JPS6329935U - - Google Patents
Info
- Publication number
- JPS6329935U JPS6329935U JP12332986U JP12332986U JPS6329935U JP S6329935 U JPS6329935 U JP S6329935U JP 12332986 U JP12332986 U JP 12332986U JP 12332986 U JP12332986 U JP 12332986U JP S6329935 U JPS6329935 U JP S6329935U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- control device
- control system
- external control
- communication line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 230000003749 cleanliness Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12332986U JPS6329935U (enExample) | 1986-08-13 | 1986-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12332986U JPS6329935U (enExample) | 1986-08-13 | 1986-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329935U true JPS6329935U (enExample) | 1988-02-27 |
Family
ID=31014332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12332986U Pending JPS6329935U (enExample) | 1986-08-13 | 1986-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329935U (enExample) |
-
1986
- 1986-08-13 JP JP12332986U patent/JPS6329935U/ja active Pending