JPS63291611A - Ultrasonic wave filtration and classification device - Google Patents
Ultrasonic wave filtration and classification deviceInfo
- Publication number
- JPS63291611A JPS63291611A JP62124861A JP12486187A JPS63291611A JP S63291611 A JPS63291611 A JP S63291611A JP 62124861 A JP62124861 A JP 62124861A JP 12486187 A JP12486187 A JP 12486187A JP S63291611 A JPS63291611 A JP S63291611A
- Authority
- JP
- Japan
- Prior art keywords
- filter material
- slurry liquid
- filter medium
- liquid
- filtration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001914 filtration Methods 0.000 title claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 41
- 239000002002 slurry Substances 0.000 claims abstract description 35
- 239000000706 filtrate Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 abstract description 11
- 230000010485 coping Effects 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000002079 cooperative effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Filtration Of Liquid (AREA)
Abstract
Description
【発明の詳細な説明】
[発明の目的]
(産業上の利用分野)
この発明は、スラリー液中に分散した微粉末の超音波利
用による濾過、分級装置に間する。DETAILED DESCRIPTION OF THE INVENTION [Objective of the Invention] (Industrial Application Field) The present invention relates to an apparatus for filtering and classifying fine powder dispersed in a slurry liquid using ultrasonic waves.
(従来技術)
これまでの超音波濾過、分級装置を、第4図によって示
す。(Prior Art) A conventional ultrasonic filtration and classification device is shown in FIG.
即ちこの従来fM置にあっては、圧力容器イ内に回転す
る円筒状濾材口の外側にスラリー液流人管(ロ)八と超
音波振動子二が共に臨んでおり、前記濾材口の内側に濾
過液排出管ホが臨んでいるため、スラリー液の流入側の
圧力が制約を受ける。That is, in this conventional fM arrangement, the slurry liquid flow pipe (b) 8 and the ultrasonic vibrator 2 both face the outside of the cylindrical filter media opening rotating in the pressure vessel A, and the inside of the filter media opening Since the filtrate discharge pipe faces the filtrate discharge pipe E, the pressure on the inflow side of the slurry liquid is restricted.
このため濾材口の高精度化、スラリー液の濃度との関連
で、濾過液の流速が著しく落ちて、処理量が極端に低下
し、装置そのものの実用性を乏しくするという重大な欠
陥を有していた。For this reason, due to the high precision of the filter media opening and the concentration of the slurry liquid, the flow rate of the filtrate drops significantly, resulting in an extremely low throughput, which has a serious flaw that makes the device itself impractical. was.
(発明が解決しようとする問題点)
本発明は、従来装置のかかる現状に鑑みてなされたもの
で、濾材の内側をスラリー液の流入側、外側く濾過液出
口側)を超音波発振領域とすることにより、スラリー液
の濃度、濾材の高精度化に対応可能な処理能力を備えた
濾過、分級装置を提供するものである。(Problems to be Solved by the Invention) The present invention was made in view of the current situation of conventional devices, and the inside of the filter medium is used as the slurry liquid inflow side, and the outside (filtrate exit side) is used as the ultrasonic oscillation area. By doing so, it is possible to provide a filtration/classification device having a processing capacity that can handle the concentration of the slurry liquid and the high precision of the filter medium.
[発明の構成]
(第一実施例)
以下図面の実施例によって説明すると、第1図において
10が圧力容器、5がその内部に回転運動を付与して設
けられた円筒状の濾材である。その回転手段は同図では
示されないが、第2図に示すように圧力容器10外に備
えたモーター17に駆動される伝動系1日を、濾材5と
一体に構成されたリサイクル管8の外端部に連結して回
転させる。[Structure of the Invention] (First Embodiment) The following will be described with reference to the embodiments shown in the drawings. In FIG. 1, numeral 10 is a pressure vessel, and 5 is a cylindrical filter medium provided inside thereof with rotational motion. Although the rotating means is not shown in the same figure, as shown in FIG. Connect to the end and rotate.
そして前記圧力容器10の外部より、前記濾材5の内側
に該濾材5の回転とは無間係にスラリー液流人管4を臨
ませ、他方前記濾材5の外側(濾過液出口側)に超音波
振動子のホーン11(ホモジナイザ)を臨ませるととも
にその発振領域を外れた適宜位置に濾過液排出口9を設
けて構成される。Then, from outside the pressure vessel 10, a slurry liquid flow pipe 4 is made to face the inside of the filter medium 5 irrespective of the rotation of the filter medium 5, and an ultrasonic wave is applied to the outside of the filter medium 5 (on the filtrate outlet side). It is constructed by facing the horn 11 (homogenizer) of the vibrator and providing a filtrate discharge port 9 at an appropriate position outside the oscillation area.
