JPS6331342B2 - - Google Patents
Info
- Publication number
- JPS6331342B2 JPS6331342B2 JP4466978A JP4466978A JPS6331342B2 JP S6331342 B2 JPS6331342 B2 JP S6331342B2 JP 4466978 A JP4466978 A JP 4466978A JP 4466978 A JP4466978 A JP 4466978A JP S6331342 B2 JPS6331342 B2 JP S6331342B2
- Authority
- JP
- Japan
- Prior art keywords
- polished
- polishing
- surface plate
- shaft
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 70
- 239000000463 material Substances 0.000 claims description 64
- 238000003825 pressing Methods 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 15
- 239000003082 abrasive agent Substances 0.000 claims description 12
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- QMQXDJATSGGYDR-UHFFFAOYSA-N methylidyneiron Chemical compound [C].[Fe] QMQXDJATSGGYDR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4466978A JPS54137192A (en) | 1978-04-15 | 1978-04-15 | Grinding method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4466978A JPS54137192A (en) | 1978-04-15 | 1978-04-15 | Grinding method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54137192A JPS54137192A (en) | 1979-10-24 |
| JPS6331342B2 true JPS6331342B2 (en, 2012) | 1988-06-23 |
Family
ID=12697844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4466978A Granted JPS54137192A (en) | 1978-04-15 | 1978-04-15 | Grinding method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54137192A (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02102422A (ja) * | 1988-10-11 | 1990-04-16 | Mitsubishi Electric Corp | 赤外線検知器 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020113324A1 (de) * | 2020-05-15 | 2021-11-18 | Atm Qness Gmbh | Labor-Tellerschleifgerät, Verfahren, Ersatzschleifscheibe und Verwendung einer Schleifscheibe |
| CN115666895A (zh) | 2020-05-15 | 2023-01-31 | Atm金尼斯有限公司 | 用于包埋样品和加工包埋样品的包埋压力机、研磨和/或抛光设备及生产线 |
-
1978
- 1978-04-15 JP JP4466978A patent/JPS54137192A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02102422A (ja) * | 1988-10-11 | 1990-04-16 | Mitsubishi Electric Corp | 赤外線検知器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54137192A (en) | 1979-10-24 |
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