JPS63302438A - Manufacture of stamper - Google Patents
Manufacture of stamperInfo
- Publication number
- JPS63302438A JPS63302438A JP13738587A JP13738587A JPS63302438A JP S63302438 A JPS63302438 A JP S63302438A JP 13738587 A JP13738587 A JP 13738587A JP 13738587 A JP13738587 A JP 13738587A JP S63302438 A JPS63302438 A JP S63302438A
- Authority
- JP
- Japan
- Prior art keywords
- stamper
- signal
- few
- glass master
- master disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000011521 glass Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 12
- 238000007747 plating Methods 0.000 claims abstract description 8
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 230000007547 defect Effects 0.000 abstract description 6
- 230000006866 deterioration Effects 0.000 abstract description 5
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 238000005530 etching Methods 0.000 abstract description 2
- 230000001788 irregular Effects 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 229910052759 nickel Inorganic materials 0.000 description 5
- 238000005323 electroforming Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Moulds For Moulding Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は例えばコンパクトディスク、ビデオディスク等
の製造に使用するスタンパの作製方法に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method for manufacturing a stamper used for manufacturing compact discs, video discs, etc., for example.
〈従来技術〉
従来よりコンパクトディスク、ビデオディスク等ノスタ
ンパは第３図（ａ）、（ｂ）、（Ｃ）、（ｄ）、（ｅ）
、（ｆ）、（６）に示す如くのメッキ工程によりおこな
われていた。<Prior art> Traditionally, compact discs, video discs, etc.
, (f), and (6).
即ち同図ａにおいて１はガラス原盤であり、３はポジ型
レジストである。レーザーカンティングによってｂに示
す如くポジ型レジスト３上に信号記録を行ったのち、現
像を行い、信号記録原盤Ｃを得る。該信号記録原盤上に
銀等を、蒸着あるいはスパッタリング、無電解メッキ等
の手法により被覆し、電解ニッケルメッキにより、いわ
ゆるｄにしめずファーザーを作製し、さらにｅにしめＶ
マザーを同様にして作製した後、該マザーより同様にし
てスタンパ−ｆを作製する。こうしてｇにしめずスタン
パ−が得られる。That is, in FIG. 1A, 1 is a glass master disk, and 3 is a positive resist. After recording a signal on the positive resist 3 by laser canting as shown in b, development is performed to obtain a signal recording master C. The signal recording master is coated with silver or the like by vapor deposition, sputtering, electroless plating, etc., and by electrolytic nickel plating, a so-called Shimezu Father is made at d, and then Shimezu is coated at e.
After producing a mother in the same manner, a stamper f is produced from the mother in the same manner. In this way, a Shimezu stamper is obtained.
信号記録原ＩＭＣはファーザーを剥離するとき、破壊さ
れてしまうため、ディスクを大量に複製しようとする場
合、通常マザーを数枚複製し、さらにスタンパ−を大量
に複製して用いる。また、複製するディスクの数が少量
の場合には、ファーザーをそのままスクンバーとして直
接ディスクを作製する場合もある。Since the signal recording original IMC is destroyed when the father is removed, when a large number of disks are to be copied, normally several mother copies are made and then a large number of stampers are made and used. Furthermore, if the number of disks to be duplicated is small, the disks may be directly produced using the father as a scum bar.
〈発明が解決しようとする問題点〉
しかしながら、上記のような方法では、信号記録原盤上
に銀等を蒸着等で被膜形成を行い、その後、電解ニッケ
ルメッキを行い、さらに繰り返して２回にわたり電解ニ
ッケルメッキを行い原盤上の信号を反転転写するため、
ディフェクトエラーが増加し、また、信号そのものの形
状が劣化し、最終的に製品として製作されたディスクの
品質・性能を低下させるという欠点があう、かつ、多工
程を経るため、製作費、時間が比較的多く必要であった
。<Problems to be solved by the invention> However, in the above method, a film such as silver is formed by vapor deposition on the signal recording master, then electrolytic nickel plating is performed, and then electrolytic plating is repeated twice. In order to reversely transfer the signal on the master by nickel plating,
This has the disadvantage of increasing defect errors, deteriorating the shape of the signal itself, and lowering the quality and performance of the final disc manufactured as a product.In addition, it requires multiple steps, which increases production costs and time. A relatively large amount was required.
本発明は上記問題点を解決し、である。The present invention solves the above problems.
〈問題点を解決するための手段〉
上記問題点を解決するため、ガラス原版上にレジストを
設けた後、レーザー等により露光を行い。<Means for solving the problem> In order to solve the above problem, a resist is provided on the glass original plate and then exposed to light using a laser or the like.
