JPS63283836A - High precision moving stage - Google Patents
High precision moving stageInfo
- Publication number
- JPS63283836A JPS63283836A JP12046887A JP12046887A JPS63283836A JP S63283836 A JPS63283836 A JP S63283836A JP 12046887 A JP12046887 A JP 12046887A JP 12046887 A JP12046887 A JP 12046887A JP S63283836 A JPS63283836 A JP S63283836A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- moving stage
- piezoelectric element
- main moving
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000033001 locomotion Effects 0.000 claims description 15
- 230000008878 coupling Effects 0.000 abstract 3
- 238000010168 coupling process Methods 0.000 abstract 3
- 238000005859 coupling reaction Methods 0.000 abstract 3
- 238000005096 rolling process Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000013228 contact guidance Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/601—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Abstract
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、高精度移動ステージに関するものである。[Detailed description of the invention] Industrial applications The present invention relates to a high-precision moving stage.
従来の技術
一般に移動ステージとしては、移動テーブルをベース部
に対し、面接触である摺動面を基準としたすベシ案内、
摺動面間に球または針状の転動体を挿入したころがり案
内、または摺動面間に流体層を形成した流体軸受による
非接触案内等で運動規制し、この移動テーブルをボール
ねじ、台形ねじ、ワイヤ、ベルト等の駆動伝達機構によ
り駆動し、位置決めを行、うように構成している。そし
てすべり、ころがり、非接触のいずれの案内方式を用い
るかは移動テーブルの用途に応じて選択する。BACKGROUND OF THE INVENTION In general, a movable stage is based on a sliding surface that is surface contact between a movable table and a base.
Motion is regulated using rolling guides with ball or needle-shaped rolling elements inserted between the sliding surfaces, or non-contact guidance using fluid bearings with a fluid layer formed between the sliding surfaces. The device is configured to be driven by a drive transmission mechanism such as a wire, a belt, etc. to perform positioning. The sliding, rolling, or non-contact guiding method to be used is selected depending on the purpose of the movable table.
以下、従来のすベシ案内方式を用いた移動ステージにつ
いて第２図を参照しながら説明する。Hereinafter, a moving stage using the conventional all-over guiding method will be explained with reference to FIG.
第２図に示すようにベース部１０１に対向して一対のＶ
字状の摺動案内面１０２が形成され、これらの摺動案内
面１０２に移動テーブル１０３０両側に形成されたＶ字
状の摺動面１０４が嵌合されて運動規制されている。移
動テーブル１０３にはボールねじのナツト１０５が取付
は部１０６により取付けられ、ボールねじのねじ軸１０
７が支持台１０８に支持されたモータ１０９に連係され
ている。As shown in FIG. 2, a pair of V
Letter-shaped sliding guide surfaces 102 are formed, and V-shaped sliding surfaces 104 formed on both sides of the moving table 1030 are fitted to these sliding guide surfaces 102 to restrict movement. A nut 105 of a ball screw is attached to the moving table 103 by a mounting portion 106, and a screw shaft 10 of the ball screw is attached to the moving table 103.
7 is linked to a motor 109 supported by a support stand 108.
而してモータ１０９の駆動によシねじ軸１０７を回転さ
せることによりナツト１０５を介し、移動テーブル１０
３をペース部１０１の摺動案内面に沿って移動させるこ
とができる。By rotating the screw shaft 107 by driving the motor 109, the movable table 10 is rotated through the nut 105.
3 can be moved along the sliding guide surface of the pace section 101.
発明が解決しようとする問題点
上記従来例の構成では、ボールねじの動力伝達効率が良
いため、モータ１０９の回転制御を電気的に微小に行う
ことにより移動テーブル１０３の微小位置決めが可能と
なる。しかし、ボールねじを構成するねじ軸１０７とナ
ツト１０５には幾可学的形状誤差が必ずあるため、移動
テーブル１０３の微小位置決め分解能には限界があり、
０．１μｍ程度である。Problems to be Solved by the Invention In the configuration of the conventional example described above, since the power transmission efficiency of the ball screw is good, minute positioning of the movable table 103 is possible by minutely controlling the rotation of the motor 109 electrically. However, since there is always a geometric shape error in the screw shaft 107 and nut 105 that make up the ball screw, there is a limit to the minute positioning resolution of the moving table 103.
It is about 0.1 μm.
