JPS63286715A - Automatic output controller for optical sensor - Google Patents

Automatic output controller for optical sensor

Info

Publication number
JPS63286715A
JPS63286715A JP62121183A JP12118387A JPS63286715A JP S63286715 A JPS63286715 A JP S63286715A JP 62121183 A JP62121183 A JP 62121183A JP 12118387 A JP12118387 A JP 12118387A JP S63286715 A JPS63286715 A JP S63286715A
Authority
JP
Japan
Prior art keywords
circuit
light
amount
apc
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62121183A
Other languages
Japanese (ja)
Other versions
JPH0617784B2 (en
Inventor
Takashi Yamaoka
隆 山岡
Minoru Inada
稔 稲田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yasunaga Corp
Original Assignee
Yasunaga Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yasunaga Corp filed Critical Yasunaga Corp
Priority to JP62121183A priority Critical patent/JPH0617784B2/en
Publication of JPS63286715A publication Critical patent/JPS63286715A/en
Publication of JPH0617784B2 publication Critical patent/JPH0617784B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
  • Control Of Non-Electrical Variables (AREA)

Abstract

PURPOSE:To stabilize the projecting quantity and the photodetecting quantity without exerting damage on the service life of a projector, and also, to prevent a variation of the photodetecting quantity from being suppressed, by providing a circuit for limiting the amplitude of a signal, on an output side of a second automatic output control (APC) circuit. CONSTITUTION:A projector 2, a monitor circuit 4, the first APC circuit 6 and a projector driving circuit 7 form a first negative feedback loop, and on the other hand, the projector 2, a photodetector 3, a photodetecting circuit, a second APC circuit 12 and the projector driving circuit 7 form a second negative feedback loop. Accordingly, an APC device operates as a light quantity stabilizing circuit provided with a double negative feedback loop. In such a state, first of all, the projecting quantity and the photodetecting quantity are stabilized by these negative feedback loops. When the photodetecting quantity is stabilized, It is remains as it is, a variation of the photodetecting quantity containing the information of a surface state is also suppressed simultaneously, therefore, in such double negative feedback loops, the second one contains an amplitude limiting circuit 13 or a gradient limiting circuit 14 of a signal in its loop. In such a way, an amplitude exceeding a prescribed value or a signal variation exceeding a prescribed speed is not suppressed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、投光器と受光器を有する光学式センサにおい
てttを安定化する自動出力制御回路に関する0本発明
においてAPC回路とは自動出力制御回路のことを表し
ている。光学式センサとは、例えば光学大傷センサのこ
とである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an automatic output control circuit for stabilizing tt in an optical sensor having a light emitter and a light receiver.In the present invention, the APC circuit refers to an automatic output control circuit. represents. The optical sensor is, for example, an optical large flaw sensor.

従来の技術 被測定物の表面状態を検査する光学式センサは、投光器
から一定の強さの光を投光し、被測定物から反射または
透過した光を受光し、受光量の変化を解析して表面状態
を判定する。光量が安定でないと、正確な測定ができな
いだけでなく、光学的ノイズの大きな被測定物、例えば
研磨面の表面状態を測定する場合、受光量の乱れが大き
く、異常部分を判定するためには複雑な処理が必要であ
り、処理時間は長くなり、かつ処理装置は複雑になる。
Conventional technology Optical sensors that inspect the surface condition of objects to be measured emit light of a certain intensity from a projector, receive the light reflected or transmitted from the object, and analyze changes in the amount of light received. to determine the surface condition. If the amount of light is not stable, not only will accurate measurements not be possible, but when measuring the surface condition of an object with large optical noise, such as a polished surface, the amount of received light will be greatly disturbed, making it difficult to determine abnormal areas. Complex processing is required, processing time is long, and processing equipment is complex.

そのためまず基本的に投光量と受光量は安定でなければ
ならない。
Therefore, basically, the amount of light emitted and the amount of light received must be stable.

