JPS6332785U - - Google Patents

Info

Publication number
JPS6332785U
JPS6332785U JP12696786U JP12696786U JPS6332785U JP S6332785 U JPS6332785 U JP S6332785U JP 12696786 U JP12696786 U JP 12696786U JP 12696786 U JP12696786 U JP 12696786U JP S6332785 U JPS6332785 U JP S6332785U
Authority
JP
Japan
Prior art keywords
vacuum chuck
electromagnetic switching
chuck structure
vacuuming
energized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12696786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12696786U priority Critical patent/JPS6332785U/ja
Publication of JPS6332785U publication Critical patent/JPS6332785U/ja
Pending legal-status Critical Current

Links

JP12696786U 1986-08-20 1986-08-20 Pending JPS6332785U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12696786U JPS6332785U (enrdf_load_stackoverflow) 1986-08-20 1986-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12696786U JPS6332785U (enrdf_load_stackoverflow) 1986-08-20 1986-08-20

Publications (1)

Publication Number Publication Date
JPS6332785U true JPS6332785U (enrdf_load_stackoverflow) 1988-03-02

Family

ID=31021268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12696786U Pending JPS6332785U (enrdf_load_stackoverflow) 1986-08-20 1986-08-20

Country Status (1)

Country Link
JP (1) JPS6332785U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0578491U (ja) * 1992-03-30 1993-10-26 株式会社芝浦製作所 ワーク搬送装置
JP2003086667A (ja) * 2001-09-12 2003-03-20 Takatori Corp 薄厚ウェーハ用カセット及び吸着ハンド
JP2020006608A (ja) * 2018-07-10 2020-01-16 トヨタ紡織株式会社 成形品取出装置、および成形品取出方法、および成形品取出治具

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0578491U (ja) * 1992-03-30 1993-10-26 株式会社芝浦製作所 ワーク搬送装置
JP2003086667A (ja) * 2001-09-12 2003-03-20 Takatori Corp 薄厚ウェーハ用カセット及び吸着ハンド
JP2020006608A (ja) * 2018-07-10 2020-01-16 トヨタ紡織株式会社 成形品取出装置、および成形品取出方法、および成形品取出治具

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