JPS633136U - - Google Patents
Info
- Publication number
- JPS633136U JPS633136U JP9744886U JP9744886U JPS633136U JP S633136 U JPS633136 U JP S633136U JP 9744886 U JP9744886 U JP 9744886U JP 9744886 U JP9744886 U JP 9744886U JP S633136 U JPS633136 U JP S633136U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support means
- end opening
- wafer support
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986097448U JPH0528755Y2 (ja�@�@) | 1986-06-24 | 1986-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986097448U JPH0528755Y2 (ja�@�@) | 1986-06-24 | 1986-06-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS633136U true JPS633136U (ja�@�@) | 1988-01-11 |
| JPH0528755Y2 JPH0528755Y2 (ja�@�@) | 1993-07-23 |
Family
ID=30964375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986097448U Expired - Lifetime JPH0528755Y2 (ja�@�@) | 1986-06-24 | 1986-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528755Y2 (ja�@�@) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5588323A (en) * | 1978-12-27 | 1980-07-04 | Hitachi Ltd | Manufacture of semiconductor device |
| JPS61156229U (ja�@�@) * | 1985-03-15 | 1986-09-27 |
-
1986
- 1986-06-24 JP JP1986097448U patent/JPH0528755Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5588323A (en) * | 1978-12-27 | 1980-07-04 | Hitachi Ltd | Manufacture of semiconductor device |
| JPS61156229U (ja�@�@) * | 1985-03-15 | 1986-09-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528755Y2 (ja�@�@) | 1993-07-23 |