JPS6329927U - - Google Patents
Info
- Publication number
- JPS6329927U JPS6329927U JP12241086U JP12241086U JPS6329927U JP S6329927 U JPS6329927 U JP S6329927U JP 12241086 U JP12241086 U JP 12241086U JP 12241086 U JP12241086 U JP 12241086U JP S6329927 U JPS6329927 U JP S6329927U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- ground electrode
- coil
- thin film
- film manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12241086U JPS6329927U (pl) | 1986-08-09 | 1986-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12241086U JPS6329927U (pl) | 1986-08-09 | 1986-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329927U true JPS6329927U (pl) | 1988-02-27 |
Family
ID=31012572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12241086U Pending JPS6329927U (pl) | 1986-08-09 | 1986-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329927U (pl) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS618914A (ja) * | 1984-06-22 | 1986-01-16 | Kanegafuchi Chem Ind Co Ltd | グロ−放電型成膜装置 |
| JPS6115321A (ja) * | 1984-07-02 | 1986-01-23 | Kanegafuchi Chem Ind Co Ltd | 成膜方法 |
-
1986
- 1986-08-09 JP JP12241086U patent/JPS6329927U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS618914A (ja) * | 1984-06-22 | 1986-01-16 | Kanegafuchi Chem Ind Co Ltd | グロ−放電型成膜装置 |
| JPS6115321A (ja) * | 1984-07-02 | 1986-01-23 | Kanegafuchi Chem Ind Co Ltd | 成膜方法 |