JPS63284873A - Cathode pin for use in laser - Google Patents
Cathode pin for use in laserInfo
- Publication number
- JPS63284873A JPS63284873A JP11874487A JP11874487A JPS63284873A JP S63284873 A JPS63284873 A JP S63284873A JP 11874487 A JP11874487 A JP 11874487A JP 11874487 A JP11874487 A JP 11874487A JP S63284873 A JPS63284873 A JP S63284873A
- Authority
- JP
- Japan
- Prior art keywords
- pin
- cathode
- laser
- oxidation
- alloy containing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 7
- 239000000956 alloy Substances 0.000 claims abstract description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract 2
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract 2
- 239000011733 molybdenum Substances 0.000 claims abstract 2
- 239000011247 coating layer Substances 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 abstract description 7
- 238000007747 plating Methods 0.000 abstract description 7
- 230000003647 oxidation Effects 0.000 abstract description 5
- 238000007254 oxidation reaction Methods 0.000 abstract description 5
- 238000010891 electric arc Methods 0.000 abstract description 4
- 230000000630 rising effect Effects 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000002349 favourable effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910018885 Pt—Au Inorganic materials 0.000 description 1
- 229910018967 Pt—Rh Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Abstract
Description
【発明の詳細な説明】
［発明の目的Ｊ
（産業上の利用分野）
本発明はレーザ用カソードピンに関し、更に詳しくは、
ＣＯ２レーザ発振器に組込まれるカソードピンであって
、その表面の酸化が少なく、安定な放電が可能であり、
使用寿命が長い新規なレーザ用カソードビンに関する。[Detailed Description of the Invention] [Objective of the Invention J (Field of Industrial Application) The present invention relates to a cathode pin for a laser, and more specifically,
A cathode pin built into a CO2 laser oscillator, with little oxidation on its surface and stable discharge possible.
This invention relates to a new laser cathode bin with a long service life.
（従来の技術）
大出力を取出せるＣ０２レーザは、研究室のレベルを抜
けでて生産加ニジステムとして生産ラインに導入されは
じめている。(Prior Art) C02 lasers capable of producing high output power have moved beyond the laboratory level and are beginning to be introduced into production lines as production machining systems.
このＣ０２レーザ発振器の場合、発振器の中にはアノー
ドバーと対向して多数のカソードビンが配列される。In the case of this C02 laser oscillator, a number of cathode bins are arranged in the oscillator facing an anode bar.
カソードビンは通常り字形の棒体であって、それを構成
する素材はＭｏである。The cathode bottle is usually a L-shaped rod, and the material that constitutes it is Mo.
（発明が解決しようとする問題点）
しかしながら上記Ｍｏのカソードビンの場合法のような
不都合が生じている。すなわち、ＣＯ２レーザ発振器の
場合、連続発振とりわけ高出力下の連続発振の過程にお
いて発振器内に存在するＣ０２ガスが分解して酸素を発
生し、この酸素によってＭｏビンの表面が酸化されると
いう問題である。Ｍｏピンの表面酸化が進むと、ピン体
とアノードバーとの間にアーク放電が発生して、ピン体
に穴がおいてしまうことがあり、そして例えば溶接時に
おいては必要である安定なレーザを得ることができなく
なる。(Problems to be Solved by the Invention) However, there are disadvantages as in the case of the Mo cathode bin described above. In other words, in the case of a CO2 laser oscillator, during continuous oscillation, especially continuous oscillation under high output, the CO2 gas present in the oscillator decomposes and generates oxygen, and this oxygen oxidizes the surface of the Mo bottle. be. As the surface oxidation of the Mo pin progresses, arc discharge may occur between the pin body and the anode bar, resulting in a hole in the pin body, making it difficult to use a stable laser, which is necessary during welding, for example. you won't be able to get it.
例えば１ＯｋＷｃｏ２レ一ザ発振器の場合、Ｍｏビンの
表面は１００時間の連続発振から酸化が始まり、５００
時間くらいで使用不能の状態になる。このような状態に
なると、Ｍｏビンを１本１本クリーニングすることが必
要になる。しかし、この作業は極めて煩雑である。For example, in the case of a 10kW co2 laser oscillator, the surface of the Mo bottle begins to oxidize after 100 hours of continuous oscillation, and after 500 hours of continuous oscillation.
It becomes unusable after about an hour. In such a state, it becomes necessary to clean the Mo bins one by one. However, this work is extremely complicated.
本発明は上記したような問題を起こすことはなく、長時
間の連続発振にも耐えることができるカソードピンの提
供を目的とする。An object of the present invention is to provide a cathode pin that does not cause the above-mentioned problems and can withstand continuous oscillation for a long time.
［発明の構成コ
（問題点を解決するための手段・作用）本発明者らは上
記目的を達成すべく鋭意研究を重ねる過程で、Ｍｏピン
の表面に耐酸化性、耐熱性に優れかつ導電性でＭＯとの
密着性も良好な被膜を形成することを着想し、その被膜
に適する材料について検討した結果、後述するｐｔ族元
素は好適であるとの知見を得、本発明のカソードピンを
開発するに到った。[Structure of the Invention (Means and Actions for Solving the Problems)] In the course of intensive research to achieve the above object, the inventors discovered that the surface of the Mo pin has excellent oxidation resistance, heat resistance, and conductivity. We came up with the idea of forming a film that has good adhesion to MO, and as a result of studying materials suitable for that film, we found that the pt group elements described below are suitable, and we developed the cathode pin of the present invention. I have come to develop it.
