JPS633150U - - Google Patents
Info
- Publication number
- JPS633150U JPS633150U JP9665386U JP9665386U JPS633150U JP S633150 U JPS633150 U JP S633150U JP 9665386 U JP9665386 U JP 9665386U JP 9665386 U JP9665386 U JP 9665386U JP S633150 U JPS633150 U JP S633150U
- Authority
- JP
- Japan
- Prior art keywords
- nut
- wafer
- feed shaft
- hand thread
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は、この考案の一実施例を示すウエーハ
ハンドラの外観斜視図、第２図は、従来のウエー
ハ挟み付け状態を示すウエーハ及びピンセツトの
斜視図である。
１……ウエーハ、１０……送り軸、１２……右
ネジ、１４……左ネジ。１８，１９……ナツト板
、２０，２１……チヤツク、２３，２３，……爪
、２４……側壁、１５……アクチユエータ（モー
タ）。
FIG. 1 is an external perspective view of a wafer handler showing an embodiment of this invention, and FIG. 2 is a perspective view of a wafer and tweezers showing a conventional wafer clamping state. 1...Wafer, 10...Feed shaft, 12...Right-hand screw, 14...Left-hand screw. 18, 19... nut plate, 20, 21... chuck, 23, 23,... pawl, 24... side wall, 15... actuator (motor).
Claims (1)
形成した送り軸と、左右の各ネジに係合するナツ
トと、各ナツトに取付けられ、ウエーハの側壁を
挟み付けする円弧状の弾性体チヤツク爪と、上記
送り軸を、駆動させるアクチユエータとを具備す
ることを特徴とするウエーハハンドラ。 A feed shaft with a right-hand thread from one end and a left-hand thread from the other end, a nut that engages with each screw on the left and right, and an arc-shaped elastic body that is attached to each nut and pinches the side wall of the wafer. A wafer handler comprising a chuck pawl and an actuator that drives the feed shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665386U JPS633150U (en) | 1986-06-24 | 1986-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665386U JPS633150U (en) | 1986-06-24 | 1986-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633150U true JPS633150U (en) | 1988-01-11 |
Family
ID=30962619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9665386U Pending JPS633150U (en) | 1986-06-24 | 1986-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633150U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555086A (en) * | 1991-08-29 | 1993-03-05 | Nec Corp | Electric double layer capacitor and manufacture thereof |
-
1986
- 1986-06-24 JP JP9665386U patent/JPS633150U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555086A (en) * | 1991-08-29 | 1993-03-05 | Nec Corp | Electric double layer capacitor and manufacture thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS633150U (en) | ||
| JPS63139311U (en) | ||
| JPH0199578U (en) | ||
| JPS60102304U (en) | Insert for deck plate | |
| JPS5969887U (en) | gripping device | |
| JPH01123493U (en) | ||
| JPS63195410U (en) | ||
| JPH0317413U (en) | ||
| JPS61193081U (en) | ||
| JPS62134681U (en) | ||
| JPS58150474U (en) | Powerful tightening tool | |
| JPH01143374U (en) | ||
| JPS638728U (en) | ||
| JPH0216816U (en) | ||
| JPH0386268U (en) | ||
| JPS5959513U (en) | fasteners | |
| JPS63184489U (en) | ||
| JPS6188521U (en) | ||
| JPH0475214U (en) | ||
| JPS6365267U (en) | ||
| JPH0294915U (en) | ||
| JPS6041666U (en) | drive device | |
| JPS58102820U (en) | Mounting structure of the lever to the operating shaft | |
| JPS62199909U (en) | ||
| JPS6456969U (en) |