JPS63315225A - 長尺シ−トの連続真空処理装置 - Google Patents
長尺シ−トの連続真空処理装置Info
- Publication number
- JPS63315225A JPS63315225A JP62047217A JP4721787A JPS63315225A JP S63315225 A JPS63315225 A JP S63315225A JP 62047217 A JP62047217 A JP 62047217A JP 4721787 A JP4721787 A JP 4721787A JP S63315225 A JPS63315225 A JP S63315225A
- Authority
- JP
- Japan
- Prior art keywords
- rolls
- pair
- sealing
- seal
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009489 vacuum treatment Methods 0.000 title abstract 3
- 238000007789 sealing Methods 0.000 claims abstract description 54
- 230000007246 mechanism Effects 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 4
- 239000013013 elastic material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 3
- 239000010432 diamond Substances 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
Landscapes
- Reinforced Plastic Materials (AREA)
- Laminated Bodies (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62047217A JPS63315225A (ja) | 1987-03-02 | 1987-03-02 | 長尺シ−トの連続真空処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62047217A JPS63315225A (ja) | 1987-03-02 | 1987-03-02 | 長尺シ−トの連続真空処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63315225A true JPS63315225A (ja) | 1988-12-22 |
| JPH0511540B2 JPH0511540B2 (enExample) | 1993-02-15 |
Family
ID=12769000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62047217A Granted JPS63315225A (ja) | 1987-03-02 | 1987-03-02 | 長尺シ−トの連続真空処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63315225A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008238471A (ja) * | 2007-03-26 | 2008-10-09 | Toshiba Mach Co Ltd | 減圧転写成形装置 |
| JP2010058402A (ja) * | 2008-09-04 | 2010-03-18 | Kitagawa Elaborate Mach Co Ltd | 真空プレス装置 |
-
1987
- 1987-03-02 JP JP62047217A patent/JPS63315225A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008238471A (ja) * | 2007-03-26 | 2008-10-09 | Toshiba Mach Co Ltd | 減圧転写成形装置 |
| JP2010058402A (ja) * | 2008-09-04 | 2010-03-18 | Kitagawa Elaborate Mach Co Ltd | 真空プレス装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511540B2 (enExample) | 1993-02-15 |
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