また、ねじ軸１０７の回転に伴い、ナツト１０５が直線
運動し、これと共に移動テーブル１０３が移動するが、
前述の幾可学的形状誤差のため、移動テーブル１０３を
直線運動させる成分以外の力を移動テーブル１０３に与
えてしまい、移動テーブル１０３にピッチング、ヨーイ
ング、ローリング等の運動誤差を与える。Further, as the screw shaft 107 rotates, the nut 105 moves linearly, and the moving table 103 moves along with this.
Due to the above-mentioned geometric shape error, a force other than the component that causes the moving table 103 to move linearly is applied to the moving table 103, giving the moving table 103 motion errors such as pitching, yawing, and rolling.
そこで、本発明は、上記従来例の問題点を解決するもの
で、０１μｍ以下の高精度に位置決めを行うことができ
るようにした高精度移動ステージを提供しようとするも
のである。SUMMARY OF THE INVENTION The present invention aims to solve the above-mentioned problems of the conventional example, and provides a high-precision moving stage that can perform positioning with a high precision of 0.1 μm or less.
問題点を解決するための手段
そして上記問題点を解決するための本発明の技術的な手
段は、移動を案内された補助ステージおよびメイン移動
ステージと、これら補助ステージおよびメイン移動ステ
ージとを連動するための圧電素子を用いた連係手段と、
上記メイン移動ステージの位置を検出する位置検出手段
と、上記補助ステージを駆動する駆動手段と、上記位置
検出手段から得られる位置情報により上記駆動手段およ
び圧電素子を制御する制御手段とを備えたものである。Means for solving the problems and technical means of the present invention for solving the above problems are as follows: an auxiliary stage and a main movement stage whose movements are guided; and an auxiliary stage and a main movement stage that are linked together. a linking means using a piezoelectric element for
A device comprising a position detection means for detecting the position of the main moving stage, a drive means for driving the auxiliary stage, and a control means for controlling the drive means and the piezoelectric element based on position information obtained from the position detection means. It is.
作用 上記技術的手段による作用は次のようになる。action The effects of the above technical means are as follows.
すなわち、駆動手段により駆動される補助ステージと連
動してメイン移動ステージを移動させる際、補助ステー
ジの移動だけでは０１μｍ以下の精度で位置決めするこ
とはできないが、総移動量に対して１０μｍ程度の精度
で駆動するのは可能である。そこで、圧電素子を１０μ
ｍの範囲で制御することにより、メイン移動テーブルを
サブミクロンの精度で駆動することができる。圧電素子
は数ナノメータの分解能があり、メイン移動テーブルの
位置をナノメータオーダーで検出する位置検出手段を用
いることにより、位置検出手段の精度でメイン移動テー
ブルをコントロールできる。In other words, when moving the main moving stage in conjunction with the auxiliary stage driven by the driving means, it is not possible to position with an accuracy of 0.1 μm or less by only moving the auxiliary stage, but the accuracy is about 10 μm for the total amount of movement. It is possible to drive with Therefore, we used a piezoelectric element of 10μ
By controlling within the range of m, the main moving table can be driven with submicron precision. The piezoelectric element has a resolution of several nanometers, and by using a position detecting means that detects the position of the main moving table on the order of nanometers, the main moving table can be controlled with the precision of the position detecting means.
実施例
以下、本発明の実施例について図面を参照しながら説明
する。第１図は本発明の一実施例における高精度移動ス
テージを示す構成図である。EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram showing a high-precision moving stage in one embodiment of the present invention.
