JPS6328242U - - Google Patents
Info
- Publication number
- JPS6328242U JPS6328242U JP12237686U JP12237686U JPS6328242U JP S6328242 U JPS6328242 U JP S6328242U JP 12237686 U JP12237686 U JP 12237686U JP 12237686 U JP12237686 U JP 12237686U JP S6328242 U JPS6328242 U JP S6328242U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- extraction electrode
- electrode system
- arc chamber
- rings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12237686U JPS6328242U (en, 2012) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12237686U JPS6328242U (en, 2012) | 1986-08-08 | 1986-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6328242U true JPS6328242U (en, 2012) | 1988-02-24 |
Family
ID=31012505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12237686U Pending JPS6328242U (en, 2012) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328242U (en, 2012) |
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1986
- 1986-08-08 JP JP12237686U patent/JPS6328242U/ja active Pending