なお同図中6は円筒状濾材5のエンドキャップ、7は同
じくボスキャップである。In the figure, 6 is an end cap of the cylindrical filter medium 5, and 7 is a boss cap.
以上の本発明装置を組込んだ濾過循環経路の総体を略図
的に示すと第2図の通りである。FIG. 2 schematically shows the entire filtration circulation path incorporating the above-described device of the present invention.
(作用)
スラリー液タンク13内のスラリー液1は、ポンプ14
に吸引されてスラリー液流人管4より回転する濾材5の
内側に圧送される。なおその際流量調整バルブ15を操
作することにより圧送スラリー液の一部をタンクに戻し
て、各種スラリー液の内容と濾材の目開きに対して適当
な圧送条件を設定し、その加減は圧力計16で確認する
。(Function) The slurry liquid 1 in the slurry liquid tank 13 is pumped 14
The slurry is sucked into the slurry liquid flow pipe 4 and is forced into the inside of the rotating filter medium 5. At this time, a part of the pumped slurry liquid is returned to the tank by operating the flow rate adjustment valve 15, and appropriate pumping conditions are set for the contents of each slurry liquid and the opening of the filter medium. Check on 16.
さて濾材5の内側に圧送されたスラリー液1は、濾材5
で分級、濾過され、濾過液出口側より排出側へ導かれ装
置外部に回収されるが、一部は分級、濾過を経ないで濾
材5と一体に構成されたリサイクル管8よりスラリー液
タンク13内に戻される。Now, the slurry liquid 1 that has been pressure-fed inside the filter medium 5 is
The slurry liquid is classified and filtered, guided from the filtrate outlet side to the discharge side, and recovered outside the device. However, a part of the slurry liquid is passed through the recycling pipe 8, which is integrated with the filter medium 5, without being classified or filtered, into the slurry liquid tank 13. brought back inside.
この際の循環液量と流入圧力は前記流屋調整バルブ15
に加え循環調整バルブ20を操作することにより決定さ
れる。At this time, the amount of circulating fluid and the inflow pressure are determined by the flow chamber adjustment valve 15.
In addition to this, it is determined by operating the circulation adjustment valve 20.
今、その分級、濾過作用について詳細に説明すると、本
発明にあっては、振動子ホーン11が濾材5の濾過液出
口側(即ち液圧送側と反対側)に位置して超音波照射で
きるようにしであるから、相当の圧力(従来装置に比し
数倍乃至数十倍の圧力)で流した場合にも超音波発振器
の負荷を増大したり、キャビテーションの効果を減じた
りしない。そして濾材5の目開きよりも小さい粒径の粒
子が濾材5を通過して濾過液3として排出口9より回収
される。この際、濾材6の目開きよりも大きな粒径の粒
子は、濾材5の内側面に一時的に捕捉され、さらに流入
する粒子によりケーク層の形成が促されるが、濾材5の
回転により濾材5の外側面が順次超音波発振領域に運ば
れるから、その振動作用と濾材5内に供給されるスラリ
ー液1のリサイクル液2との協働作用により、逐次濾材
5の再生が行なわれ、そのリサイクル液2はリサイクル
管8よりタンク13へ戻される。Now, to explain the classification and filtration action in detail, in the present invention, the vibrator horn 11 is located on the filtrate outlet side of the filter medium 5 (i.e., the side opposite to the liquid pressure feeding side) so that it can irradiate ultrasonic waves. Because it is made of iron, it does not increase the load on the ultrasonic oscillator or reduce the cavitation effect even when flowing at a considerable pressure (several to tens of times the pressure compared to conventional devices). Particles having a particle size smaller than the opening of the filter medium 5 pass through the filter medium 5 and are collected as the filtrate 3 from the discharge port 9. At this time, particles with a particle size larger than the opening of the filter medium 6 are temporarily captured on the inner surface of the filter medium 5, and the inflowing particles promote the formation of a cake layer. Since the outer surface of the filter medium 5 is sequentially transported to the ultrasonic oscillation area, the filter medium 5 is sequentially regenerated due to the vibration effect and the cooperative action of the slurry liquid 1 supplied into the filter medium 5 with the recycling liquid 2, and its recycling The liquid 2 is returned to the tank 13 through the recycle pipe 8.
(第二実施例) 本発明のもう一つの実施例を第3図に示す。(Second example) Another embodiment of the invention is shown in FIG.
