JPS6329930U - - Google Patents
Info
- Publication number
- JPS6329930U JPS6329930U JP12426186U JP12426186U JPS6329930U JP S6329930 U JPS6329930 U JP S6329930U JP 12426186 U JP12426186 U JP 12426186U JP 12426186 U JP12426186 U JP 12426186U JP S6329930 U JPS6329930 U JP S6329930U
- Authority
- JP
- Japan
- Prior art keywords
- mounting surface
- excite
- substrate holder
- thin film
- circumferential direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12426186U JPS6329930U (enExample) | 1986-08-12 | 1986-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12426186U JPS6329930U (enExample) | 1986-08-12 | 1986-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329930U true JPS6329930U (enExample) | 1988-02-27 |
Family
ID=31016113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12426186U Pending JPS6329930U (enExample) | 1986-08-12 | 1986-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329930U (enExample) |
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1986
- 1986-08-12 JP JP12426186U patent/JPS6329930U/ja active Pending