第１図において、ｌは補助ステージで、例えばすべり案
内で移動される。２はメイン移動ステージで、例えば摺
動面３との間に転動体４が介在され、ころがり案内で移
動される。５は補助ステージ１とメイン移動ステージ２
を連動するための連係手段で、圧電素子６と連結棒７と
より構成され、連結棒７の中間部には小径部７ａが形成
されている。８はメイン移動ステージ２に設置された基
準ミラー、９はレーザ測長システムで、基準ミラー８の
変位、すなわちメイン移動ステージ２の位置をナノメー
タオーダー（例えば、５ｍｍ）の分解能で検出する。１
０は補助ステージ１に取付けられたボールねじのナツト
、１１はナツト１０に螺合されたボールねじのねじ軸、
１２はねじ軸１１に連係されたモータ、１３はモータド
ライバで、モータ１２の駆動によシねじ軸１１を回転さ
せ、ナツト１０を介して補助ステージ１を直動させるこ
とができる。１４は圧電素子６に印加する印加電圧を出
力するアンプ部、１５はレーザ測長システム９から得ら
れるメイン移動ステージ２の位置情報を取り込み、モー
タドライバ１３に駆動信号を送ると共にアンプ部１４に
アナログ信号を入力し、メイン移動ステージ２の位置お
よび動作を制御するコントロール部である。In FIG. 1, l is an auxiliary stage, which is moved, for example, by a sliding guide. Reference numeral 2 denotes a main moving stage, for example, a rolling element 4 is interposed between it and a sliding surface 3, and is moved by rolling guide. 5 is auxiliary stage 1 and main moving stage 2
This linking means is composed of a piezoelectric element 6 and a connecting rod 7, and the connecting rod 7 has a small diameter portion 7a formed in the middle thereof. 8 is a reference mirror installed on the main moving stage 2, and 9 is a laser length measurement system that detects the displacement of the reference mirror 8, that is, the position of the main moving stage 2 with a resolution of nanometer order (for example, 5 mm). 1
0 is the nut of the ball screw attached to the auxiliary stage 1, 11 is the screw shaft of the ball screw screwed into the nut 10,
12 is a motor linked to the screw shaft 11; 13 is a motor driver; the screw shaft 11 is rotated by the drive of the motor 12, and the auxiliary stage 1 can be moved linearly through the nut 10; 14 is an amplifier unit that outputs the applied voltage to be applied to the piezoelectric element 6; 15 is an amplifier unit that receives position information of the main moving stage 2 obtained from the laser length measurement system 9, sends a drive signal to the motor driver 13, and outputs an analog signal to the amplifier unit 14; This is a control unit that inputs signals and controls the position and operation of the main moving stage 2.
次に上記実施例の動作について説明する。Next, the operation of the above embodiment will be explained.
モータ１２の駆動によりねじ軸１１、ナツト１０を介し
て補助ステージ１を直動させ、それに連係手段５により
連動してメイン移動ステージ２が移動する。このとき、
上記のように連係手段５の連結棒７はその中間部に小径
部７ａを形成しているので、補助ステージ１にねじ軸１
１、ナツト１０によシ駆動のために生ずるピッチング、
ヨーイング、ローリング等の運動誤差は小径部７ａの変
形によシ吸収することができ、メイン移動ステージ２に
は直動成分のみが伝達され、メイン移動ステージ２は円
滑に移動する。そしてボールねじのナツト１０とねじ軸
１１による間接的な位置決めだけでは、メイン移動ステ
ージ２の位置決め精度は総移動量に対して数μｍの精度
が限界である。そこで、メイン移動ステージ２の位置を
基準ミラー８とレーザ測長システム９を用いてナノメー
タオーダで検出し、位置決め誤差をコントロール部１５
に送り、コントロール部１５において、位置決め誤差量
に比例したアナログ信号をアンプ部１４に入力し、圧電
素子６を作動させる。圧電素子６は駆動距離が１０μｍ
１５００Ｖ程度のものは、５００倍のアンプ部１４を用
いて、アナログ信号を最小単位２．５Ｖで制御すれば、
５ｎｍの分解能で駆動制御できる。圧電素子６は連結棒
７に組み込まれているため、メイン移動テーブル２がこ
の圧電素子６の伸縮に応じて連動し、最終的にはレーザ
測長システム９の精度でメイン移動ステージ２の移動量
をコントロールできる。The motor 12 drives the auxiliary stage 1 through the screw shaft 11 and the nut 10 to cause the auxiliary stage 1 to move in a linear manner, and the linking means 5 interlocks with the auxiliary stage 1 to move the main moving stage 2. At this time,
As mentioned above, since the connecting rod 7 of the connecting means 5 has the small diameter portion 7a in its middle portion, the screw shaft 1 is attached to the auxiliary stage 1.
1. Pitching caused by the nut 10 being driven;
Motion errors such as yawing and rolling can be absorbed by the deformation of the small diameter portion 7a, and only the linear motion component is transmitted to the main moving stage 2, so that the main moving stage 2 moves smoothly. Indirect positioning using only the nut 10 of the ball screw and the screw shaft 11 limits the positioning accuracy of the main moving stage 2 to an accuracy of several μm relative to the total amount of movement. Therefore, the position of the main moving stage 2 is detected on the order of nanometers using the reference mirror 8 and the laser length measurement system 9, and the positioning error is detected by the control unit 15.
In the control section 15, an analog signal proportional to the positioning error amount is inputted to the amplifier section 14, and the piezoelectric element 6 is activated. The piezoelectric element 6 has a driving distance of 10 μm.
For something around 1500V, if you use a 500x amplifier section 14 and control the analog signal in minimum units of 2.5V,
Drive control is possible with a resolution of 5 nm. Since the piezoelectric element 6 is built into the connecting rod 7, the main moving table 2 moves in response to the expansion and contraction of the piezoelectric element 6, and the amount of movement of the main moving stage 2 is ultimately determined by the accuracy of the laser length measurement system 9. can be controlled.