即ち同図においては、圧力容器lO内の中間に平板状の
濾材5が支持リング24を介して固定され、その濾材5
を境に一方(内側)にスラリー液流人管4及びリサイク
ル管8を臨ませ、他方(i!過液出口側)に超音波振動
子のホーン11を臨ませるとともに適宜位置に濾過液排
出口9を設ける。That is, in the same figure, a flat filter medium 5 is fixed in the middle of the pressure vessel IO through a support ring 24, and the filter medium 5
The slurry flow pipe 4 and the recycle pipe 8 are facing on one side (inside), and the horn 11 of the ultrasonic vibrator is facing on the other side (i! filtrate outlet side), and the filtrate discharge port is located at an appropriate position. 9 will be provided.
(作用)
今これを前記の循環濾過経路に組込んだ場合の作用につ
いては、第一実施例と全く同様である。(Function) The function when this is incorporated into the above-mentioned circulation filtration path is exactly the same as that of the first embodiment.
[発明の効果コ
本発明は以上のようで、振動子ホーンが濾材の濾過液出
口側(即ち液圧送側と反対側)に位置して超音波照射さ
れるようした結果、超音波発振器の負荷を増したり、キ
ャビテーションの効果を減じたりすることなく、必要の
圧力でスラリー液1の流入を行なえ、濾過精度が高く流
れ難い濾材においても円滑な分級、濾過を可能とする。[Effects of the Invention] The present invention is as described above, and as a result of irradiating ultrasonic waves with the vibrator horn located on the filtrate outlet side of the filter medium (i.e., the side opposite to the liquid pressure feeding side), the load on the ultrasonic oscillator is reduced. The slurry liquid 1 can be flowed in at the required pressure without increasing the pressure or reducing the effect of cavitation, and the filtration accuracy is high, allowing smooth classification and filtration even in a filter medium that is difficult to flow.
そして濾材の目開きよりも大きな粒径の粒子は、濾材の
内側面に一時的に捕捉され、さらに流入する粒子により
ケーク層の形成が促されるが、濾材の超音波発振による
振動作用と濾材の内側に供給されるスラリー液1のリサ
イクル液との協働作用により、リサイクル液2とともに
タンク13に戻され、逐次濾材の再生が行なわれる。そ
してこのことにより濾過効率を著しく向上させることが
できる。Particles with a diameter larger than the opening of the filter medium are temporarily captured on the inner surface of the filter medium, and the inflowing particles promote the formation of a cake layer. Due to the cooperation of the slurry liquid 1 supplied inside with the recycle liquid, the slurry liquid 1 is returned to the tank 13 together with the recycle liquid 2, and the filter medium is successively regenerated. This can significantly improve filtration efficiency.
本発明装置の第一実施例の使用実績を、前記従来Haと
比較して示すと、
まず本発明装置において、
超音波振動子の振動数; 19KHzIε材;
金網積層濾材 公称 1,4zm濾材の面H4:
10.6cm2
振動子ホーン先端と濾材の隙間; 3 m m前記
の条件で酸化珪素粉末(平均粒径1.65−二コールタ
ーカウンタによる測定値)100grを水(0,45/
Pのメンブレンフィルタで濾過したもの)10ノ(スラ
リー濃度1.0wt%)に懸濁させ、0.8Kg/cr
n”Gの差圧で、分級、濾過を行なった。The usage results of the first embodiment of the device of the present invention will be shown in comparison with the conventional Ha mentioned above. First, in the device of the present invention, the frequency of the ultrasonic transducer: 19 KHz Iε material;
Wire mesh laminated filter medium Nominal 1,4zm filter medium surface H4:
10.6 cm2 Gap between the tip of the vibrator horn and the filter medium; 3 mm Under the above conditions, 100 gr of silicon oxide powder (average particle size 1.65 - measured value with a two-coulter counter) was mixed with water (0.45/ml).
filtered through a P membrane filter) suspended in 10 pieces (slurry concentration 1.0 wt%),
Classification and filtration were performed at a differential pressure of n''G.
その結果は第5図の表の(A)の通りである。The results are shown in (A) of the table in FIG.
同表は、横軸に総分級、濾過量V (m))、縦軸に単
位時間当たりの処理量d V/dθ(m7/m i n
)を取って表わした。In this table, the horizontal axis shows the total classification and filtration amount V (m)), and the vertical axis shows the throughput per unit time dV/dθ (m7/min
).
これに対し従来装置においては、上記本発明装置の場合
と同一条件の超音波振動子、濾材、濾材の面積、振動子
ホーン先端と濾材の隙間、およびスラリー液で、0.5
Kg/cm’Gの差圧で分級、濾過を行なった。In contrast, in the conventional device, the ultrasonic transducer, the filter medium, the area of the filter medium, the gap between the tip of the vibrator horn and the filter medium, and the slurry liquid under the same conditions as the device of the present invention are 0.5
Classification and filtration were performed at a differential pressure of Kg/cm'G.