反射型または透過型の光学式センサにおいて光量を安定
化するためには負帰還技術が利用される、その場合投光
器の光は、投光器の近くに配置したモニタ受光器により
検出され、検出した光の量に応じて投光器の駆動出力が
制御される。:l!た特にモニタ受光器を設けなくとも
、本来の受光器により検出した光の量に従って同様の制
御を行うこともできる。これらの技術は、例えば特開昭
59−52889号公報または特開昭61−19204
4号公報に記載されている。
Negative feedback technology is used to stabilize the light intensity in reflective or transmissive optical sensors, in which case the light from the emitter is detected by a monitor receiver placed near the emitter, and the detected light is The drive output of the projector is controlled according to the amount. :l! In particular, even without providing a monitor light receiver, similar control can be performed according to the amount of light detected by the original light receiver. These techniques are disclosed in, for example, JP-A-59-52889 or JP-A-61-19204.
It is described in Publication No. 4.

発明が解決しようとする問題点 投光器側に設けたモニタ受光器により光量の制御を行う
場合、投光量は一定に制御できるが、被測定物の表面反
射率または透過率に従って受光量は大幅に変化するので
、正確な測定が困難になる。例えば被測定物の表面から
の反射光の受光位置により被測定物までの距離を三角測
量する距離センサの場合、このような受光量の変動は測
定精度を大幅に低下させる。
Problems to be Solved by the Invention When controlling the amount of light using a monitor receiver installed on the projector side, the amount of emitted light can be controlled to be constant, but the amount of received light changes significantly depending on the surface reflectance or transmittance of the object to be measured. This makes accurate measurement difficult. For example, in the case of a distance sensor that triangulates the distance to a measured object based on the receiving position of reflected light from the surface of the measured object, such fluctuations in the amount of received light significantly reduce measurement accuracy.

一方本来の受光器により光量を検出する場合、投光器の
実際の投光量はモニタできないので、被測定物の状態に
よっては投光量は異常に増加することがあり、投光器の
寿命を短くしてしまう。
On the other hand, when detecting the amount of light using the original light receiver, the actual amount of light emitted by the projector cannot be monitored, so depending on the state of the object to be measured, the amount of light emitted may increase abnormally, shortening the life of the projector.

負帰還技術により光量を安定化したとしても、同時に被
測定物の表面状態の変化を表す情報を抑圧してしまって
はいけない。
Even if the amount of light is stabilized using negative feedback technology, information representing changes in the surface state of the object to be measured must not be suppressed at the same time.

本発明の目的は、投光器の寿命に害を及ぼすことなく、
投光量と受光量を安定化し、しがも被測定物の表面状態
の変化を表す受光量の変化を抑圧しない光学式センサの
自動出力制御装置を提供することにある。
The purpose of the present invention is to
It is an object of the present invention to provide an automatic output control device for an optical sensor that stabilizes the amount of light emitted and the amount of received light and does not suppress changes in the amount of received light that represent changes in the surface condition of an object to be measured.

問題点を解決するための手段 本発明は、投光器と受光器を有する光学式センサにおい
て、投光器の投光量を検出するなめモニタ受光器を含む
モニタ回路、モニタ回路により検出した投光量に応じて
投光器駆動回路の駆動出方を制御する第1のAPC回路
、受光器の受光量を検出する受光回路、および受光回路
により検出した受光量に応じて投光器駆動回路の駆動出
力を制御する第2のAPC回路を設けた光学式センサの
自動出力制御装置を前提としている。
Means for Solving the Problems The present invention provides an optical sensor having a light emitter and a light receiver, which includes a monitor circuit including a diagonal monitor receiver for detecting the amount of light emitted by the light emitter, and a monitor circuit that detects the amount of light emitted from the light emitter in accordance with the amount of light emitted by the monitor circuit. A first APC circuit that controls the drive output of the drive circuit, a light receiving circuit that detects the amount of light received by the light receiver, and a second APC circuit that controls the drive output of the projector drive circuit in accordance with the amount of light received by the light receiving circuit. The premise is an automatic output control device for an optical sensor equipped with a circuit.

このような装置において、本発明によればこの目的は次
のようにして達成される。すなわち第2のAPC回路の
出力側に信号の振幅を制限する回路を設ける。
In such a device, this object is achieved according to the invention as follows. That is, a circuit for limiting the amplitude of the signal is provided on the output side of the second APC circuit.

また第2のAPC回路の出力側に信号の勾配を制限する
回路を設けることにより、同じ目的を達成することがで
きる。
The same objective can also be achieved by providing a circuit for limiting the slope of the signal on the output side of the second APC circuit.

