JPS63307346A - Dew condensation sensor - Google Patents

Dew condensation sensor

Info

Publication number
JPS63307346A
JPS63307346A JP62142134A JP14213487A JPS63307346A JP S63307346 A JPS63307346 A JP S63307346A JP 62142134 A JP62142134 A JP 62142134A JP 14213487 A JP14213487 A JP 14213487A JP S63307346 A JPS63307346 A JP S63307346A
Authority
JP
Japan
Prior art keywords
resistance value
comb
resistor
film
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62142134A
Other languages
Japanese (ja)
Inventor
Tomohiko Morijiri
森尻 友彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP62142134A priority Critical patent/JPS63307346A/en
Publication of JPS63307346A publication Critical patent/JPS63307346A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE:To obtain an excellent switching characteristic and to stably detect the resistance value of a moisture sensitive resistor film which senses dew condensation as well as to obtain a small-sized high-performance sensor by detecting said resistance value by electrodes consisting of comb-shaped carbon resistor films. CONSTITUTION:A pair of the comb-shaped carbon resistor films 3 which are formed with coated films contg. carbon powder to a comb shape and the comb teeth of which are disposed to face each other and a pair of connecting terminal electrodes 2 consisting of conductive paste coated films formed by extending these resistor films 3 are formed on the surface of a polyimide film 1 which is a flexible insulating substrate. The moisture sensitive resistor film 4 consisting of a resin compsn. prepd. by dispersing conductive particles in a copolymerized polyamide resin and modified polyamide resin is further provided connectively to these resistor film 3. A pair of connecting terminal electrode 2 and coated with an insulator film 6 by remaining specified area connecting land 5 at the terminal part thereof. The detected resistance value is thereby equaled to the resistance value of the resistor films 3 on a low humidity side and is raided to the same value as the resistance value of the resistor films 4 with approaching to the dew point. The rise of the resistance value is thus steepened near the dew point.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、結露センサに係り、特にビデオチーフレコー
ダーのヘッド部等における結露を検出するために用いら
れる小型化可能なセンサに関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a dew condensation sensor, and more particularly to a sensor that can be miniaturized and used to detect dew condensation in the head of a video chief recorder or the like.

従来の技術 家庭用電気機器等の最近の電気機器は小型化及び高性能
化されてきており、このような機器としては例えば家庭
用の小型ビデオテープレコーダー(VTR)が挙げられ
る。VTRは磁気テープを回転ドラムに沿って導きなが
らヘッドで擦ることにより信号を記録又は再生するもの
であり、これを小型化するためにはこのヘッド機構の主
要部もコンパクトに仕上げられる。
BACKGROUND OF THE INVENTION Modern electrical appliances such as household electrical appliances have become smaller and more sophisticated, and examples of such appliances include small video tape recorders (VTRs) for household use. A VTR records or reproduces signals by guiding a magnetic tape along a rotating drum and rubbing it with a head, and in order to miniaturize the tape, the main parts of the head mechanism must also be made compact.

ところで、VTRのような機器は季節や場所を問わずい
ろいろな状況で使用され、例えばこれらの機器が空調さ
れた屋内から高温高湿の屋外に急に持ち出されたり、あ
るいは、高湿度雰囲気中で使用されるときには、これら
の機器の表面に結露することがある。この結露が上記の
回転ドラムやヘッドに生じると、記録又は再生時に磁気
テープが回転ドラムの表面に密着して巻き込みや切断を
起こすことがある。
By the way, devices such as VTRs are used in a variety of situations regardless of the season or location. For example, such devices may be suddenly taken from an air-conditioned room to a hot and humid outdoors, or in a high humidity atmosphere. When in use, condensation may form on the surfaces of these devices. If this dew condensation occurs on the rotating drum or head, the magnetic tape may come into close contact with the surface of the rotating drum during recording or playback, causing it to become entangled or cut.