すなわち、本発明のカソードピンは、Ｍｏピン体の表面
にＰｔ族元素またはそれを含む合金の被覆層が形成され
ていることを特徴とする。That is, the cathode pin of the present invention is characterized in that a coating layer of a Pt group element or an alloy containing the same is formed on the surface of the Mo pin body.
この被覆層形成用の材料としては、Ｐｔ、Ｐｔ−Ｒｈ合
金、Ｐｔ−Ａｕ合金のようなＰｔ族元素またはそれを含
む合金であれば何であってもよいが、とりわけｐｔはＭ
ｏとの密着性が良くしかも変質することなく安定である
ため好適である。The material for forming this coating layer may be any Pt group element such as Pt, Pt-Rh alloy, Pt-Au alloy, or an alloy containing it.
It is suitable because it has good adhesion with o and is stable without deterioration.
被覆層の形成は、薄膜形成法として知られている公知の
方法を適用して行なうことができるが、例えばメッキ法
は操作も簡便であるため好適である。また、被覆層の厚
みは、それがあまり薄いとＭＯ保護層としての効果は小
さくなり、またあまり厚いとＭｏピン体との間で剥離現
象が生じはじめるので、通常は、５〜５００ｇ、好まし
くは５〜１００−程度でよい、更に、被覆層をＭｏピン
体の全表面に形成することは必ずしも必要ではなく、例
えばＬ字形ピッ体の立上がり部分、すなわち放電尖端を
中心に形成してもよい。The coating layer can be formed by applying a known method known as a thin film forming method, and for example, a plating method is preferable because it is easy to operate. The thickness of the coating layer is usually 5 to 500 g, preferably 5 to 500 g, because if it is too thin, the effect as an MO protective layer will be small, and if it is too thick, peeling phenomenon will begin to occur between the Mo pin body. Furthermore, it is not necessarily necessary to form the coating layer on the entire surface of the Mo pin body, and for example, it may be formed around the rising portion of the L-shaped pin body, that is, the discharge tip.
（発明の実施例）
直径３■騰、長さ１００ｍ■、立上がり部分の長さ３０
ｍ■である純ＭｏのＬ字形ピッ体の立上がり部分と屈折
部から２０■謹の部分に亘ってｐｔメッキを施した。(Embodiment of the invention) Diameter 3mm, length 100m, rising part length 30mm
PT plating was applied to a portion 20 mm from the rising part and bent part of the L-shaped pit body made of pure Mo.
メッキの条件は、メッキ浴が塩化白金酸水溶液であり、
電流密度は３Ａ／ｄ層２．メッキ時間は５分であった。The plating conditions were that the plating bath was a chloroplatinic acid aqueous solution;
The current density is 3A/d layer 2. Plating time was 5 minutes.
厚みｌＯμのｐｔ膜が形成された。A PT film with a thickness of lOμ was formed.
この方ソードピン１００本を１０ｋＷＣＯ２レ一ザ発振
器に実装し、レーザ光を発振させ、約１００時間ごとの
カソードピン表面性状を観察した。In this case, 100 cathode pins were mounted on a 10kW CO2 laser oscillator, laser light was oscillated, and the surface properties of the cathode pins were observed approximately every 100 hours.
約１０００時間経過後、カソードピンの表面にははん点
状の酸化個所が散見され１時々アーク放電しているのが
認められた。その使用寿命は約１５００時間であった。After approximately 1,000 hours, oxidized spots in the form of dots were observed on the surface of the cathode pin, and occasional arc discharge was observed. Its service life was about 1500 hours.
比較のため、ｐｔメッキを施さないＭｏピンで実機試験
を行なったところ、１００時間の連続発振で酸化現象が
あられれ５００時間では使用不能となった。すなわち、
使用寿命は約５００時間である。For comparison, an actual device test was conducted using a Mo pin without PT plating, and an oxidation phenomenon occurred after 100 hours of continuous oscillation, making it unusable after 500 hours. That is,
The service life is about 500 hours.
［発明の効果］
以上の説明で明らかなように１本発明のカソードピンは
、その表面が酸化しずらく、それゆえアーク放電も発生
せず、放電特性が低下することなく長時間の使用が可能
であって、その工業的価値は大である。[Effects of the Invention] As is clear from the above explanation, the surface of the cathode pin of the present invention is not easily oxidized, therefore arc discharge does not occur, and the cathode pin of the present invention can be used for a long time without deteriorating the discharge characteristics. It is possible, and its industrial value is great.
Claims (2)
れを含む合金の被覆層が形成されていることを特徴とす
るレーザ用カソードピン。(1) A cathode pin for a laser, characterized in that a coating layer of a platinum group element or an alloy containing the same is formed on the surface of a molybdenum pin body.
載のレーザ用カソードピン。(2) The cathode pin for a laser according to claim 1, wherein the platinum group element is platinum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11874487A JPS63284873A (en) | 1987-05-18 | 1987-05-18 | Cathode pin for use in laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11874487A JPS63284873A (en) | 1987-05-18 | 1987-05-18 | Cathode pin for use in laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63284873A true JPS63284873A (en) | 1988-11-22 |
Family
ID=14743984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11874487A Pending JPS63284873A (en) | 1987-05-18 | 1987-05-18 | Cathode pin for use in laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63284873A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3920634A1 (en) * | 1989-06-23 | 1991-01-10 | Lambda Physik Forschung | Ignition electrode for gas lasers - contains metal of platinum gp. in ignition area to increase its working life |
-
1987
- 1987-05-18 JP JP11874487A patent/JPS63284873A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3920634A1 (en) * | 1989-06-23 | 1991-01-10 | Lambda Physik Forschung | Ignition electrode for gas lasers - contains metal of platinum gp. in ignition area to increase its working life |
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