JPS63297050A - Nozzle plate for bubble jet head - Google Patents
Nozzle plate for bubble jet headInfo
- Publication number
- JPS63297050A JPS63297050A JP13388187A JP13388187A JPS63297050A JP S63297050 A JPS63297050 A JP S63297050A JP 13388187 A JP13388187 A JP 13388187A JP 13388187 A JP13388187 A JP 13388187A JP S63297050 A JPS63297050 A JP S63297050A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- jet head
- bubble jet
- protective film
- heating resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 230000001681 protective effect Effects 0.000 claims abstract description 16
- 239000004020 conductor Substances 0.000 claims abstract description 13
- 150000004767 nitrides Chemical class 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005323 electroforming Methods 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000000866 electrolytic etching Methods 0.000 abstract 2
- 229910018487 Ni—Cr Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005338 heat storage Methods 0.000 description 2
- -1 TiN nitride Chemical class 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、プリンターなどに用いるバブルジェットヘッ
ド用ノズル板に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a nozzle plate for a bubble jet head used in a printer or the like.
従来、第２図（α）に示すようにノ（ブルジｚツトヘッ
ドの発熱抵抗体３と電気導体４０表面を保護膜５でカバ
ーしたバブルジェットヘッドや第２図（ｂ）に示すよう
にバブルジェットヘッドの電気導体４の表面のみを保護
膜５でカバーし、発熱抵抗体３０表面は露出させたバブ
ルジェットヘッド、及び第２図＜ｃ＞に示すように発熱
抵抗体３と電気導体４０両表面共に保護膜でカバーしな
いで全面、露出させたままのバブルジェットヘッドが知
られていた。Conventionally, as shown in FIG. 2(a), there has been a bubble jet head in which the surfaces of the heating resistor 3 and the electrical conductor 40 of a bull jet head are covered with a protective film 5, and as shown in FIG. 2(b), there has been a bubble jet head. In the bubble jet head, only the surface of the electric conductor 4 of the head is covered with the protective film 5, and the surface of the heating resistor 30 is exposed, and the surfaces of both the heating resistor 3 and the electric conductor 40 are covered as shown in FIG. Bubble jet heads were known in which the entire surface was left exposed without being covered with a protective film.
しかし、従来のバブルジェットヘッドは、第２図（α）
に示すような発熱抵抗体５と電気導体４の表面を保護膜
５でカバーした例においては、発熱抵抗体３へ供給する
電力エネルギーを高くしないと気泡８の発生が行なわれ
ない、又供給する電力エネルギーが高くなるので、その
分発熱抵抗体５の劣化が大きくなり、発熱抵抗体３の耐
久性が著しく低下するという問題点を有していた。However, the conventional bubble jet head is as shown in Figure 2 (α).
In the example in which the surfaces of the heating resistor 5 and the electrical conductor 4 are covered with the protective film 5 as shown in FIG. Since the electric power energy increases, the deterioration of the heat generating resistor 5 increases accordingly, resulting in a problem that the durability of the heat generating resistor 3 is significantly reduced.
又第２図（ｂ）に示すような電気導体４の表面のみを保
護膜５でカバーし、発熱抵抗体３の表面は露出させたバ
ブルジェットヘッドは、発熱抵抗体３の表面が露出して
いるので、僅かな電力エネルギーの供給で気泡８の発生
が可能となるが、発熱抵抗体５０表面上へ保護膜５が形
成されないように電気導体４の表面へのみ保護膜５を精
度よく形成する必要がある為にコスト高の要因となって
いた。又供給された電力エネルギーがインク６の中を迷
走電流として発熱抵抗体３の露出部分よりノズル板７へ
流れノズル板７を電解腐蝕させるという問題点を有して
いた。In addition, a bubble jet head as shown in FIG. 2(b) in which only the surface of the electric conductor 4 is covered with the protective film 5 and the surface of the heating resistor 3 is exposed, has the surface of the heating resistor 3 exposed. Therefore, the bubbles 8 can be generated by supplying a small amount of electric energy, but the protective film 5 is precisely formed only on the surface of the electric conductor 4 so that the protective film 5 is not formed on the surface of the heating resistor 50. This was necessary, which led to high costs. Another problem is that the supplied power energy flows through the ink 6 as a stray current from the exposed portion of the heating resistor 3 to the nozzle plate 7, causing electrolytic corrosion of the nozzle plate 7.
