JPS6328086A - Gas laser oscillator - Google Patents

Gas laser oscillator

Info

Publication number
JPS6328086A
JPS6328086A JP17224586A JP17224586A JPS6328086A JP S6328086 A JPS6328086 A JP S6328086A JP 17224586 A JP17224586 A JP 17224586A JP 17224586 A JP17224586 A JP 17224586A JP S6328086 A JPS6328086 A JP S6328086A
Authority
JP
Japan
Prior art keywords
laser gas
laser
longitudinal direction
gas
discharge part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17224586A
Other languages
Japanese (ja)
Inventor
Shinji Okuma
慎治 大熊
Saburo Sato
三郎 佐藤
Tatsumi Goto
後藤　達美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17224586A priority Critical patent/JPS6328086A/en
Publication of JPS6328086A publication Critical patent/JPS6328086A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To avoid generation of an arc discharge at both ends of main electrodes caused by insufficient exchange of laser gas by a method wherein the flow speed of the laser gas which is circulated by a gas transmission means is controlled so as to be approximately uniform along the longitudinal direction of a pair of the main electrodes by a control means. CONSTITUTION:Fins 9 which are inclined outward at both the ends of a discharge part 1 constitute a control means which controls the flow and flow speed of laser gas so as to make them uniform over the whole length of the discharge part 1. By inclining the fins 9 at both ends of the longitudinal direction of the discharge part 1 outward, the flow and the flow speed of the laser gas flowing between an anode 2 and a cathode 3 are made to be approximately uniform over the whole length of the longitudinal direction of the discharge part 1. In other words, sufficient exchange of the laser gas can be realized at both ends of the longitudinal direction of the discharge part 1 so that an arc discharge at both ends can be avoided and a laser beam can be emitted in a steady state.

Description

【発明の詳細な説明】 （産業上の利用分野） この発明はレーザガスを強制的に循環させてレーザ発振
を行なうガスレーザ発振装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a gas laser oscillation device that performs laser oscillation by forcibly circulating laser gas.

（従来の技術） 一般に、レーザガスを強制的に＠１させてレーザ発振を
行なうガスレーザ発県装置は、７ノードおよびカソード
となる一対の主電極が離間対向して配設され、これら主
Ｎ極間にレーザ発振の方向と垂直方向にレーザガスを強
制的に循環させるようになっている。そして、そのレー
ザガスを上記一対の主ｌ！極間に生じるグロー放電で励
起してレーザ光を発振させるようになっている。(Prior Art) In general, a gas laser generating device that performs laser oscillation by forcing laser gas @1 has a pair of main electrodes, which serve as 7 nodes and a cathode, spaced apart and facing each other. The laser gas is forced to circulate in a direction perpendicular to the direction of laser oscillation. Then, the laser gas is transferred to the above pair of main l! The glow discharge generated between the poles is excited to oscillate laser light.

ところで、一対の主Ｎ極間にレーザガスを流すためには
、上記主電極の長手方向に）０っで所定間隔で配設され
た複数のファンによって行なうようにしている。しかし
ながら、このようにしてレーザガスを流すようにすると
、その流速９市は、上記ファンの配置分布からしてこれ
ら主電極の長手方向中央部分に比べて両端部分の方が低
速となることが避けられない。すると、とくにレーザ発
振の繰返しが高くなった場合などに両端部分におけるレ
ーザガスの交換が十分に行われなくなり、その両端部分
においてグロー放電が不安定となってアーク放電の発生
をＩＧき、レーザ発振が１テわれなくなったり、主！ｆ
ｆｉが早期に損傷するなどの問題が生じる。Incidentally, in order to flow the laser gas between the pair of main north poles, a plurality of fans are arranged at predetermined intervals in the longitudinal direction of the main electrodes. However, when the laser gas is caused to flow in this manner, it is avoided that the flow velocity is lower at both ends of the main electrode than at the center in the longitudinal direction due to the arrangement distribution of the fans described above. do not have. Then, especially when the repetition rate of laser oscillation becomes high, the exchange of laser gas at both ends becomes insufficient, and the glow discharge becomes unstable at both ends, causing arc discharge to occur and causing laser oscillation. Lord! f
Problems such as early damage to the fi occur.

