JPS6329945U - - Google Patents
Info
- Publication number
- JPS6329945U JPS6329945U JP12412286U JP12412286U JPS6329945U JP S6329945 U JPS6329945 U JP S6329945U JP 12412286 U JP12412286 U JP 12412286U JP 12412286 U JP12412286 U JP 12412286U JP S6329945 U JPS6329945 U JP S6329945U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- container
- cartridge
- view
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 235000012431 wafers Nutrition 0.000 description 6
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12412286U JPS6329945U (en:Method) | 1986-08-13 | 1986-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12412286U JPS6329945U (en:Method) | 1986-08-13 | 1986-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329945U true JPS6329945U (en:Method) | 1988-02-27 |
Family
ID=31015846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12412286U Pending JPS6329945U (en:Method) | 1986-08-13 | 1986-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329945U (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02263454A (ja) * | 1989-03-20 | 1990-10-26 | Tel Sagami Ltd | 熱処理装置 |
| JP2009182332A (ja) * | 2008-01-30 | 2009-08-13 | Asm Internatl Nv | ウェハボート |
-
1986
- 1986-08-13 JP JP12412286U patent/JPS6329945U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02263454A (ja) * | 1989-03-20 | 1990-10-26 | Tel Sagami Ltd | 熱処理装置 |
| JP2009182332A (ja) * | 2008-01-30 | 2009-08-13 | Asm Internatl Nv | ウェハボート |