JPS6316436U - - Google Patents
Info
- Publication number
- JPS6316436U JPS6316436U JP11081686U JP11081686U JPS6316436U JP S6316436 U JPS6316436 U JP S6316436U JP 11081686 U JP11081686 U JP 11081686U JP 11081686 U JP11081686 U JP 11081686U JP S6316436 U JPS6316436 U JP S6316436U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- light source
- reaction
- reaction gas
- energy radiated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims 4
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11081686U JPS6316436U (enExample) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11081686U JPS6316436U (enExample) | 1986-07-18 | 1986-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6316436U true JPS6316436U (enExample) | 1988-02-03 |
Family
ID=30990167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11081686U Pending JPS6316436U (enExample) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316436U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59112611A (ja) * | 1982-12-17 | 1984-06-29 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
-
1986
- 1986-07-18 JP JP11081686U patent/JPS6316436U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59112611A (ja) * | 1982-12-17 | 1984-06-29 | Matsushita Electric Ind Co Ltd | 気相成長装置 |