エツチング処理をして凹凸パターンを得、所望のメンキ
処理工程を経て、被成形物を大盪複製するだめのスタン
バ−を得るスタンバ−作製方法に於いて。In a method for producing a stub bar, the stub bar is obtained by etching to obtain a concavo-convex pattern, and then undergoing a desired scratching process to obtain a stub bar for large-scale duplication of a molded object.
該ガラス原版上に金属皮膜をした後レジストを設けるよ
うにして、ディフェクトエラーが少なく、信号の劣化程
度の低いスタンバ−を作製し、品質・性能・コスト等の
優れたディスクを能率よく作製しようとするスタンバ−
の作製方法を提供するものである。By applying a resist after forming a metal film on the glass original plate, we attempted to produce a standby with few defect errors and low signal deterioration, and to efficiently produce discs with excellent quality, performance, and cost. stand bar
The present invention provides a method for manufacturing.
〈作用〉
本発明は、上記の方法により、ガラス原盤上に破壊され
にくい金属製の凸凹信号を作製することにより、該ガラ
ス原盤より、数枚のスタンバ−を直接得ることができる
もので工程が短く、信号劣化程度が少なく、ディフェク
トの少ない品質の良好なディスクが製作できる。<Function> The present invention is capable of directly obtaining several stub bars from a glass master by producing a metal concave-convex signal that is difficult to break on the glass master by the method described above, and the process is simple. It is possible to produce a high-quality disk that is short, has a low degree of signal deterioration, and has few defects.
〈実施例〉 以下本発明について図面により説明する。<Example> The present invention will be explained below with reference to the drawings.
第１図（ａ）〜（ｆ）は本発明の一実施例のスタンバ作
製方法であり、１はガラス原盤であり、２は金属製被膜
であり、クロム、ニッケル等が用いられ。FIGS. 1(a) to 1(f) show a standby manufacturing method according to an embodiment of the present invention, in which 1 is a glass master disk, 2 is a metal coating, and chromium, nickel, etc. are used.
３はポジ型レジストである。3 is a positive resist.
第１図ａにおいて、ガラス原盤１上に金属製被膜２を蒸
着、スパッタリング、メッキ等の方法で厚さ９００〜１
２００人に形成する。該金属製被膜上にポジ型レジスト
３をスピンコーター等により、塗布し、乾燥する。レー
ザーカッティングにより、ｂに示す所定の信号記録を行
い、次に現像し、レジストに信号形成する。ガラス基盤
にレジストの信号形成がされた状態がＣである。その後
、Ａｒ等の不活性ガスもしくはＣＣ１，、ＣＨＦ、 、
ＣＦ３等の反応性ガスを用いたスパッタエツチング法、
または、硝酸セリウムアンモニウム等を主成分とする湿
式エツチング法等により、金属被膜２上にｄに示す信号
パターンを形成し、次に酸素等を用いたアッシングもし
くは硫酸等で処理することにより、残留したレジストを
除去し、ｅに示したマザーのスタンバ作製用原盤を得る
。該原盤に銀、ニッケル、クロム等を蒸着、スパッタリ
ング、メッキ等の方法で薄く被膜形成した後、必要に応
じ′、！、’ｌ Ａ’Ｊ処理を施し、直接スタンバを作
製する。この原盤は注意深くとり扱うことにより数枚の
スタンバを復製することができる。該原盤よりスタンバ
を剥離し、その後通常のレプケーション工程により、コ
ンパクトディスク等のディスクを成形する。In FIG. 1a, a metal coating 2 is deposited on a glass master 1 to a thickness of 900 to 100 mm by vapor deposition, sputtering, plating, etc.
Formed to 200 people. A positive resist 3 is applied onto the metal film using a spin coater or the like and dried. A predetermined signal shown in b is recorded by laser cutting, and then developed to form a signal on the resist. C is the state in which resist signals are formed on the glass substrate. After that, inert gas such as Ar or CC1, CHF, ,
Sputter etching method using reactive gas such as CF3,
Alternatively, the signal pattern shown in d may be formed on the metal coating 2 by a wet etching method using cerium ammonium nitrate as the main component, and then the signal pattern shown in d may be ashed using oxygen or the like or treated with sulfuric acid or the like to remove the remaining signal. The resist is removed to obtain a master disk for producing a mother standby shown in e. After forming a thin film of silver, nickel, chromium, etc. on the master disc by vapor deposition, sputtering, plating, etc., as necessary',! , 'lA'J treatment to directly produce a standber. By handling this master disc carefully, it is possible to reproduce several copies of the stand. The stand bar is peeled off from the master disc, and then a disc such as a compact disc is formed by a normal replication process.
