JPS6329940U - - Google Patents
Info
- Publication number
- JPS6329940U JPS6329940U JP12252686U JP12252686U JPS6329940U JP S6329940 U JPS6329940 U JP S6329940U JP 12252686 U JP12252686 U JP 12252686U JP 12252686 U JP12252686 U JP 12252686U JP S6329940 U JPS6329940 U JP S6329940U
- Authority
- JP
- Japan
- Prior art keywords
- electrode pad
- check pattern
- contacts
- resistance check
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252686U JPS6329940U (et) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252686U JPS6329940U (et) | 1986-08-08 | 1986-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329940U true JPS6329940U (et) | 1988-02-27 |
Family
ID=31012794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12252686U Pending JPS6329940U (et) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329940U (et) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009180717A (ja) * | 2008-02-01 | 2009-08-13 | Mitsui Eng & Shipbuild Co Ltd | シリコン薄膜の評価方法 |
-
1986
- 1986-08-08 JP JP12252686U patent/JPS6329940U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009180717A (ja) * | 2008-02-01 | 2009-08-13 | Mitsui Eng & Shipbuild Co Ltd | シリコン薄膜の評価方法 |