（発明が解決しようとする問題点） この発明は、レーザガスの速度分布が主電極の長手方向
全長にわたってほぼ均一になるようにしたガスレーザ発
振装置をも？供することを目的とする。(Problems to be Solved by the Invention) The present invention also provides a gas laser oscillation device in which the velocity distribution of the laser gas is substantially uniform over the entire length of the main electrode in the longitudinal direction. The purpose is to provide

［発明の構成］ この発明は、密閉容器内にｗ１間対向して配設された一
対の主電極と、これら止定橘間にレーザ発振の方向と垂
直方向にレーザガスを強制的に循環させる送気手段と、
この送気手段によって循環させられるレーザガスを冷却
するための熱交換器と、上記一対の主電極の長手方向に
おいて上記送気手段によって循環させられるレーザガス
の流速をほぼ一定にする調節手段とを具漠する。そして
、この調節手段によってレーザガスの流速を一定にする
ことによってレーザ発振の安定化を計るようにした。[Structure of the Invention] The present invention includes a pair of main electrodes disposed facing each other in a closed container, and a feeder that forcibly circulates laser gas between these fixed electrodes in a direction perpendicular to the direction of laser oscillation. air means and
A heat exchanger for cooling the laser gas circulated by the air supply means, and an adjustment means for keeping the flow rate of the laser gas circulated by the air supply means substantially constant in the longitudinal direction of the pair of main electrodes. do. This adjustment means stabilizes the laser oscillation by keeping the flow velocity of the laser gas constant.

（実施例） 以下、この発明の一実施例を図面を参照して説明する。(Example) An embodiment of the present invention will be described below with reference to the drawings.

第３図はガスレーザ発成装置の密閉な放電部１を示し、
この放電部１に（ニ一対の止定（鮎としての上下方向に
Ｍ８対向したアノード２とカソード３とが第２図に示す
ように放電部１の長手方向はぼ全長にわたって配設され
ている。また、図中４は均一な放電の発生を容易にする
ため、予備電離を行なうトリが電極である。FIG. 3 shows the sealed discharge section 1 of the gas laser generator,
In this discharge section 1, an anode 2 and a cathode 3 facing each other in the vertical direction are arranged over almost the entire length in the longitudinal direction of the discharge section 1, as shown in FIG. Further, reference numeral 4 in the figure indicates an electrode that performs preliminary ionization in order to facilitate the generation of uniform discharge.

上記放を部１にはレーザガスの循環路５が形成されてい
る。この循環路５には上記アノード２の上方に複数のフ
ァン６が上記放電部１の長手方向に沿って一定間隔で配
置されている。これらファン６よって上記循環路５には
レーザガスが第３図に矢印で示すように循環させられる
ようになっている。また、上記各ファン６の上流側と下
流側とには熱交換器７が配設されている。この熱交換器
７は冷却水が通されるバイブ８に多数のフィン９が取着
されてなる。したがって、上記〕７ン６によって循環路
５を強υ１的に循環させられるレーザガスは上記熱交換
器７によって冷却されるようになっている。また、上記
放電部１の長手方向一端には反Ｉ）′Ｊ鏡１１、他端に
は出力鏡１２が設けられ、上記レーザガスが上記アノー
ド２とカソード３との間で発生するグロー放電で励起さ
れることによってレーザ光が出力され、と、このレーザ
光は上記出力鏡１２から出力されるようになっている。A laser gas circulation path 5 is formed in the above-mentioned radiation section 1 . In this circulation path 5, a plurality of fans 6 are arranged above the anode 2 at regular intervals along the longitudinal direction of the discharge section 1. Laser gas is circulated through the circulation path 5 by these fans 6 as shown by arrows in FIG. Furthermore, heat exchangers 7 are provided on the upstream and downstream sides of each of the fans 6. This heat exchanger 7 is made up of a large number of fins 9 attached to a vibe 8 through which cooling water is passed. Therefore, the laser gas that is strongly circulated through the circulation path 5 by the above-mentioned 7-ring 6 is cooled by the above-mentioned heat exchanger 7. Further, an anti-I)'J mirror 11 is provided at one end in the longitudinal direction of the discharge section 1, and an output mirror 12 is provided at the other end, and the laser gas is excited by a glow discharge generated between the anode 2 and the cathode 3. As a result, a laser beam is outputted, and this laser beam is outputted from the output mirror 12.