次に、第２図（ｂ）に示すように保護膜は使用しないで
発熱抵抗体３及び電気導体４の全面を露出させた形状の
バブルジェットヘッドは、工程が簡単になるが、前記第
２図（ｂ）の問題点と同様に、供給された電力エネルギ
ーがインク６の中を迷走電流として発熱抵抗体３及び電
気導体４０表面よりノズル板７へ流れノズル板７を電解
腐蝕させるという大きな問題点を有していた。Next, as shown in FIG. 2(b), a bubble jet head having a shape in which the entire surface of the heating resistor 3 and the electric conductor 4 are exposed without using a protective film simplifies the process, but the second Similar to the problem shown in Figure (b), the big problem is that the supplied electrical energy flows through the ink 6 as a stray current from the surfaces of the heating resistor 3 and the electrical conductor 40 to the nozzle plate 7, causing electrolytic corrosion of the nozzle plate 7. It had a point.
そこで本発明は、従来のこのような問題点を解決するた
めに、簡単な工程で尚かつ、耐久性の高い発熱抵抗体及
び電解腐蝕のおこらないノズル板を形成したバブルジェ
ットヘッドを得ることを目的としている。Therefore, in order to solve these conventional problems, the present invention aims to obtain a bubble jet head in which a highly durable heating resistor and a nozzle plate that does not cause electrolytic corrosion are formed using a simple process. The purpose is
上記問題点を解決するために、本発明のバブルジェット
ヘッド用ノズル板は、基板上に形成された発熱抵抗体と
、前記発熱′抵抗体へ電力を供給する電気導体とインク
を吐出するノズル大を有するノズル板から成るバブルジ
ェットヘッドにおいて前記ノズル板へ、窒化物の保護膜
を形成したことを特徴とする。In order to solve the above problems, the nozzle plate for a bubble jet head of the present invention includes a heating resistor formed on a substrate, an electric conductor for supplying power to the heating resistor, and a nozzle large enough to eject ink. A bubble jet head comprising a nozzle plate having a structure is characterized in that a protective film of nitride is formed on the nozzle plate.
以下に本発明の実施例を図面にもとづいて説明する。第
１図において、Ｓｉの基板１上へＳ１０゜の蓄熱層２を
形成し、その上にＴ ａ −Ｓ Ｌ −０２から成る発
熱抵抗体３を形成する、続いてＮ１−ｏｒ及びムＵから
成る電気導体４を形成し以上な発熱体部人とする。Embodiments of the present invention will be described below based on the drawings. In FIG. 1, a heat storage layer 2 of S10° is formed on a Si substrate 1, a heating resistor 3 made of T a -S L -02 is formed thereon, and then a heat storage layer 2 made of N1-or and MuU is formed on it. The electrical conductor 4 is formed to form a heating element.
次に、Ｎ１電鋳により作成されたノズル板７とインク６
との接触面側へＴｉＮの窒化物をスパッタにより１〜２
μｍ保１１膜５とし【形成し、該ノズル板７と前記発熱
体部Ａを組合わせてバブルジェットヘッドとする。Next, the nozzle plate 7 and ink 6 created by N1 electroforming
Sputter 1 to 2 layers of TiN nitride onto the contact surface with the
A bubble jet head is formed by combining the nozzle plate 7 and the heating element part A with a micrometer insulation film 5.
上記の本発明のバブルジェットヘッドと従来のバブルジ
ェットヘッドの吐出試験をおこなった結果、従来のバブ
ルジェットヘッドはＩ Ｘｌ ０’回の吐出において、
印字品質が低下したが、本発明によるバブルジェットヘ
ッドは１×１０ｓ回の吐出においても何ら印字品質が低
下することがなく、前記吐出試験後のバブルジェットヘ
ッドのノズル板を顕微鏡検査した結果、従来のノズル板
はノズル穴径が吐出試験前より大きくなり溶解した形跡
が認められたが原因は迷走電流による電解腐蝕によるた
めと推定される。本発明のノズル板はノズル穴径及び周
囲に何ら異状は認められなかった、これは窒化物により
、ノズル板が迷走電流より保護されたためと推定される
。As a result of the ejection test of the bubble jet head of the present invention and the conventional bubble jet head described above, it was found that the conventional bubble jet head had the following characteristics:
Although the print quality deteriorated, the bubble jet head according to the present invention showed no deterioration in print quality even after ejection for 1×10 seconds, and as a result of microscopic examination of the nozzle plate of the bubble jet head after the ejection test, it was found that In the nozzle plate, the nozzle hole diameter became larger than before the discharge test, and there was evidence of melting, which is presumed to be due to electrolytic corrosion caused by stray current. No abnormalities were observed in the nozzle hole diameter or surroundings of the nozzle plate of the present invention, and this is presumed to be because the nozzle plate was protected from stray current by the nitride.
