-20 | Takatori Corp | 薄厚ウェーハ用カセット及び吸着ハンド |
| JP2020006608A (ja) * | 2018-07-10 | 2020-01-16 | トヨタ紡織株式会社 | 成形品取出装置、および成形品取出方法、および成形品取出治具 |
-
1986
- 1986-08-20 JP JP12696786U patent/JPS6332785U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0578491U (ja) * | 1992-03-30 | 1993-10-26 | 株式会社芝浦製作所 | ワーク搬送装置 |
| JP2003086667A (ja) * | 2001-09-12 | 2003-03-20 | Takatori Corp | 薄厚ウェーハ用カセット及び吸着ハンド |
| JP2020006608A (ja) * | 2018-07-10 | 2020-01-16 | トヨタ紡織株式会社 | 成形品取出装置、および成形品取出方法、および成形品取出治具 |