JPS6329933U - - Google Patents

Info

Publication number
JPS6329933U
JPS6329933U JP12359886U JP12359886U JPS6329933U JP S6329933 U JPS6329933 U JP S6329933U JP 12359886 U JP12359886 U JP 12359886U JP 12359886 U JP12359886 U JP 12359886U JP S6329933 U JPS6329933 U JP S6329933U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
etching rate
lower electrode
upper electrode
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12359886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12359886U priority Critical patent/JPS6329933U/ja
Publication of JPS6329933U publication Critical patent/JPS6329933U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP12359886U 1986-08-12 1986-08-12 Pending JPS6329933U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12359886U JPS6329933U (enrdf_load_stackoverflow) 1986-08-12 1986-08-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12359886U JPS6329933U (enrdf_load_stackoverflow) 1986-08-12 1986-08-12

Publications (1)

Publication Number Publication Date
JPS6329933U true JPS6329933U (enrdf_load_stackoverflow) 1988-02-27

Family

ID=31014848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12359886U Pending JPS6329933U (enrdf_load_stackoverflow) 1986-08-12 1986-08-12

Country Status (1)

Country Link
JP (1) JPS6329933U (enrdf_load_stackoverflow)

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