又、窒化物の保護膜１０として前記ＴｉＮ以外の実施例
として、Ｂ１５Ｎ４．ＡｔＮ、３１．Ｎ、、ＴａＮなど
が有効である。In addition, as an example of the nitride protective film 10 other than the above-mentioned TiN, B15N4. AtN, 31. N, TaN, etc. are effective.
本発明は、以上説明したように、ノズル板へ窒化物の保
護膜を形成するという簡単な方法により発熱抵抗体を露
出させるこ′とが可能となり、僅かな電力エネルギーで
使用が可能となるため、発熱抵抗体の耐久性が大幅に向
上する。又、ノズル板が迷走電流の影響を受けなくなり
、電解腐蝕されないという大きな効果がある。As explained above, the present invention enables the heating resistor to be exposed by the simple method of forming a nitride protective film on the nozzle plate, and can be used with a small amount of electrical energy. , the durability of the heating resistor is greatly improved. Further, there is a great effect that the nozzle plate is not affected by stray current and is not subject to electrolytic corrosion.
第１図は、本発明にかかるバブルジェットヘッドの横断
面図、第２図（α）及び第２図ｃｂ＞、第２図（Ｃ）は
、従来のバブルジェットヘッドの横断面図である。
１・・・・・・・・・基 板
３・・・・・・・・・発熱抵抗体
４・・・・・・・・・電気導体
６・・・・・・・・・インク
７・・・・・・・・・ノズル板
９・・・・・・・・・ノズル穴
１０・・・・・・窒化物の保護膜
以上FIG. 1 is a cross-sectional view of a bubble jet head according to the present invention, FIG. 2 (α) and FIG. 2 cb>, and FIG. 2 (C) are cross-sectional views of a conventional bubble jet head. 1... Substrate 3... Heating resistor 4... Electric conductor 6... Ink 7. ......Nozzle plate 9...Nozzle hole 10...Nitride protective film or higher
Claims (1)
力を供給する電気導体とインクを吐出するノズル穴を有
するノズル板から成るバブルジェットヘッドにおいて、
前記ノズル板へ窒化物の保護膜を形成したことを特徴と
するバブルジェットヘッド用ノズル板。A bubble jet head comprising a heating resistor formed on a substrate, an electric conductor for supplying power to the heating resistor, and a nozzle plate having nozzle holes for ejecting ink,
A nozzle plate for a bubble jet head, characterized in that a nitride protective film is formed on the nozzle plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13388187A JPS63297050A (en) | 1987-05-29 | 1987-05-29 | Nozzle plate for bubble jet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13388187A JPS63297050A (en) | 1987-05-29 | 1987-05-29 | Nozzle plate for bubble jet head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63297050A true JPS63297050A (en) | 1988-12-05 |
Family
ID=15115267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13388187A Pending JPS63297050A (en) | 1987-05-29 | 1987-05-29 | Nozzle plate for bubble jet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63297050A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03297654A (en) * | 1990-04-16 | 1991-12-27 | Ricoh Co Ltd | Ink flying recording method |
| EP0888892A3 (en) * | 1997-07-03 | 2000-06-14 | Canon Kabushiki Kaisha | Orifice plate and method of manufacture, for a liquid discharging apparatus |
| KR100438711B1 (en) * | 2002-01-03 | 2004-07-05 | 삼성전자주식회사 | manufacturing method of Ink jet print head |
-
1987
- 1987-05-29 JP JP13388187A patent/JPS63297050A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03297654A (en) * | 1990-04-16 | 1991-12-27 | Ricoh Co Ltd | Ink flying recording method |
| EP0888892A3 (en) * | 1997-07-03 | 2000-06-14 | Canon Kabushiki Kaisha | Orifice plate and method of manufacture, for a liquid discharging apparatus |
| US6328420B1 (en) | 1997-07-03 | 2001-12-11 | Canon Kabushiki Kaisha | Method for manufacturing an orifice plate for use of a liquid discharge, an orifice plate, a liquid discharge provided with such orifice plate, and a method for manufacturing such liquid discharge |
| KR100438711B1 (en) * | 2002-01-03 | 2004-07-05 | 삼성전자주식회사 | manufacturing method of Ink jet print head |
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