このためVTRのヘッド部には結露センサを設けること
が行われている。この結露センサには、例えば銅張り可
撓性絶縁基板表面をエツチングすることにより形成した
一対の銅箔片又はアルミナ基板等の表面に同様に形成し
た銅箔片に、ニッケルメッキ処理を施すことによりそれ
ぞれ櫛型電極及び接続端子電極を一体に形成し、櫛形電
極をカーボン粉末を含有する塗膜からなる感湿抵抗体膜
で覆った構造のものが挙げられ、これは感湿抵抗体膜の
水分による抵抗値の変化を検出するものである。
For this reason, a dew condensation sensor is provided in the head section of the VTR. This dew condensation sensor is manufactured by applying nickel plating to a pair of copper foil pieces formed by etching the surface of a copper-clad flexible insulating substrate, or a copper foil piece similarly formed on the surface of an alumina substrate, etc. One example is a structure in which a comb-shaped electrode and a connecting terminal electrode are integrally formed, and the comb-shaped electrode is covered with a moisture-sensitive resistor film made of a coating film containing carbon powder. This detects the change in resistance value due to

この結露センサは、可撓性基板を用いているので、スペ
ースの狭いVTRのヘッド部に感湿抵抗体膜側をセット
し、接続端子部等は適宜屈曲させてスペースの広いとこ
ろに導いて外部接点と接続することができ、小型機器に
対する優れた利便性を備えている。
This dew condensation sensor uses a flexible substrate, so the moisture-sensitive resistor film side is set in the head of the VTR, which has a narrow space, and the connection terminals are bent appropriately and guided to a place with a wide space. It can be connected to contacts and has excellent convenience for small devices.

発明が解決しようとする問題点 しかしながら、このような結露センサは、感湿抵抗体膜
の抵抗値変化をニッケルメッキ被膜からなる電極を通し
て検出すると、その湿度変化と抵抗値の変化の関係を表
す第3図点線Aで示すグラフのように湿度が100%に
近くなって結露を生じる点の抵抗値の変化が顕著である
とはいえない。
Problems to be Solved by the Invention However, when such a dew condensation sensor detects a change in the resistance value of the humidity-sensitive resistor film through an electrode made of a nickel-plated film, it detects the relationship between the humidity change and the change in resistance value. As shown in the graph indicated by the dotted line A in Figure 3, it cannot be said that the change in resistance value at the point where the humidity approaches 100% and condensation occurs is significant.

結露センサとしては、結露を生じたときに抵抗値が急激
に段階的に変化する、いわゆるスイッチング特性に優れ
たものが好ましく、この点からは上記の従来の結露セン
サは不十分である。
The dew condensation sensor is preferably one with excellent switching characteristics, in which the resistance value changes rapidly in stages when dew condensation occurs; from this point of view, the conventional dew condensation sensors described above are inadequate.

また、ニッケルメッキ被膜に感湿抵抗体被膜を設けるこ
とは、金属の上にカーボン含有の有機物塗膜を形成する
ことになるので密着強度が低く、特に結露センサを狭い
ところにセットするようなときに折り曲げたりすると、
感湿抵抗体膜がニッケルメッキ被膜から剥離し、抵抗値
が変化するという問題点もあった。
Additionally, providing a moisture-sensitive resistor coating on a nickel plating coating results in the formation of a carbon-containing organic coating on the metal, resulting in low adhesion strength, especially when the condensation sensor is installed in a narrow space. If you bend it to
There was also the problem that the moisture-sensitive resistor film peeled off from the nickel plating film, resulting in a change in resistance value.

また、上記の従来の結露センサは、接続端子電極はニッ
ケルメッキされているため外部機器との接続はリード線
の半田付けによらなければならず、この半田付けには半
田付は部にフラックスを塗布した後熔融はんだを供給し
、さらにフラックスを洗浄する等の工数が多くなるとい
う問題点や、これらの過程で不純物が感湿抵抗体膜等に
混入し易かったり、溶融はんだの熱の影響を受けること
によりその抵抗特性を悪くするという問題点もある。
In addition, in the conventional dew condensation sensor mentioned above, the connection terminal electrode is nickel-plated, so connection with external equipment must be done by soldering the lead wire, and for this soldering, flux is applied to the soldering part. There are problems in that it takes a lot of man-hours to supply molten solder after coating and then to clean the flux, and in these processes, impurities tend to get mixed into the moisture-sensitive resistor film, etc. There is also the problem that the resistance characteristics deteriorate due to the exposure.

