JPS6329926U - - Google Patents

Info

Publication number
JPS6329926U
JPS6329926U JP12201786U JP12201786U JPS6329926U JP S6329926 U JPS6329926 U JP S6329926U JP 12201786 U JP12201786 U JP 12201786U JP 12201786 U JP12201786 U JP 12201786U JP S6329926 U JPS6329926 U JP S6329926U
Authority
JP
Japan
Prior art keywords
crystal growth
molecular beam
beam crystal
molecular
load lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12201786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986122017U priority Critical patent/JPH0451472Y2/ja
Publication of JPS6329926U publication Critical patent/JPS6329926U/ja
Application granted granted Critical
Publication of JPH0451472Y2 publication Critical patent/JPH0451472Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1986122017U 1986-08-08 1986-08-08 Expired JPH0451472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986122017U JPH0451472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-08 1986-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986122017U JPH0451472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-08 1986-08-08

Publications (2)

Publication Number Publication Date
JPS6329926U true JPS6329926U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-27
JPH0451472Y2 JPH0451472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-03

Family

ID=31011822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986122017U Expired JPH0451472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-08 1986-08-08

Country Status (1)

Country Link
JP (1) JPH0451472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833825A (ja) * 1981-08-22 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> 分子線エピタキシヤル成長装置
JPS58162029A (ja) * 1982-03-23 1983-09-26 Hoxan Corp 多結晶シリコンウエハの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833825A (ja) * 1981-08-22 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> 分子線エピタキシヤル成長装置
JPS58162029A (ja) * 1982-03-23 1983-09-26 Hoxan Corp 多結晶シリコンウエハの製造方法

Also Published As

Publication number Publication date
JPH0451472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-03

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