JPS63286809A - Base plate exposing device - Google Patents
Base plate exposing deviceInfo
- Publication number
- JPS63286809A JPS63286809A JP62121095A JP12109587A JPS63286809A JP S63286809 A JPS63286809 A JP S63286809A JP 62121095 A JP62121095 A JP 62121095A JP 12109587 A JP12109587 A JP 12109587A JP S63286809 A JPS63286809 A JP S63286809A
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- mask
- pale
- dark
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical Effects 0.000 abstract 3
- 238000002310 reflectometry Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Exposure apparatus for microlithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Abstract
PURPOSE: To easily perform positioning of a light transmissive base plate to be exposed and a mask, by placing focuses on reflection marks on the base plate and the mask through the contrast between the dark and pale patterns projected upon the plate and mask.
CONSTITUTION: A light transmissive plate 17 which is positioned on the optical axis of a projecting optical system and provided with dark and pale patterns on both surfaces is provided and the dark and pale patterns respectively projected on a base plate 12 to be exposed and mask 13 are received by means of an image sensor 20. Focalizing operations of the base plate and mask are carried out by moving the base plate, mask and an observing optical system relatively to each other so that average contrast values of the dark and pale patterns projected on the surface or back of the base plate 12 and a reflection mark 11 can become equal to each other. Therefore, even if the transmissive base plate having a lower reflectivity is on one side, focalizing operations can be carried out easily and accurate positioning can be made.
COPYRIGHT: (C)1988,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62121095A JPH0677097B2 (en) | 1987-05-20 | 1987-05-20 | Substrate exposure system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62121095A JPH0677097B2 (en) | 1987-05-20 | 1987-05-20 | Substrate exposure system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63286809A true JPS63286809A (en) | 1988-11-24 |
JPH0677097B2 JPH0677097B2 (en) | 1994-09-28 |
Family
ID=14802752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62121095A Expired - Lifetime JPH0677097B2 (en) | 1987-05-20 | 1987-05-20 | Substrate exposure system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0677097B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03112123A (en) * | 1989-09-27 | 1991-05-13 | Canon Inc | Aligner |
JPH0934134A (en) * | 1995-07-19 | 1997-02-07 | Nikon Corp | Alignment device |
-
1987
- 1987-05-20 JP JP62121095A patent/JPH0677097B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03112123A (en) * | 1989-09-27 | 1991-05-13 | Canon Inc | Aligner |
JPH0934134A (en) * | 1995-07-19 | 1997-02-07 | Nikon Corp | Alignment device |
Also Published As
Publication number | Publication date |
---|---|
JPH0677097B2 (en) | 1994-09-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57192929A (en) | Projector provided with automatic focusing function | |
JPS63133625A (en) | Alignment device | |
JPH02292813A (en) | Automatic focussing device | |
JPS647618A (en) | Method and apparatus for exposing semiconductor | |
JPS63286809A (en) | Base plate exposing device | |
JPS63286810A (en) | Base plate exposing device | |
JPS61210627A (en) | Pinhole plate for measuring effective light source | |
JPS62114222A (en) | Exposing apparatus | |
JPH04348019A (en) | Focus position detecting device | |
JPH02191314A (en) | Pattern detector | |
JPH0412207A (en) | Position detector | |
JPS60107130A (en) | Position indicating device | |
JPH02130910A (en) | Alignment | |
JPS62149129A (en) | Reducing projection-type alignment system | |
JPS6251219A (en) | Clearance setting instrument | |
JPH02110914A (en) | Exposing device | |
JPS58134640A (en) | Matching mechanism for exposing device | |
JPS6375535A (en) | Chromatoscanner | |
JPS58195833A (en) | Image pickup device for carved character | |
JPH01240803A (en) | Detecting apparatus for pattern position | |
JPS61100931A (en) | Method of exposing semiconductor | |
JPS5677812A (en) | Method of positioning optical-path splitting prism of focusing detector on photodetector substrate | |
JPH04157468A (en) | Projection aligner | |
JPS59155812A (en) | Focusing device | |
JPS62149128A (en) | Exposure device |