JPS6329931U - - Google Patents
Info
- Publication number
- JPS6329931U JPS6329931U JP12252586U JP12252586U JPS6329931U JP S6329931 U JPS6329931 U JP S6329931U JP 12252586 U JP12252586 U JP 12252586U JP 12252586 U JP12252586 U JP 12252586U JP S6329931 U JPS6329931 U JP S6329931U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- holding part
- processing surface
- wafer
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252586U JPS6329931U (pl) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252586U JPS6329931U (pl) | 1986-08-08 | 1986-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329931U true JPS6329931U (pl) | 1988-02-27 |
Family
ID=31012792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12252586U Pending JPS6329931U (pl) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329931U (pl) |
-
1986
- 1986-08-08 JP JP12252586U patent/JPS6329931U/ja active Pending