その結果は第5図の表の(B)の通りである。The results are shown in (B) of the table in FIG.
この(A)と(B)との比較により、分級、濾過量にお
ける本発明装置の優秀性が確証されるものである。The comparison between (A) and (B) confirms the superiority of the apparatus of the present invention in terms of classification and filtration amount.
第1図は本発明装置の実施例の要部縦断側面図、第2図
は本発明装置を組込んだ略図的側面図、第3図は本発明
装置の別の実施例を示す要部縦断側面図、第4図は従来
装置の要部縦断側面図、第5図は本発明装置と従来装置
との比較使用実績表。
1−−−スラリー液、4−m−スラリー液流人管、5−
m−濾材、8−m−リサイクル管、9−m−濾過液排出
口、10−m−圧力容器、11−m−超音波振動子のホ
ーン、12−m−超音波振動子、17−−−モーター、
18−m−伝動系。
特許出願人 冨士フィルター工業株式会社代理人(64
40)弁理士 福1)尚夫旺−面
311 五、、図
31!↓」21FIG. 1 is a longitudinal sectional side view of a main part of an embodiment of the device of the present invention, FIG. 2 is a schematic side view incorporating the device of the invention, and FIG. 3 is a longitudinal sectional view of a main part showing another embodiment of the device of the present invention. FIG. 4 is a side view of the main part of the conventional device, and FIG. 5 is a comparative usage record table of the device of the present invention and the conventional device. 1----Slurry liquid, 4-m-Slurry liquid flow pipe, 5-
m-filter medium, 8-m-recycle pipe, 9-m-filtrate outlet, 10-m-pressure vessel, 11-m-horn of ultrasonic vibrator, 12-m-ultrasonic vibrator, 17-- - motor,
18-m-Transmission system. Patent applicant Fuji Filter Industry Co., Ltd. agent (64)
40) Patent Attorney Fuku 1) Shangfuwang-men 311 5,, Figure 31! ↓”21
Claims (1)
ラリー液流人管を、その外側即ち濾過液出口側に超音波
振動子を臨ませたことを特徴とする、超音波濾過、分級
装置。 2)濾材が円筒状で且つ回転運動を付与されるものとし
た特許請求の範囲第1項記載の超音波濾過、分級装置。 3)濾材が平板状で支持リングを介して固定される特許
請求の範囲第1項記載の超音波濾過、分級装置。[Claims] 1) A filter medium provided in a pressure vessel is characterized in that a slurry liquid flow tube is placed inside the filter medium, and an ultrasonic vibrator is placed outside the filter medium, that is, on the filtrate outlet side. , ultrasonic filtration and classification equipment. 2) The ultrasonic filtration and classification device according to claim 1, wherein the filter medium has a cylindrical shape and is subjected to rotational motion. 3) The ultrasonic filtration and classification apparatus according to claim 1, wherein the filter medium is flat and fixed via a support ring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62124861A JPS63291611A (en) | 1987-05-21 | 1987-05-21 | Ultrasonic wave filtration and classification device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62124861A JPS63291611A (en) | 1987-05-21 | 1987-05-21 | Ultrasonic wave filtration and classification device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63291611A true JPS63291611A (en) | 1988-11-29 |
Family
ID=14895914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62124861A Pending JPS63291611A (en) | 1987-05-21 | 1987-05-21 | Ultrasonic wave filtration and classification device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63291611A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07136425A (en) * | 1993-11-22 | 1995-05-30 | Totsupusu Kyodo Kumiai | Liquid purifying apparatus |
EP0947291A3 (en) * | 1998-03-30 | 2002-06-05 | SpeedFam-IPEC Inc. | Slurry recycling system of CMP apparatus and method of same |
CN1305547C (en) * | 1999-09-28 | 2007-03-21 | 自由度半导体公司 | Filter device and method of use |
JP2010000414A (en) * | 2008-06-18 | 2010-01-07 | Tokuyama Corp | Filter |
-
1987
- 1987-05-21 JP JP62124861A patent/JPS63291611A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07136425A (en) * | 1993-11-22 | 1995-05-30 | Totsupusu Kyodo Kumiai | Liquid purifying apparatus |
EP0947291A3 (en) * | 1998-03-30 | 2002-06-05 | SpeedFam-IPEC Inc. | Slurry recycling system of CMP apparatus and method of same |
CN1305547C (en) * | 1999-09-28 | 2007-03-21 | 自由度半导体公司 | Filter device and method of use |
JP2010000414A (en) * | 2008-06-18 | 2010-01-07 | Tokuyama Corp | Filter |
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