問題点を解決するための手段 本発明は、上記問題点を解決するために、可撓性絶縁基
板表面に設けられる抵抗体膜であってカーボン粉末を含
有する塗膜を櫛形に形成し櫛歯を互に対向させた一対の
櫛型カーボン抵抗体被膜と、該一対のそれぞれの櫛型カ
ーボン抵抗体被膜に延長して設けた導電ペースト塗膜か
らなる一対の接続端子電極と、上記一対のカーボン抵抗
体被膜を接続する感湿抵抗体被膜と、上記〒対の接続端
子電極にそれぞれの端部の一定面積を残して設けられる
絶縁性被膜を有することを特徴とする結露センサを提供
するものである。
Means for Solving the Problems In order to solve the above problems, the present invention is a resistor film provided on the surface of a flexible insulating substrate, in which a coating film containing carbon powder is formed into a comb shape. a pair of comb-shaped carbon resistor coatings facing each other, a pair of connection terminal electrodes made of a conductive paste coating extending from each of the pair of comb-shaped carbon resistor coatings; The present invention provides a dew condensation sensor comprising a moisture-sensitive resistor film that connects the resistor film and an insulating film that is provided on the pair of connection terminal electrodes, leaving a certain area at each end. be.

作用 櫛型カーボン抵抗体被膜上に感湿抵抗体被膜を設けたの
で、櫛型カーボン抵抗体被膜は従来のニッケルメッキ膜
より抵抗値が大きく、第3図実線Bで示すように低湿度
側では櫛型カーボン抵抗体被膜の抵抗値が検出されて変
化は小さい、しかし、高湿度側では感湿抵抗体被膜の抵
抗値がより大きくなり、その変化率が露点に近ず(はど
大きくなるので、露点近傍において抵抗値の急激な変化
を検出でき、スイッチング特性の良いセンサを提供する
ことができる。
Since the moisture-sensitive resistor coating is provided on the working comb-shaped carbon resistor coating, the comb-shaped carbon resistor coating has a higher resistance value than the conventional nickel plating film, and as shown by the solid line B in Figure 3, the resistance value of the comb-shaped carbon resistor coating is higher on the low humidity side. The resistance value of the comb-shaped carbon resistor film is detected, and the change is small.However, in high humidity areas, the resistance value of the moisture-sensitive resistor film becomes larger, and the rate of change is not close to the dew point (and becomes larger). , it is possible to provide a sensor that can detect a sudden change in resistance value near the dew point and has good switching characteristics.

また、櫛型カーボン抵抗体被膜と可撓性絶縁基板は材質
に似た有機質部分を使用することができるので、両者は
良く密着し、また同様に感湿抵抗体被膜も櫛型カーボン
抵抗体被膜に良く密着するので、これらの抵抗膜の剥離
も起こり難(、安定した抵抗値が得られる。
In addition, since the comb-shaped carbon resistor coating and the flexible insulating substrate can use organic parts similar to the materials, the two adhere well, and the moisture-sensitive resistor coating is also similar to the comb-shaped carbon resistor coating. Since these resistive films adhere well to each other, it is difficult for these resistive films to peel off (and a stable resistance value can be obtained).

また、導電ペースト塗膜からなる接続端子電極を設けた
ので、これは単なる導電ペーストの印刷により設けるこ
とができ、またこれを延長することにより接続端子電極
にリード線を含めることができる。
Further, since the connecting terminal electrode is made of a conductive paste coating film, it can be provided simply by printing the conductive paste, and by extending it, a lead wire can be included in the connecting terminal electrode.

また、接続端子電極の端部の一定面積を残して絶縁性被
膜を設けたので、この残された一定面積の部分を接続ラ
ンドとすると他の接続体との例えば導電性接着剤による
接続面積を一定にすることができる。
In addition, since the insulating coating was provided with a certain area left at the end of the connection terminal electrode, if this remaining certain area was used as a connection land, the connection area with other connection bodies, for example, using a conductive adhesive, could be reduced. It can be kept constant.

実施例 次ぎに本発明の一実施例を第1図ないし第3図に基づい
て説明する。
Embodiment Next, an embodiment of the present invention will be described with reference to FIGS. 1 to 3.