また、上記熱交換器７は、第１図に示すように放電部１
の長手方向両端部に設けられたフィン９がこの放電部１
の長手方向外方に向かって傾斜している。したがって、
上記ファン６によって循環路５を循環させられるレーザ
ガスは、第１図に矢印で示すように放電部１の両端部に
良好に流れるので、放電部１の長手方向全長において流
出や流速がほぼ均一となる。つまり、放Ｔｉ部１０両端
部において外方に向かって傾斜したフィン９は、レーザ
ガスが放電部１の全長にわたって流量や流速が−（藁と
なるように制御する制御手段を形成している。Further, the heat exchanger 7 includes a discharge section 1 as shown in FIG.
The fins 9 provided at both longitudinal ends of the discharge section 1
slopes outward in the longitudinal direction. therefore,
The laser gas circulated through the circulation path 5 by the fan 6 flows well to both ends of the discharge section 1 as shown by the arrows in FIG. Become. In other words, the fins 9 inclined outward at both ends of the Ti discharge section 10 form a control means for controlling the flow rate and flow velocity of the laser gas over the entire length of the discharge section 1.

一方、上記アノード２とカソード３とには励起回路１３
が接続されている。この励起回路１３には１！１１１１
４が第１の抵抗１５を介して接続されている。また、励
起回路１３には主コンデンサ１６、第２の抵抗１７およ
びピーキングコンデンサ１８が並列に接続されていると
ともに、コイル１９、ギャップスイッチ２１が接続され
ている。そして、上記ギャップスイッチ２１をオンにす
ると、この励起回路１３に接続されたアノード２とカソ
ード３との間でグロー放電が発生するようになっている
。On the other hand, an excitation circuit 13 is connected to the anode 2 and cathode 3.
is connected. This excitation circuit 13 has 1!1111
4 are connected via a first resistor 15. Further, a main capacitor 16, a second resistor 17, and a peaking capacitor 18 are connected in parallel to the excitation circuit 13, and a coil 19 and a gap switch 21 are also connected. When the gap switch 21 is turned on, glow discharge occurs between the anode 2 and cathode 3 connected to the excitation circuit 13.

このような構造のガスレーザ発掘装置によれば、放電部
１の長手方向両端部に立置するフィン９を外方に向けて
傾斜させたので、７ノード２とカソード３との間を流れ
るレーザガスは放電部１の長手方向全長にわたって流山
や流速がほぼ均一となる。つまり、放電部１の長手方向
両端部においてレーザガスの交換が十分に行われること
になるから、その両端部においてアーク放電の発生を防
ぎ、安定した状態でレーザ光を出力することができる。According to the gas laser excavation device having such a structure, the fins 9 placed vertically at both ends of the discharge section 1 in the longitudinal direction are inclined outward, so that the laser gas flowing between the seven nodes 2 and the cathode 3 is The flow peaks and flow velocity are substantially uniform over the entire length of the discharge section 1 in the longitudinal direction. That is, since the laser gas is sufficiently exchanged at both longitudinal ends of the discharge section 1, arc discharge can be prevented from occurring at both ends, and laser light can be output in a stable state.