さらに第2のAPC回路の出方側に信号の振幅を制限す
る回路と勾配を制限する回路両方を設けても同じ目的が
達成できる。その際信号の振幅を制限する回路と勾配を
制限する回路を直列に接続することが目的に合っている
。しがし両方の回路は並列に接続してもよい。
Furthermore, the same objective can be achieved by providing both a circuit for limiting the amplitude of the signal and a circuit for limiting the slope on the output side of the second APC circuit. In this case, it is expedient to connect the circuit for limiting the amplitude of the signal and the circuit for limiting the slope in series. However, both circuits may be connected in parallel.

ここにおいて信号の振幅を制限する回路とは、例えばリ
ミッタのことであり、所定のレベルを上回る信号または
下回る信号またはその両方を制限するものである。−力
信号の勾配を制限する回路とは、例えばローパスフィル
タまたは積分器のことである。
Here, the circuit that limits the amplitude of a signal is, for example, a limiter, which limits signals that exceed or fall below a predetermined level, or both. - The circuit for limiting the slope of the force signal is, for example, a low-pass filter or an integrator.

作用 投光器、モニタ回路、第1のAPC回路および投光器駆
動回路は、いわば第1の負帰還ループを形成しており、
−左投光器、受光器、受光回路、第2のA10回路およ
び投光器駆動回路は、第2の負帰還ループを形成してい
る。従って本発明による自動出力制御装置は、二重の負
帰還ループを備えた光景安定化回路として作用するもの
である、従ってまずこれらの負帰還ループにより投光量
および受光量が安定化する。
The working projector, the monitor circuit, the first APC circuit, and the projector drive circuit form a so-called first negative feedback loop,
- The left emitter, the light receiver, the light receiving circuit, the second A10 circuit and the emitter drive circuit form a second negative feedback loop. The automatic output control device according to the invention therefore acts as a sight stabilizing circuit with double negative feedback loops, so that first of all these negative feedback loops stabilize the amount of light emitted and the amount of light received.

受光量を安定化した場合、そのままでは同時に表面状態
の情報を含んだ受光量変化も抑圧してしまうので、この
ような二重の負帰還ループのうち第2のものは、そのル
ープ内に信号の振幅または勾配を制限する回路を含む、
それにより所定の値以上の振幅または所定の速度以上の
信号変化は抑圧されない0本発明によれば、これら大き
な振幅の発生または高速の変化の発生を表面の異常と判
定するので、本発明による装置では、表面の異常は明確
に判定できる。
If the amount of received light is stabilized, changes in the amount of received light that contain information about the surface state will also be suppressed, so the second of these double negative feedback loops including a circuit that limits the amplitude or slope of
As a result, amplitudes greater than a predetermined value or signal changes greater than a predetermined speed are not suppressed.According to the present invention, since the occurrence of these large amplitudes or the occurrences of high-speed changes is determined to be an abnormality on the surface, the apparatus according to the present invention In this case, surface abnormalities can be clearly determined.

実施例の説明 図示した実施例は、いわゆる三角aIJ量方式によりセ
ンサと被測定物1の間の距離を測定する距離センサに本
発明を応用した例を示している。またここでは同時に被
測定物1の表面の傷を検査することができる。
DESCRIPTION OF THE EMBODIMENTS The illustrated embodiment shows an example in which the present invention is applied to a distance sensor that measures the distance between the sensor and the object 1 by a so-called triangular aIJ quantity method. Also, here, it is possible to simultaneously inspect the surface of the object to be measured 1 for flaws.

センサには、レーザー素子2からなる投光器と位置検出
素子3からなる受光器が被測定物に対向して設けられて
いる。レーザー素子2の近くに、レーザー光の一部を受
は取るモニタ受光器が配置されており、このモニタ受光
器はフォi−ダイオード4からなる。
The sensor is provided with a light emitter consisting of a laser element 2 and a light receiver consisting of a position detection element 3 facing the object to be measured. A monitor light receiver is arranged near the laser element 2 to receive and take part of the laser beam, and this monitor light receiver consists of a photo diode 4.