本実施例の結露センサは、第1図に示すように可撓性絶
縁基板としての150μmのポリイミドフィルム1に一
対の接続端子電極2.2及びこれらのそれぞれに連続し
て塗膜を櫛型に形成しその櫛歯を交互に配置させて対向
させた櫛形カーボン抵抗体被膜3.3を設ける。
As shown in Fig. 1, the dew condensation sensor of this embodiment has a 150 μm polyimide film 1 serving as a flexible insulating substrate, a pair of connection terminal electrodes 2.2, and a coating film continuous to each of these in a comb shape. A comb-shaped carbon resistor coating 3.3 is provided in which the comb teeth are alternately arranged and opposed to each other.

上記接続端子電極2.2及び櫛形カーボン抵抗体被膜3
.3は、例えばカーボン粉末と樹脂を含有するカーボン
抵抗体ペースト(アサヒ化学研究所製TO−100−5
、乾燥塗膜の表面抵抗値100Ω/口(mm))をシル
クスクリーン印刷し、150℃、1時間焼付けることに
よって得られる。膜厚は乾燥塗膜で15μmである。な
お、このような櫛型カーボン抵抗体被膜の抵抗値はカー
ボンの種類、その含有量、バインダーの種類等によって
適宜選択できる。また、上記接続端子電極には銀粉末を
含有する導電ペーストを使用することもできる。
The above connection terminal electrode 2.2 and the comb-shaped carbon resistor coating 3
.. 3 is, for example, carbon resistor paste containing carbon powder and resin (TO-100-5 manufactured by Asahi Chemical Research Institute).
, the surface resistance value of the dry coating film is 100 Ω/mouth (mm)), and is obtained by silk screen printing and baking at 150° C. for 1 hour. The film thickness is 15 μm as a dry coating. The resistance value of such a comb-shaped carbon resistor film can be appropriately selected depending on the type of carbon, its content, the type of binder, etc. Moreover, a conductive paste containing silver powder can also be used for the connection terminal electrode.

次ぎに第2図に示すように上記櫛型カーボン抵抗体被膜
3.3上に感湿抵抗体ペーストをシルクスクリーン印刷
し、150℃、30分間焼付け、感湿抵抗体被膜4を形
成する。この膜厚は乾燥塗膜で5μmである。
Next, as shown in FIG. 2, a moisture-sensitive resistor paste is silk screen printed on the comb-shaped carbon resistor coating 3.3 and baked at 150° C. for 30 minutes to form a moisture-sensitive resistor coating 4. The thickness of this dry coating is 5 μm.

この感湿抵抗体被膜としては、例えば特開昭60−66
143号公報に記載されているように、フェノール樹脂
、シリコン樹脂、共重合ポリアミド樹脂、及びアミド基
の活性水素をメトキシメチル基、メトキシ基及びメチル
基のいずれかの基で置換した変性ポリアミド樹脂からな
り、上記共重合ポリアミド樹脂(X)と変性ポリアミド
樹脂(Y)との比(X/Y)が179〜9/1の樹脂組
成物に導電性粒子を分散させたもの等公知のもの、ある
いはこれらから容易に推考できるものが挙げられる。
As this moisture-sensitive resistor coating, for example, JP-A-60-66
As described in Publication No. 143, phenol resins, silicone resins, copolymerized polyamide resins, and modified polyamide resins in which the active hydrogen of the amide group is substituted with a methoxymethyl group, a methoxy group, or a methyl group. A known one, such as one in which conductive particles are dispersed in a resin composition in which the ratio (X/Y) of the copolymerized polyamide resin (X) and modified polyamide resin (Y) is 179 to 9/1, or Here are some that can be easily deduced from these.

次ぎに上記接続端子電極2.2をその端部に一定の面積
の接続ランド5.5を残して絶縁性被膜6により被覆す
る。この絶縁性被膜は、絶縁性樹脂(紫外線硬化型樹脂
、USR−2G−17A、タムラ化研製)をシルクスク
リーン印刷により形成し、150℃、1時間加熱硬化さ
せる。
Next, the connection terminal electrode 2.2 is covered with an insulating film 6, leaving a connection land 5.5 of a constant area at its end. This insulating film is formed by silk screen printing an insulating resin (ultraviolet curable resin, USR-2G-17A, manufactured by Tamura Kaken), and heat-cured at 150° C. for 1 hour.

