JPS6329219Y2 - - Google Patents

Info

Publication number
JPS6329219Y2
JPS6329219Y2 JP1982064226U JP6422682U JPS6329219Y2 JP S6329219 Y2 JPS6329219 Y2 JP S6329219Y2 JP 1982064226 U JP1982064226 U JP 1982064226U JP 6422682 U JP6422682 U JP 6422682U JP S6329219 Y2 JPS6329219 Y2 JP S6329219Y2
Authority
JP
Japan
Prior art keywords
differential pressure
temperature
static pressure
pressure
piezoresistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982064226U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58167432U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6422682U priority Critical patent/JPS58167432U/ja
Publication of JPS58167432U publication Critical patent/JPS58167432U/ja
Application granted granted Critical
Publication of JPS6329219Y2 publication Critical patent/JPS6329219Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP6422682U 1982-04-30 1982-04-30 差圧伝送器 Granted JPS58167432U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6422682U JPS58167432U (ja) 1982-04-30 1982-04-30 差圧伝送器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6422682U JPS58167432U (ja) 1982-04-30 1982-04-30 差圧伝送器

Publications (2)

Publication Number Publication Date
JPS58167432U JPS58167432U (ja) 1983-11-08
JPS6329219Y2 true JPS6329219Y2 (enrdf_load_html_response) 1988-08-05

Family

ID=30074270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6422682U Granted JPS58167432U (ja) 1982-04-30 1982-04-30 差圧伝送器

Country Status (1)

Country Link
JP (1) JPS58167432U (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5640735A (en) * 1979-09-10 1981-04-17 Toshiba Corp Transmitter for differential pressure

Also Published As

Publication number Publication date
JPS58167432U (ja) 1983-11-08

Similar Documents

Publication Publication Date Title
US4320664A (en) Thermally compensated silicon pressure sensor
US4333349A (en) Binary balancing apparatus for semiconductor transducer structures
US6973836B2 (en) Semiconductor pressure sensor having diaphragm
US4480478A (en) Pressure sensor employing semiconductor strain gauge
US20180328804A1 (en) Sensor element for a pressure sensor
US5291788A (en) Semiconductor pressure sensor
EP0083496B1 (en) Semiconductor pressure transducer
US20030041670A1 (en) Method of adjusting pressure sensor
US3956927A (en) Strain gauge transducer apparatus
JP2001272293A (ja) 圧力センサ
US4726232A (en) Temperature coefficient compensated pressure transducer
US20020167058A1 (en) Semiconductor pressure sensor decreasing creep stress in <110> crystalline axis direction
JPS6329219Y2 (enrdf_load_html_response)
JP2895262B2 (ja) 複合センサ
JPH0542613B2 (enrdf_load_html_response)
JPH03249532A (ja) 半導体圧力計
EP4194832A2 (en) Pressure sensor with trim resistors
JPH10142086A (ja) 半導体圧力センサとその製造方法及びこれを用いた差圧伝送器
JP2689744B2 (ja) 複合センサとそれを用いた複合伝送器とプラントシステム
US12436049B2 (en) Sensor die with a diaphragm
JP2636404B2 (ja) 半導体差圧測定装置
JPS6154270B2 (enrdf_load_html_response)
JP2985462B2 (ja) 半導体圧力計
JPS6341079A (ja) 半導体歪変換装置
JPH06102128A (ja) 半導体複合機能センサ