JPS6330846U - - Google Patents

Info

Publication number
JPS6330846U
JPS6330846U JP1986125564U JP12556486U JPS6330846U JP S6330846 U JPS6330846 U JP S6330846U JP 1986125564 U JP1986125564 U JP 1986125564U JP 12556486 U JP12556486 U JP 12556486U JP S6330846 U JPS6330846 U JP S6330846U
Authority
JP
Japan
Prior art keywords
flat surface
pellicle
attaching
utility
inner peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986125564U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0419543Y2 (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986125564U priority Critical patent/JPH0419543Y2/ja
Publication of JPS6330846U publication Critical patent/JPS6330846U/ja
Application granted granted Critical
Publication of JPH0419543Y2 publication Critical patent/JPH0419543Y2/ja
Expired legal-status Critical Current

Links

JP1986125564U 1986-08-18 1986-08-18 Expired JPH0419543Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986125564U JPH0419543Y2 (fi) 1986-08-18 1986-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986125564U JPH0419543Y2 (fi) 1986-08-18 1986-08-18

Publications (2)

Publication Number Publication Date
JPS6330846U true JPS6330846U (fi) 1988-02-29
JPH0419543Y2 JPH0419543Y2 (fi) 1992-05-01

Family

ID=31018569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986125564U Expired JPH0419543Y2 (fi) 1986-08-18 1986-08-18

Country Status (1)

Country Link
JP (1) JPH0419543Y2 (fi)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63298245A (ja) * 1987-05-28 1988-12-06 Mitsui Petrochem Ind Ltd ペリクルの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655837U (fi) * 1979-10-02 1981-05-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655837U (fi) * 1979-10-02 1981-05-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63298245A (ja) * 1987-05-28 1988-12-06 Mitsui Petrochem Ind Ltd ペリクルの製造方法

Also Published As

Publication number Publication date
JPH0419543Y2 (fi) 1992-05-01

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