上記のようにして結露センサが出来上がるが、これを使
用するときには、接続ランド5.5に抵抗値検出回路の
端子を導電性接着剤により接着して接続する。このよう
にすると、櫛形カーボン抵抗体被膜の抵抗値を第3図の
実線Bのように露点前の抵抗値は櫛型カーボン抵抗体被
膜の抵抗値に支配されて大きな変化はないが、露点に近
ずくにつれ感湿抵抗体被膜の抵抗値に支配されて抵抗値
が急激に変化し、すぐれたスイッチング特性を得ること
ができる。このようにして露点が検知されると、例えば
VTRに本実施例の結露センサを用いた場合には、ヘッ
ド近傍にセットしたヒータを動作させ結露した水分を蒸
発させることができる。
The dew condensation sensor is completed as described above, but when it is used, the terminal of the resistance value detection circuit is bonded and connected to the connection land 5.5 using a conductive adhesive. By doing this, the resistance value of the comb-shaped carbon resistor film can be changed as shown by the solid line B in Figure 3.The resistance value before the dew point is dominated by the resistance value of the comb-shaped carbon resistor film and does not change significantly, but at the dew point As the temperature approaches, the resistance value changes rapidly under the influence of the resistance value of the moisture-sensitive resistor film, making it possible to obtain excellent switching characteristics. When the dew point is detected in this way, for example, when the dew condensation sensor of this embodiment is used in a VTR, a heater set near the head can be operated to evaporate the condensed water.

そして湿度が下がると、再度検出される抵抗値は櫛形カ
ーボン抵抗体被膜の抵抗値に急激に変化するので、これ
を検出してヒータを切れば良い。
Then, when the humidity decreases, the resistance value detected again suddenly changes to the resistance value of the comb-shaped carbon resistor film, so it is sufficient to detect this and turn off the heater.

発明の詳細 な説明したように、本発明によれば、結露を感知する感
湿抵抗体被膜の抵抗値を櫛型カーボン抵抗体被膜の電極
により検出するようにしたので、低湿度側では検出抵抗
値を櫛型カーボン抵抗体被膜の抵抗値と同じにし、露点
に近づくにつれて感湿抵抗体被膜抵抗値とすることがで
き、これにより露点に近いところで抵抗値の立ち上がり
を急にすることができ、優れたスイッチング特性を得る
ことができる。
As described in detail, according to the present invention, the resistance value of the humidity-sensitive resistor film that senses dew condensation is detected by the electrode of the comb-shaped carbon resistor film, so that the detection resistor is The resistance value can be made the same as the resistance value of the comb-shaped carbon resistor film, and the resistance value of the moisture-sensitive resistor film can be set as the value approaches the dew point, thereby making it possible to make the rise of the resistance value steeper near the dew point. Excellent switching characteristics can be obtained.

また、櫛型カーボン抵抗体被膜の可撓性絶縁基板に対す
る密着性及び櫛型カーボン抵抗体膜に対する感湿抵抗体
膜の密着性も良いのでこれらが下地から剥離するという
ようなこともなく、抵抗値を安定して検出することがで
きる。
In addition, since the adhesion of the comb-shaped carbon resistor film to the flexible insulating substrate and the adhesion of the moisture-sensitive resistor film to the comb-shaped carbon resistor film are good, there is no possibility that these will peel off from the base, and the resistance Values can be detected stably.

また、゛接続端子電極を外部の検出回路又はこれらの中
間に接続する接続体と接続するときも半田付けを行うこ
となく導電性接着剤で接続できるので、半田付は工程に
伴うフラックスの洗浄等の際の感湿抵抗体被膜の汚染や
半田の熱により抵抗特性を悪化させるというようなこと
もなく、結露センサの性能を安定させるとともに、生産
能率を向上させることができる。
In addition, when connecting the connection terminal electrode to an external detection circuit or a connecting body connected between these, the connection can be made with conductive adhesive without soldering, so soldering requires cleaning of flux during the process, etc. There is no possibility that the resistance characteristics will be deteriorated due to contamination of the moisture-sensitive resistor film or heat of the solder, and the performance of the dew condensation sensor can be stabilized and production efficiency can be improved.

また、この外部回路あるいは接続体との接続は接続端子
電極の一定面積の接続ランドに成されるので、その接続
面積が常に一定となり、製品毎の抵抗値のバラツキをな
くすことができ、性能を規格化し品質管理を容易にする
ことができる。
In addition, since the connection with this external circuit or connection body is made on the connection land of a constant area of the connection terminal electrode, the connection area is always constant, which eliminates variations in resistance value from product to product, and improves performance. Standardization can facilitate quality control.

