JPS6329958U - - Google Patents
Info
- Publication number
- JPS6329958U JPS6329958U JP12367386U JP12367386U JPS6329958U JP S6329958 U JPS6329958 U JP S6329958U JP 12367386 U JP12367386 U JP 12367386U JP 12367386 U JP12367386 U JP 12367386U JP S6329958 U JPS6329958 U JP S6329958U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- deposited
- layers
- base layer
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 229910001120 nichrome Inorganic materials 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Parts Printed On Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12367386U JPS6329958U (en, 2012) | 1986-08-12 | 1986-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12367386U JPS6329958U (en, 2012) | 1986-08-12 | 1986-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329958U true JPS6329958U (en, 2012) | 1988-02-27 |
Family
ID=31014986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12367386U Pending JPS6329958U (en, 2012) | 1986-08-12 | 1986-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329958U (en, 2012) |
-
1986
- 1986-08-12 JP JP12367386U patent/JPS6329958U/ja active Pending