JPS6328145U - - Google Patents
Info
- Publication number
- JPS6328145U JPS6328145U JP12056886U JP12056886U JPS6328145U JP S6328145 U JPS6328145 U JP S6328145U JP 12056886 U JP12056886 U JP 12056886U JP 12056886 U JP12056886 U JP 12056886U JP S6328145 U JPS6328145 U JP S6328145U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- cvd
- nozzle
- nozzle hole
- burning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 9
- 238000005524 ceramic coating Methods 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Description
第１図は本考案のＣＶＤセラミツクス製ノズル
の一実施例を示す断面図、第２図ａ〜ｃはＣＶＤ
セラミツクス製ノズル孔部材の製造方法を説明す
る断面図である。
１……ＣＶＤセラミツクス製ノズル、２……Ｃ
ＶＤセラミツクス製ノズル孔部材、３……ノズル
本体。
Fig. 1 is a sectional view showing an embodiment of the CVD ceramic nozzle of the present invention, and Fig. 2 a to c are CVD ceramic nozzles.
FIG. 3 is a cross-sectional view illustrating a method of manufacturing a ceramic nozzle hole member. 1...CVD ceramic nozzle, 2...C
VD ceramics nozzle hole member, 3...nozzle body.
Claims (1)
ル孔部材をノズル本体内に嵌合してなるＣＶＤセ
ラミツクス製ノズルであつて、該セラミツクス製
ノズル孔部材は、燃焼除去又は溶解除去可能な材
質よりなるノズル孔形状基体の平滑側周面に、Ｃ
ＶＤ法によりセラミツクス被膜を形成した後、該
基体を燃焼又は溶解して除去して得られたもので
あることを特徴とするＣＶＤセラミツクス製ノズ
ル。 A CVD ceramic nozzle in which a ceramic nozzle hole member manufactured by a CVD method is fitted into a nozzle body, the ceramic nozzle hole member having a nozzle hole shape made of a material that can be removed by burning or dissolving. C on the smooth side circumferential surface of the base.
1. A CVD ceramic nozzle, characterized in that it is obtained by forming a ceramic coating by a VD method and then removing the substrate by burning or melting it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12056886U JPS6328145U (en) | 1986-08-06 | 1986-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12056886U JPS6328145U (en) | 1986-08-06 | 1986-08-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6328145U true JPS6328145U (en) | 1988-02-24 |
Family
ID=31009002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12056886U Pending JPS6328145U (en) | 1986-08-06 | 1986-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328145U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03146413A (en) * | 1989-10-31 | 1991-06-21 | Showa Denko Kk | Silicon carbide tube and its production |
| JP2009284768A (en) * | 2008-05-27 | 2009-12-10 | Kanariya:Kk | Nozzle device, atomizer, and temperature- and moisture-controlling system for barn |
-
1986
- 1986-08-06 JP JP12056886U patent/JPS6328145U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03146413A (en) * | 1989-10-31 | 1991-06-21 | Showa Denko Kk | Silicon carbide tube and its production |
| JP2009284768A (en) * | 2008-05-27 | 2009-12-10 | Kanariya:Kk | Nozzle device, atomizer, and temperature- and moisture-controlling system for barn |