このようにしてスイッチング特性が良く、検出抵抗値も
安定化できると、可撓性絶縁基板を用いており接続端子
電極の延長形成も容易であるので、例えばVTRのヘッ
ド部のように狭いスペースの所にも屈曲させてセットす
ることができ、小型機器用の高性能の結露センサを提供
することができる。
If the switching characteristics are good and the detection resistance value can be stabilized in this way, it is easy to extend the connection terminal electrodes because a flexible insulating substrate is used, so it is possible to use it in narrow spaces such as the head of a VTR. It can be bent and set in any place, and a high-performance dew condensation sensor for small equipment can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図は本発明の一実施例の結露センサの
各製造工程における構造を示す斜視図、第3図はこの結
露センサの特性と従来の結露センサの特性を示すグラフ
である。 図中、1はポリイミドフィルム、2は接続端子電極、3
は櫛型カーボン抵抗体被膜、4は感湿抵抗体被膜、5は
接続ランド、6は絶縁性被膜である。 昭和62年06月09日
1 and 2 are perspective views showing the structure of a dew condensation sensor according to an embodiment of the present invention in each manufacturing process, and FIG. 3 is a graph showing the characteristics of this dew condensation sensor and the characteristics of a conventional dew condensation sensor. In the figure, 1 is a polyimide film, 2 is a connecting terminal electrode, and 3 is a polyimide film.
4 is a comb-shaped carbon resistor coating, 4 is a moisture-sensitive resistor coating, 5 is a connection land, and 6 is an insulating coating. June 9, 1986

Claims (2)

【特許請求の範囲】[Claims] (1)可撓性絶縁基板表面に設けられる抵抗体膜であっ
てカーボン粉末を含有する塗膜を櫛形に形成し櫛歯を互
いに対向させた一対の櫛型カーボン抵抗体被膜と、該一
対のそれぞれの櫛型カーボン抵抗体被膜に延長して設け
た導電ペースト塗膜からなる一対の接続端子電極と、上
記一対のカーボン抵抗体被膜を接続する感湿抵抗体被膜
と、上記一対の接続端子電極にそれぞれの端部の一定面
積を残して設けられる絶縁性被膜を有することを特徴と
する結露センサ。
(1) A pair of comb-shaped carbon resistor films provided on the surface of a flexible insulating substrate, in which a coating film containing carbon powder is formed into a comb shape, with comb teeth facing each other; A pair of connecting terminal electrodes made of a conductive paste coating extending from each comb-shaped carbon resistor coating, a moisture-sensitive resistor coating connecting the pair of carbon resistor coatings, and the pair of connecting terminal electrodes. A dew condensation sensor characterized by having an insulating coating provided on each end with a certain area remaining.
(2)導電ペースト塗膜は櫛型カーボン抵抗体被膜と同
一材料により印刷により一体に形成されることを特徴と
する特許請求の範囲第1項記載の結露センサ。
(2) The dew condensation sensor according to claim 1, wherein the conductive paste coating is formed integrally with the comb-shaped carbon resistor coating by printing from the same material.
JP62142134A 1987-06-09 1987-06-09 Dew condensation sensor Pending JPS63307346A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62142134A JPS63307346A (en) 1987-06-09 1987-06-09 Dew condensation sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62142134A JPS63307346A (en) 1987-06-09 1987-06-09 Dew condensation sensor

Publications (1)

Publication Number Publication Date
JPS63307346A true JPS63307346A (en) 1988-12-15

Family

ID=15308160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62142134A Pending JPS63307346A (en) 1987-06-09 1987-06-09 Dew condensation sensor

Country Status (1)

Country Link
JP (1) JPS63307346A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6742387B2 (en) * 2001-11-19 2004-06-01 Denso Corporation Capacitive humidity sensor
WO2009113250A1 (en) * 2008-03-12 2009-09-17 パナソニック株式会社 Thin-film electrode, and measuring cell and inspecting device having the electrode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6742387B2 (en) * 2001-11-19 2004-06-01 Denso Corporation Capacitive humidity sensor
WO2009113250A1 (en) * 2008-03-12 2009-09-17 パナソニック株式会社 Thin-film electrode, and measuring cell and inspecting device having the electrode

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