図に示す実施例においてフォトダイオード4の出力は、
図示していない増幅器を介して第1のA10回路に供給
される。ここでは第1のA10回路は簡単に差動増幅器
6として構成されており、この差動増幅器の他方の入力
端子には投光量基準電圧vR1が供給されている。差動
増幅器6の出力は、荷重加算口i?35の第1の入力端
子に供給される。
In the embodiment shown in the figure, the output of the photodiode 4 is:
The signal is supplied to the first A10 circuit via an amplifier (not shown). Here, the first A10 circuit is simply configured as a differential amplifier 6, and the light emission reference voltage vR1 is supplied to the other input terminal of this differential amplifier. The output of the differential amplifier 6 is the load addition port i? 35 first input terminals.

レーザー光の大部分は被測定物1に当たり、ここで反射
して位置検出素子3に達する0位置検出素子3は2つの
出力端子を有し、光が位置検出素子3の中央に当たると
、2つの出力端子がら同じ大きさの出力を生じ、かつ光
の当たる位置に応じて、一方の出力端子から他方の出力
端子より大きな出力を生じる。それによりいわゆる三角
測量が可能である。すなわち一方の出力端子の出力を■
1、他方の出力端子の出力をV2とすると、(Vl−V
2)/ (vl−+v2)は距離データとして利用でき
る。またV1+V2は光量データであり、被測定物1の
表面の傷の検査に利用される。
Most of the laser light hits the object to be measured 1 and is reflected here to reach the position sensing element 3. The position sensing element 3 has two output terminals, and when the light hits the center of the position sensing element 3, the two output terminals The output terminals produce the same output, and one output terminal produces a larger output than the other depending on the position of the light. So-called triangulation is thereby possible. In other words, the output of one output terminal is
1. If the output of the other output terminal is V2, (Vl-V
2)/(vl-+v2) can be used as distance data. Further, V1+V2 is light amount data, which is used to inspect the surface of the object to be measured 1 for flaws.

前記の演算を行うため、位置検出素子3の出力は、それ
ぞれ増幅器8,9を介して演算回路10に供給される。
In order to perform the above calculation, the output of the position detection element 3 is supplied to the calculation circuit 10 via amplifiers 8 and 9, respectively.

その際ここては位置検出素子の出力は電流値として供給
されるので、増幅器8.9は電流電圧変換を行う、演算
回路10内では所定の演算が行われ、距離と表面傷の判
定が行われ、図示していないディスプレイによって結果
が表示される。
At this time, since the output of the position detection element is supplied as a current value, the amplifier 8.9 performs current-voltage conversion, and a predetermined calculation is performed in the calculation circuit 10 to determine the distance and surface flaw. The results are displayed on a display (not shown).

増幅器8.9の出力は加算回路11で加算され、ここで
も差動増幅器12から構成された第2のA10回路に供
給される。その際加算を前記演算回路10において行っ
てもよいことは明らかである。差動増幅器12は加′J
X電圧と受光量基準電圧VR2の差を形成する。第1図
に示す実施例によればこの差は、一方では振幅制限回路
13を介し、他方では勾配制限回路14を介して、それ
ぞれ荷重加算回路5の第2および第3の入力端子に供給
される。
The outputs of the amplifiers 8.9 are summed in a summing circuit 11 and fed to a second A10 circuit, which also comprises a differential amplifier 12. It is clear that the addition may be performed in the arithmetic circuit 10 in this case. The differential amplifier 12 adds
A difference between the X voltage and the received light amount reference voltage VR2 is formed. According to the embodiment shown in FIG. 1, this difference is supplied to the second and third input terminals of the load summing circuit 5, on the one hand via the amplitude limiting circuit 13 and on the other hand via the slope limiting circuit 14. Ru.

本実施例では振幅制限回路13は、上限値と下限値を有
する2つのリミッタから構成されているが、例えば下限
値を有する1つのリミッタから構成してもよい。
In this embodiment, the amplitude limiting circuit 13 is composed of two limiters having an upper limit value and a lower limit value, but may be composed of one limiter having a lower limit value, for example.

一方勾配制限回路14は、ローパスフィルタからなるが
、例えば積分器として構成してもよいことは明らかであ
る。
On the other hand, the slope limiting circuit 14 is composed of a low-pass filter, but it is clear that it may be configured as an integrator, for example.

