JPS6331039U - - Google Patents

Info

Publication number
JPS6331039U
JPS6331039U JP12178086U JP12178086U JPS6331039U JP S6331039 U JPS6331039 U JP S6331039U JP 12178086 U JP12178086 U JP 12178086U JP 12178086 U JP12178086 U JP 12178086U JP S6331039 U JPS6331039 U JP S6331039U
Authority
JP
Japan
Prior art keywords
storage device
stocker
view
storage
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12178086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12178086U priority Critical patent/JPS6331039U/ja
Publication of JPS6331039U publication Critical patent/JPS6331039U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP12178086U 1986-08-08 1986-08-08 Pending JPS6331039U (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12178086U JPS6331039U (US07413550-20080819-C00001.png) 1986-08-08 1986-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12178086U JPS6331039U (US07413550-20080819-C00001.png) 1986-08-08 1986-08-08

Publications (1)

Publication Number Publication Date
JPS6331039U true JPS6331039U (US07413550-20080819-C00001.png) 1988-02-29

Family

ID=31011364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12178086U Pending JPS6331039U (US07413550-20080819-C00001.png) 1986-08-08 1986-08-08

Country Status (1)

Country Link
JP (1) JPS6331039U (US07413550-20080819-C00001.png)

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