JPS62196332U - - Google Patents

Info

Publication number
JPS62196332U
JPS62196332U JP8373886U JP8373886U JPS62196332U JP S62196332 U JPS62196332 U JP S62196332U JP 8373886 U JP8373886 U JP 8373886U JP 8373886 U JP8373886 U JP 8373886U JP S62196332 U JPS62196332 U JP S62196332U
Authority
JP
Japan
Prior art keywords
magnetic field
plasma
plasma cvd
applying
lower plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8373886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8373886U priority Critical patent/JPS62196332U/ja
Publication of JPS62196332U publication Critical patent/JPS62196332U/ja
Pending legal-status Critical Current

Links

JP8373886U 1986-06-02 1986-06-02 Pending JPS62196332U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8373886U JPS62196332U (enrdf_load_stackoverflow) 1986-06-02 1986-06-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8373886U JPS62196332U (enrdf_load_stackoverflow) 1986-06-02 1986-06-02

Publications (1)

Publication Number Publication Date
JPS62196332U true JPS62196332U (enrdf_load_stackoverflow) 1987-12-14

Family

ID=30937596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8373886U Pending JPS62196332U (enrdf_load_stackoverflow) 1986-06-02 1986-06-02

Country Status (1)

Country Link
JP (1) JPS62196332U (enrdf_load_stackoverflow)

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