荷重加算回路5は、第1の入力端子に供給された第1の
差動増幅器6の出力と第2の入力端子に供給される振幅
制限回路13の出力と第3の入力端子に供給される勾配
制限回路14の出力とを適当な割合として加算する。そ
の際この割合を適当に選定することにより、2つの+i
 ’rFAループの帰還率を適当に選定できると共に、
例えば第2または第3の入力端子に供給される信号の荷
重をOとすれば、振幅制限回路13または勾配制限回路
14の片方だけを有する装置が実現する。
The load addition circuit 5 is supplied with the output of the first differential amplifier 6 supplied to the first input terminal, the output of the amplitude limiting circuit 13 supplied to the second input terminal, and the third input terminal. The output of the slope limiting circuit 14 is added as an appropriate ratio. At that time, by appropriately selecting this ratio, two +i
'The feedback rate of the rFA loop can be appropriately selected, and
For example, if the weight of the signal supplied to the second or third input terminal is O, a device having only one of the amplitude limiting circuit 13 and the gradient limiting circuit 14 is realized.

荷重加算回路5の出力端子は投光器駆動回路7の制御入
力端子に接続されており、この投光器駆動回路7は、差
動増幅器6、振幅制限回路13および勾配制限回路14
の出力に依存してレーザー素子2を駆動する。
The output terminal of the load addition circuit 5 is connected to the control input terminal of a floodlight drive circuit 7, which includes a differential amplifier 6, an amplitude limiting circuit 13, and a gradient limiting circuit 14.
The laser element 2 is driven depending on the output of the .

第2図の実施例では、振幅制限回路13と勾配υj限回
路14は直列に接続されている。従って差動増幅n12
の出力端子は、振幅制限回路13と勾配制限回路14を
介して荷重加算回路5″の第2の入力端子に接続されて
いる。その他の点では第1図の実施例と同じである。第
2図の実施例は、第1図のものに対して異常信号に対し
て敏感である。どちらを適用するがはそのつどの条件に
より選択すればよい。
In the embodiment shown in FIG. 2, the amplitude limiting circuit 13 and the slope υj limiting circuit 14 are connected in series. Therefore, differential amplification n12
The output terminal of is connected to the second input terminal of the load addition circuit 5'' via an amplitude limiting circuit 13 and a slope limiting circuit 14.Other points are the same as the embodiment shown in FIG. The embodiment shown in FIG. 2 is more sensitive to abnormal signals than the embodiment shown in FIG. 1.Which one is to be applied can be selected depending on the conditions.

9h宋 本発明による自動出力制御装置によれば、光学式センサ
の投光量と受光量を著しく安定化することができ、しか
もその際投光器の寿命に害が及ぶことはない。
9h Song According to the automatic output control device according to the present invention, the amount of light emitted and the amount of light received by the optical sensor can be significantly stabilized, and the life of the projector is not adversely affected.

反射型センサの場合、表面■度の悪い(研磨面、鋳肌面
等)被測定物、表面色が変化する被測定物、局面を持つ
被a1定物等においても、微小な傷や面異常を明確化す
ることができるので、傷判別処理を単純化かつ高速化で
きろ。
In the case of reflective sensors, minute scratches and surface abnormalities can be detected even on objects with poor surface roughness (polished surfaces, cast surfaces, etc.), objects with changing surface color, A1 constant objects with curved surfaces, etc. It is possible to simplify and speed up the flaw discrimination process.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明による自動出力制御装置の第1の実施
例を示すブロック図、第2図は、同じく第2の実施例の
一部を示すブロック図である。
FIG. 1 is a block diagram showing a first embodiment of an automatic output control device according to the present invention, and FIG. 2 is a block diagram showing a part of the second embodiment.

Claims (3)

