JPS6330348U - - Google Patents

Info

Publication number
JPS6330348U
JPS6330348U JP12199286U JP12199286U JPS6330348U JP S6330348 U JPS6330348 U JP S6330348U JP 12199286 U JP12199286 U JP 12199286U JP 12199286 U JP12199286 U JP 12199286U JP S6330348 U JPS6330348 U JP S6330348U
Authority
JP
Japan
Prior art keywords
plate
evaporation material
crucible
discharge port
shaped evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12199286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12199286U priority Critical patent/JPS6330348U/ja
Publication of JPS6330348U publication Critical patent/JPS6330348U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12199286U 1986-08-08 1986-08-08 Pending JPS6330348U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12199286U JPS6330348U (it) 1986-08-08 1986-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12199286U JPS6330348U (it) 1986-08-08 1986-08-08

Publications (1)

Publication Number Publication Date
JPS6330348U true JPS6330348U (it) 1988-02-27

Family

ID=31011774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12199286U Pending JPS6330348U (it) 1986-08-08 1986-08-08

Country Status (1)

Country Link
JP (1) JPS6330348U (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390565A (ja) * 1989-08-31 1991-04-16 Laser Noushiyuku Gijutsu Kenkyu Kumiai 金属原料供給装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390565A (ja) * 1989-08-31 1991-04-16 Laser Noushiyuku Gijutsu Kenkyu Kumiai 金属原料供給装置

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