発明の効果
以上述べたように本発明によれば、補助ステージとメイ
ン移動ステージを圧電素子を用いた連係手段により連動
させるようにし、メイン移動ステージの位置を位置検出
手段により検出し、この位置検出手段から得られる位置
情報により補助ステージの駆動手段と圧電素子を制御手
段により制御するようにしている。このように補助ステ
ージの駆動手段では回避されない位置決め誤差について
は、メイン移動ステージを補助ステージに連動させるた
めの圧電素子を駆動制御することによシ、メイン移動ス
テージの位置を検出する精度で、メイン移動ステージの
位置決めを行うことができる。Effects of the Invention As described above, according to the present invention, the auxiliary stage and the main moving stage are interlocked by a linking means using a piezoelectric element, the position of the main moving stage is detected by a position detecting means, and this position detection is performed. The drive means and piezoelectric element of the auxiliary stage are controlled by the control means based on the position information obtained from the means. In this way, positioning errors that cannot be avoided by the drive means of the auxiliary stage can be avoided by controlling the drive of the piezoelectric element that links the main movement stage with the auxiliary stage. The moving stage can be positioned.
したがって０１μｍ以下の高精度の位置決めを行うこと
ができる。Therefore, highly accurate positioning of 0.1 μm or less can be performed.
第１図は本発明の一実施例における高精度移動ステージ
を示す構成図、第２図は従来の移動ステージを示す要部
の斜視図である。
ｌ・・・補助ステージ、２・・・メイン移動ステージ、
５・・・連係手段、６・・・圧電素子、７・・・連結棒
、８・・・基準ミラー、９・・・レーザ測長システム、
１ｏ・・・ボールねじのナツト、１１・・・ねじ軸、１
２・・・モータ、１３・・・モータドライバ、１４・・
・アンプ部、１５・・・コントロール部。FIG. 1 is a configuration diagram showing a high-precision moving stage according to an embodiment of the present invention, and FIG. 2 is a perspective view of essential parts of a conventional moving stage. l... Auxiliary stage, 2... Main moving stage,
5... Linking means, 6... Piezoelectric element, 7... Connecting rod, 8... Reference mirror, 9... Laser length measurement system,
1o...Ball screw nut, 11...Screw shaft, 1
2...Motor, 13...Motor driver, 14...
- Amplifier section, 15... control section.
Claims (2)
ステージと、これら補助ステージおよびメイン移動ステ
ージとを連動するための圧電素子を用いた連係手段と、
上記メイン移動ステージの位置を検出する位置検出手段
と、上記補助ステージを駆動する駆動手段と、上記位置
検出手段から得られる位置情報により上記駆動手段およ
び圧電素子を制御する制御手段とを備えたことを特徴と
する高精度移動ステージ。(1) An auxiliary stage and a main movement stage whose movement is guided, and a linking means using a piezoelectric element for interlocking these auxiliary stage and main movement stage;
A position detecting means for detecting the position of the main moving stage, a driving means for driving the auxiliary stage, and a control means for controlling the driving means and the piezoelectric element based on position information obtained from the position detecting means. A high-precision moving stage featuring
中間部に小径部が形成されている特許請求の範囲第１項
記載の高精度移動ステージ。(2) A high-precision moving stage according to claim 1, wherein the linking means includes a piezoelectric element and a connecting rod, and a small diameter portion is formed in the middle of the connecting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12046887A JPS63283836A (en) | 1987-05-18 | 1987-05-18 | High precision moving stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12046887A JPS63283836A (en) | 1987-05-18 | 1987-05-18 | High precision moving stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63283836A true JPS63283836A (en) | 1988-11-21 |
Family
ID=14786916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12046887A Pending JPS63283836A (en) | 1987-05-18 | 1987-05-18 | High precision moving stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63283836A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02122747U (en) * | 1989-03-14 | 1990-10-09 | ||
| KR100904720B1 (en) * | 2007-10-04 | 2009-06-25 | 국민대학교산학협력단 | Redendantly actuated 3 degree of freedom nano positioning stage using 4 precision transfer mechanism |
-
1987
- 1987-05-18 JP JP12046887A patent/JPS63283836A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02122747U (en) * | 1989-03-14 | 1990-10-09 | ||
| KR100904720B1 (en) * | 2007-10-04 | 2009-06-25 | 국민대학교산학협력단 | Redendantly actuated 3 degree of freedom nano positioning stage using 4 precision transfer mechanism |
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