【特許請求の範囲】[Claims] (1)投光器と受光器を有する光学式センサにおいて、
投光器の投光量を検出するためモニタ受光器を含むモニ
タ回路、モニタ回路により検出した投光量に応じて投光
器駆動回路の駆動出力を制御する第1のAPC回路、受
光器の受光量を検出する受光回路、および受光回路によ
り検出した受光量に応じて投光器駆動回路の駆動出力を
制御する第2のAPC回路を設け、かつ第2のAPC回
路の出力側に信号の振幅を制限する回路を設けたことを
特徴とする光学式センサの自動出力制御装置。
(1) In an optical sensor having a light emitter and a light receiver,
A monitor circuit including a monitor receiver for detecting the amount of light emitted by the light emitter, a first APC circuit that controls the drive output of the emitter drive circuit according to the amount of light emitted by the monitor circuit, and a light receiver that detects the amount of light received by the light receiver. A second APC circuit is provided for controlling the drive output of the emitter drive circuit according to the amount of light received by the circuit and the light receiving circuit, and a circuit for limiting the amplitude of the signal is provided on the output side of the second APC circuit. An automatic output control device for an optical sensor, characterized by:
(2)投光器と受光器を有する光学式センサにおいて、
投光器の投光量を検出するためモニタ受光器を含むモニ
タ回路、モニタ回路により検出した投光量に応じて投光
器駆動回路の駆動出力を制御する第1のAPC回路、受
光器の受光量を検出する受光回路、および受光回路によ
り検出した受光量に応じて投光器駆動回路の駆動出力を
制御する第2のAPC回路を設け、かつ第2のAPC回
路の出力側に信号の勾配を制限する回路を設けたことを
特徴とする光学式センサの自動出力制御装置。
(2) In an optical sensor having a light emitter and a light receiver,
A monitor circuit including a monitor receiver for detecting the amount of light emitted by the light emitter, a first APC circuit that controls the drive output of the emitter drive circuit according to the amount of light emitted by the monitor circuit, and a light receiver that detects the amount of light received by the light receiver. A second APC circuit is provided for controlling the drive output of the emitter drive circuit according to the amount of light received by the circuit and the light receiving circuit, and a circuit for limiting the slope of the signal is provided on the output side of the second APC circuit. An automatic output control device for an optical sensor, characterized by:
(3)投光器と受光器を有する光学式センサにおいて、
投光器の投光量を検出するためモニタ受光器を含むモニ
タ回路、モニタ回路により検出した投光量に応じて投光
器駆動回路の駆動出力を制御する第1のAPC回路、受
光器の受光量を検出する受光回路、および受光回路によ
り検出した受光量に応じて投光器駆動回路の駆動出力を
制御する第2のAPC回路を設け、かつ第2のAPC回
路の出力側に信号の振幅を制限する回路と信号の勾配を
制限する回路を設けたことを特徴とする光学式センサの
自動出力制御装置。
(3) In an optical sensor having a light emitter and a light receiver,
A monitor circuit including a monitor receiver for detecting the amount of light emitted by the light emitter, a first APC circuit that controls the drive output of the emitter drive circuit according to the amount of light emitted by the monitor circuit, and a light receiver that detects the amount of light received by the light receiver. and a second APC circuit that controls the drive output of the emitter drive circuit according to the amount of light received by the light receiving circuit, and a circuit that limits the amplitude of the signal and a signal An automatic output control device for an optical sensor, characterized by being provided with a circuit that limits the slope.
JP62121183A 1987-05-20 1987-05-20 Automatic output control device for optical sensor Expired - Fee Related JPH0617784B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62121183A JPH0617784B2 (en) 1987-05-20 1987-05-20 Automatic output control device for optical sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62121183A JPH0617784B2 (en) 1987-05-20 1987-05-20 Automatic output control device for optical sensor

Publications (2)

Publication Number Publication Date
JPS63286715A true JPS63286715A (en) 1988-11-24
JPH0617784B2 JPH0617784B2 (en) 1994-03-09

Family

ID=14804907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62121183A Expired - Fee Related JPH0617784B2 (en) 1987-05-20 1987-05-20 Automatic output control device for optical sensor

Country Status (1)

Country Link
JP (1) JPH0617784B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02176411A (en) * 1988-12-27 1990-07-09 Fujitsu Ltd Surface-waviness checking apparatus and optical quantity correcting method thereof
JPH06138040A (en) * 1992-10-26 1994-05-20 Ishikawajima Harima Heavy Ind Co Ltd Illumination controller of light source in inspection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02176411A (en) * 1988-12-27 1990-07-09 Fujitsu Ltd Surface-waviness checking apparatus and optical quantity correcting method thereof
JPH06138040A (en) * 1992-10-26 1994-05-20 Ishikawajima Harima Heavy Ind Co Ltd Illumination controller of light source in inspection device

Also Published As

Publication number Publication date
JPH0617784B2 (en) 1994-03-09

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