なお、この発明は上記一実施例に限定されず、たとえば
制御手段は放電部１の両端部においてフィン９を傾斜さ
せる代わりに、放電部１の両端部に位置するファン６を
外方に向けて配設したり、あるいはファン６の配置間隔
を放電部１の中央部分に比べて両端部分を密にするなど
して両端部におけるレーザガスの流出を増加させ、上記
ｔｌｉ電部１の長手方向全長にわたるレーザガスの流量
費流速を一様にするようにしてもよい。Note that the present invention is not limited to the above-mentioned embodiment; for example, instead of tilting the fins 9 at both ends of the discharge section 1, the control means may direct the fans 6 located at both ends of the discharge section 1 outward. The outflow of the laser gas at both ends is increased by arranging the fans 6 closer together at both ends than at the center of the discharge section 1, and thereby extending the entire length of the tli electric section 1 in the longitudinal direction. The flow rate and velocity of the laser gas may be made uniform.

［発明の効果］ 以上述べたようにこの発明は、離間対向して配設された
一対の主Ｎ極間にレーザ発成の方向と垂直方向に送気手
段によってレーザガスを強制的に循環させるガスレーザ
装置において、上記送気手段によって循環させられるレ
ーザガスの流速を制御手段によって上記一対の主電極の
長手方向においてほぼ一定にするようにした。したがっ
て、主電極の両端部においてレーザガスの交換が十分に
行われずにアーク放電が発生するということがないから
、安定したレーザ出力が得られるばかりか、主電極が早
期に損傷するのを防ぐこともできる。[Effects of the Invention] As described above, the present invention provides a gas laser in which laser gas is forcibly circulated by an air supply means in a direction perpendicular to the direction of laser emission between a pair of main N poles disposed facing each other and separated from each other. In the apparatus, the flow rate of the laser gas circulated by the air supply means is made substantially constant in the longitudinal direction of the pair of main electrodes by means of a control means. Therefore, arc discharge does not occur due to insufficient exchange of laser gas at both ends of the main electrode, which not only provides stable laser output but also prevents early damage to the main electrode. can.

【図面の簡単な説明】[Brief explanation of the drawing]

図面はこの発明の一実施例を示し、第１図は放電部にお
けるファンの］！ｆｉｌ！置状態装平面図、第２図は放
電部の側面図、第３図は同じく概略的構成図である。 １・・・放電部（密閉容器）、２・・・アノード（主電
極）、３・・・カソード（主電極）、６・・・ファン（
送Ｊｕｌ別）、７・・・熱交換器、９・・・フィン（制
御手段）。The drawings show an embodiment of the invention, and FIG. 1 shows a fan in a discharge section]! fil! FIG. 2 is a side view of the discharge section, and FIG. 3 is a schematic diagram of the configuration. 1... Discharge part (closed container), 2... Anode (main electrode), 3... Cathode (main electrode), 6... Fan (
7... Heat exchanger, 9... Fin (control means).

Claims (1)

【特許請求の範囲】[Claims] 密閉容器内に離間対向して配設された一対の主電極と、
これら主電極間にレーザ発振の方向と垂直方向にレーザ
ガスを強制的に循環させる送気手段と、この送気手段に
よって循環させられるレーザガスを冷却するための熱交
換器と、上記一対の主電極の長手方向において上記送気
手段によって循環させられるレーザガスの流速をほぼ一
定にする調節手段とを具備したことを特徴とするガスレ
ーザ発振装置。A pair of main electrodes arranged facing each other in a sealed container,
An air supply means for forcibly circulating the laser gas between these main electrodes in a direction perpendicular to the direction of laser oscillation, a heat exchanger for cooling the laser gas circulated by the air supply means, and a heat exchanger for cooling the laser gas circulated by the air supply means; A gas laser oscillation device characterized by comprising: an adjusting means for making the flow velocity of the laser gas circulated by the air supply means substantially constant in the longitudinal direction.
JP17224586A 1986-07-22 1986-07-22 Gas laser oscillator Pending JPS6328086A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17224586A JPS6328086A (en) 1986-07-22 1986-07-22 Gas laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17224586A JPS6328086A (en) 1986-07-22 1986-07-22 Gas laser oscillator

Publications (1)

Publication Number Publication Date
JPS6328086A true JPS6328086A (en) 1988-02-05

Family

ID=15938308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17224586A Pending JPS6328086A (en) 1986-07-22 1986-07-22 Gas laser oscillator

Country Status (1)

Country Link
JP (1) JPS6328086A (en)

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