JPS6327723A - Piezoelectric matrix sensor and its preparation - Google Patents

Abstract

PURPOSE:To obtain functions such as pressure sensation, contact sensation and slide sensation etc. by one sensor, by a method wherein strip like electrode films are provided to both surface of a piezoelectric film so as to cross to each other at a right angle and a position where pressure is applied is grasped by an X-Y coordinates system. CONSTITUTION:For example, when a body presses an insulating film 5, the pressing force thereof is transmitted to a piezoelectric film 1 through the insulating film to deform the piezoelectric film 1. Therefore, at the deformed part of the piezoelectric film 1, voltage having magnitude corresponding to the deformation quantity thereof is generated in a thickness direction and taken out through the electrode films 2, 3 respectively adhered to the front and back surfaces of the deformed part. Since each of the electrode films on the front surface side determines an X-coordinates position and each of the electrode films on the back surface side determines a Y-coordinates position by taking out voltage from both corresponding electrode films, two-dimensional pressure distribution can be detected.

Description

DETAILED DESCRIPTION OF THE INVENTION Human and industrial fields of application The present invention provides a piezoelectric matrix sensor capable of two-dimensionally sensing pressure distribution, for example, a piezoelectric matrix sensor that can be attached to an industrial robot hand, and a method for manufacturing the same. It is related to.

B6 Summary of the Invention The present invention provides a sensor that is attached to, for example, an industrial robot hand and has a pressure sensing function. Use the membrane arrangement to locate the location where pressure is applied x-y
By using a coordinate system, each function such as pressure, touch, and all nine functions can be obtained with one senna.

Furthermore, in the method of manufacturing senna of the present invention, when providing a strip-shaped electrode film, a method is adopted in which a mask material is formed on a planar electrode film using, for example, a photoresist method, and then etched. This simplifies the manufacturing process.

C1 Conventional Technology Industrial robots have recently become popular at a rapid pace, and their applications span a wide variety of fields, including assembly, processing, product inspection, and measurement. For this reason, robots have various sensory functions, such as touch sensing functions.

It is required to provide a pressure sensing function or a surface sensing function. Conventionally, for example, a robot hand has been equipped with a dedicated sensor that performs each sensory function.

D1 Problems to be Solved by the Invention Considering the work space and installation conditions, it is desirable that the robot be as small and lightweight as possible. However, if a dedicated sensor is attached to the robot as in the past, there is a problem in that it hinders the miniaturization and quantification of the robot. The present invention has been made against this background, and provides a compact sensor with multiple functions, which can be used to reduce the size of robots, for example.
This is an attempt to reduce weight.

Means for Solving the E0 Problem The piezoelectric matrix sensor of the present invention has a plurality of strip-shaped electrode films spaced apart from each other and arranged in parallel on the surface of the piezoelectric film, and a large number of strip-shaped electrode films arranged mutually on the back surface. The piezoelectric matrix sensors are arranged in parallel and spaced apart from each other and perpendicular to the electrode film on the front side to form an IJ sock sensor main body, and lead parts are connected to the electrode films respectively, and An insulating substrate and an elastic insulating coating are attached to the side and front sides, respectively.

The manufacturing method of the present invention is a method of forming a band-shaped III film using masking and etching. For example, an electrode film is provided on both sides of a piezoelectric film so as to cover the entire detection area, and The piezoelectric matrix sensor body is obtained by forming a large number of band-shaped mask materials perpendicularly to the electrode film on the back side by, for example, a photoresist method, and then performing an etching process.

21 Action For example, when an object presses an insulating coating, the pressing force is transmitted to the piezoelectric film through the insulating coating, causing the piezoelectric film to deform. Therefore, a voltage corresponding to the amount of deformation is generated in the thickness direction in the deformed portion of the piezoelectric film, and the voltage is extracted through the electrode films attached to the front and back surfaces of the portion, respectively. Each of the electrode films on the front side determines the X-coordinate position, and each of the electrode films on the back side determines the Y-coordinate position, so by extracting the voltage from both corresponding electrode films, the two-dimensional fishing force pressure is distributed. etc. can be detected.

G. Embodiment FIG. 1 is a vertical cross-sectional side view showing an IJ rack sensor according to an embodiment of the present invention. Film 1 is used. In the g55 mode piezoelectric film 1, the direction of deformation and the direction of voltage generation are the same; for example, when pressure is applied in the thickness direction, voltage is generated in that direction. As shown in FIGS. 2 and 3, a large number of strip-shaped electrode films (X
In addition, a large number of strip-shaped electrode films (electrode films in the Y direction) 3 are provided on the back surface, spaced apart from each other and perpendicular to the electrode films 2. The piezoelectric matrix sensor main body 4 is constructed by providing the piezoelectric matrix sensor body 4 in parallel.

Here, to describe a preferred method for providing the electrode films 2 and 3 on both sides of the piezoelectric film 1, first, electrode films are deposited on both sides of the piezoelectric film 1, for example, so as to cover all pages of the detection area. form. Thereafter, a large number of strip-shaped masking materials are provided in parallel at equal intervals on the electrode film on the front side of the piezoelectric film 1 by, for example, a photoresist method, and a large number of strip-shaped masking materials are provided on the electrode film on the back surface side of the mask. Provided in the same manner so as to be perpendicular to the material. Next, the exposed portions of the electrode films on the front and back sides are etched, and the mask material is removed to obtain the sensor body 4 as shown in FIGS. 2 and 3.

