JPS6329935U - - Google Patents
Info
- Publication number
- JPS6329935U JPS6329935U JP12332986U JP12332986U JPS6329935U JP S6329935 U JPS6329935 U JP S6329935U JP 12332986 U JP12332986 U JP 12332986U JP 12332986 U JP12332986 U JP 12332986U JP S6329935 U JPS6329935 U JP S6329935U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- control device
- control system
- external control
- communication line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 8
- 230000003749 cleanliness Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は上位制御装置との制御機構構成図、第
２図は洗浄装置内側制御機構図、第３図は洗浄装
置を含む上位制御装置における生産ライン構成図
である。
１……ホストコンピユータ、２……洗浄装置、
３……通信回線、１０……加工装置、１１……蒸
着装置。
FIG. 1 is a block diagram of a control mechanism with a higher-level control device, FIG. 2 is a diagram of an internal control mechanism of a cleaning device, and FIG. 3 is a diagram of a production line configuration in a higher-level control device including a cleaning device. 1...Host computer, 2...Cleaning device,
3... Communication line, 10... Processing device, 11... Vapor deposition device.
Claims (1)
構を持ち、これを自動制御する制御装置を有する
洗浄装置において、外部制御装置と、通信回線で
結ぶための制御系を設定し、前記外部制御装置と
の制御系を確立し、洗浄直後の清浄レベルで被洗
浄物を供給できることを特徴とする洗浄装置。 In a cleaning device that has a cleaning mechanism for cleaning electronic components and semiconductor components and a control device that automatically controls this, a control system is set to connect the external control device with a communication line, and the external control device and A cleaning device that is characterized by establishing a control system for supplying objects to be cleaned at a cleanliness level immediately after cleaning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12332986U JPS6329935U (en) | 1986-08-13 | 1986-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12332986U JPS6329935U (en) | 1986-08-13 | 1986-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329935U true JPS6329935U (en) | 1988-02-27 |
Family
ID=31014332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12332986U Pending JPS6329935U (en) | 1986-08-13 | 1986-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329935U (en) |
-
1986
- 1986-08-13 JP JP12332986U patent/JPS6329935U/ja active Pending
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