尚、第２図（ａ）〜（ｆ）に示した様に、レジストとし
てネガレジストを用いることにより、凸凹信号の反転し
たガラス原盤を得ることができる。このガラス原盤から
はいわゆるマザー盤を得ることができ、該マザー盤から
スタンバ−を数多く作成できる。Incidentally, as shown in FIGS. 2(a) to 2(f), by using a negative resist as the resist, it is possible to obtain a glass master disk in which the uneven signals are inverted. A so-called mother disk can be obtained from this glass master disk, and many standbars can be created from this mother disk.
〈発明の効果〉
以上のように本発明は、金属により形成される凸凹信号
を有するガラス原盤を用い、直接スタンバを電鋳等の方
法により作成することにより、くり返して電鋳を行わず
して、１枚〜数枚のスタンバを得ることができるため、
スタンバ製作工程が簡略でき、スタンバ製作費、製作時
間が少なく、なおかつ、欠陥の少ない信号劣化の小さい
スタンバを収率よく得ることができるものである。<Effects of the Invention> As described above, the present invention uses a glass master having a concave-convex signal formed by metal, and directly creates a standby by a method such as electroforming, thereby eliminating the need for repeated electroforming. , because you can get one to several stamps,
The standby manufacturing process can be simplified, the standby manufacturing cost and manufacturing time can be reduced, and a standby with few defects and low signal deterioration can be obtained with high yield.
第１図（ａ）〜（ｆ）および第２図（ａｌ〜（ｆ）は本
発明のスタンバ作成方法を示すそれぞれの断面の説明図
であり、第３図（ａ）〜（濁は従来のスタンバ作成方法
を節略に示した断面の説明図である。
■・・・・・・・・・ガラス原盤
２・・・・・・・・・金属被膜
３・・・・・・・・・レジスト
３・・・・・・・・・ネガレジスト
４・・・・・・・・・電鋳による金属被膜特 許
出 願 人
凸版印刷株式会社
代表者 鈴木和夫
（ｆ） （ｆ）ｃ口ＪＭｏ＋ｈｅｒ第１
図 第２ 図Figures 1 (a) to (f) and Figures 2 (al to (f)) are explanatory diagrams of respective cross sections showing the method of making a stand bar according to the present invention. It is an explanatory diagram of a cross section showing a method for creating a stand bar in a simplified manner. 3・・・・・・・・・Negative resist 4・・・・・・・・・Metal coating patent by electroforming
Applicant Toppan Printing Co., Ltd. Representative Kazuo Suzuki (f) (f) C mouth JMo+her 1st
Figure 2
Claims (1)
より露光を行い、エッチング処理をして凹凸パターンを
得、所望のメッキ処理工程を経て、被成形物を大量複製
するためのスタンパーを得るスタンパー作製方法に於い
て、 該ガラス原版上に金属皮膜をした後レジストを設けるよ
うにしたことを特徴とするスタンパ作製方法。 ２）前記金属製被膜がクロムから成る特許請求の範囲１
項記載のスタンパ作製方法。[Claims] 1) After a resist is provided on the glass original plate, it is exposed to light using a laser or the like, etched to obtain a concavo-convex pattern, and subjected to a desired plating process to mass-reproduce the object to be molded. 1. A method for producing a stamper for obtaining a stamper, characterized in that a resist is provided after a metal film is formed on the glass original plate. 2) Claim 1 in which the metal coating is made of chromium.
Method for producing a stamper as described in Section 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13738587A JPS63302438A (en) | 1987-05-30 | 1987-05-30 | Manufacture of stamper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13738587A JPS63302438A (en) | 1987-05-30 | 1987-05-30 | Manufacture of stamper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63302438A true JPS63302438A (en) | 1988-12-09 |
Family
ID=15197451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13738587A Pending JPS63302438A (en) | 1987-05-30 | 1987-05-30 | Manufacture of stamper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63302438A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0601746A2 (en) * | 1992-11-26 | 1994-06-15 | Canon Kabushiki Kaisha | Process and apparatus for manufacturing substrate sheet for optical recording mediums, process for preparing stamper and process for preparing photomask |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60173737A (en) * | 1984-02-09 | 1985-09-07 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of stamper for optical disk |
-
1987
- 1987-05-30 JP JP13738587A patent/JPS63302438A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60173737A (en) * | 1984-02-09 | 1985-09-07 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of stamper for optical disk |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0601746A2 (en) * | 1992-11-26 | 1994-06-15 | Canon Kabushiki Kaisha | Process and apparatus for manufacturing substrate sheet for optical recording mediums, process for preparing stamper and process for preparing photomask |
| EP0601746A3 (en) * | 1992-11-26 | 1995-01-18 | Canon Kk | Process and apparatus for manufacturing substrate sheet for optical recording mediums, process for preparing stamper and process for preparing photomask. |
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