An elastic insulating coating 5, for example, a silicone rubber sheet, is attached to the front side of the sensor body 4 obtained in this way, and an insulating substrate 6, for example, a silicone rubber sheet, is attached to the back side in the same way as the front side, and furthermore, the above-mentioned Lead wires 71+7 as serial lead parts are attached to each of the electrode films 2.3 using a conductive adhesive or the like.
2 constitutes a piezoelectric matrix sensor. This piezoelectric matrix sensor, for example,
As shown in the figure, it is fixed to the surface of the robot hand R.

Note that as the insulating coating 5 and the insulating substrate 6, an insulating member such as a fluororubber sheet or a vinyl sheet can also be used.

FIG. 4 is a plan view showing another embodiment of the present invention. In this embodiment, lead electrodes 81 as lead portions corresponding to the electrode films 2 in the X direction and electrode films 3 in the Y direction are shown in FIG.
An insulating substrate 8 is used, on which lead electrodes 82 as lead portions corresponding to the insulating substrates 8 are printed in advance.
The sensor body 4 is integrally fixed in the center of the electrode film 2.
, 3, respectively, are connected to connecting members 91+92 such as conductive adhesive, and furthermore, the entire surfaces of the insulating substrate 8 and sensor body 4 are coated with insulating resin to form an insulating film, thereby producing piezoelectricity. It constitutes a matrix sensor.

Further, in the present invention, the piezoelectric film 1 may be of a g31 mode as shown in FIG. 5, for example, where the deformation direction and the voltage generation direction are different by 90 degrees, and in this case, The piezoelectric film 1 is formed into a rectangular shape, for example, so that the deformation direction is diagonal, and the electrode films 2 and 3 are formed so as to extend parallel to mutually adjacent side edges of the piezoelectric film 1 in the same manner as in the previously described embodiments. A piezoelectric matrix sensor body is constructed by further connecting lead wires 71 and 72 to the electrode films 2 and 3, respectively, and providing an insulating coating and an insulating substrate on the front and back surfaces of the sensor body, respectively. When using the piezoelectric film 1 in which the deformation direction and the voltage generation direction are different modes as in this embodiment, it is preferable to use an elastic material as the insulating substrate. When a force is applied to the piezoelectric film 1 in the thickness direction, the piezoelectric film 1 is easily deformed in its diagonal direction, so it is easy to extract the voltage corresponding to the amount of deformation.

Next, the operation of the piezoelectric matrix sensor obtained as described above and its application examples will be described.

First, as shown in FIG. 8, both sides of the piezoelectric film 10 are located at each intersection of the electrode film 2 in the X direction and the electrode film 3 in the Y direction (the intersection when the sensor body 4 is viewed from above) of the nine piezoelectric matrix sensors. Lead wire 7 to amplify the voltage between
1 and lead wire 72 to the input side.
The output terminal of the amplifier 9B is connected to the microcomputer 9D via the A/D converter 9C. Now, suppose a robot hand with a piezoelectric matrix sensor attached to its surface grasps an object.
The pressing force from the object is transmitted to the piezoelectric film 1 via the insulating coating 5), and the portion receiving the pressing force is deformed. In the deformed portion of the piezoelectric film 1, a voltage corresponding to the amount of deformation is applied in the thickness direction to 1. That is, a voltage is generated between the electrode films 2 and 3 on both sides of this deformed portion, and this generated voltage is input to the microcomputer 9D through the amplifier 9B2 and the A/D converter 9C.

The connection between the lead portions 71 and 72 of each of the plurality of electrodes in the X and Y directions and the amplifier 9B2 is switched by a switch 9Bl provided on the input side of the amplifier 9B2, and the voltage generated at each intersection of the electrodes in the X and Y directions is changed. The input signals are sequentially scanned and input into and stored in the microcomputer 9D, and the microcomputer 9D processes this input signal as matrix information.
It can be captured in ymm. In this case, if the magnitude of pressure is taken as the magnitude of voltage on two axes, the shape of the contact object can be recognized using three-dimensional coordinates.

Furthermore, if the magnitude of the voltage is extracted as the amount of displacement, it can be used as a two-dimensional pressure sensor. Furthermore, if a threshold value is set for the magnitude of the voltage, it is possible to determine which position on the plane another object is in contact with, so it can be used as a two-dimensional touch sensor.

Then, by considering the position where the pressure was applied as a point on the coordinates, and by sampling the position of that point at regular time intervals to determine the relationship between time and coordinates, we can determine in which direction the position where the pressure was applied is It can be used as a two-dimensional motion sensor because it can determine how far and at what speed it has moved. It should be noted that the conventional sliding υ sensor could only detect the sliding υ in a certain direction, but when the sensor of the present invention is applied as a sliding sensor, two-dimensional data of the sliding υ can be obtained. This sensor is more effective than other sensors.

In addition to the above-mentioned application examples, the senna of the present invention can be applied to a large area of piezoelectric film, so the senna can be pasted to cover the entire structure such as a beam, similar to a strain gauge. It can be used for various purposes.

In this case, it is possible to obtain displacement information of elements that are more finely divided than with conventional strain gauges, so even for structures with complex shapes, it is possible to compare the results simulated using the finite element method with the information obtained from the sensor. becomes possible.

H6 Effects of the Invention As described above, in the present invention, since band-shaped electrode films are provided on both sides of the piezoelectric film so as to be perpendicular to each other, the position where pressure is applied can be captured in the X-Y coordinate system. For example, by processing the electrical signals from the electrode membrane with a computer, various types of pressure sensors, contact sensors, surface sensors, etc. can be detected. It can be used as a sensor, and as a result, one sensor can perform various functions. Furthermore, according to the manufacturing method of the present invention, the width of each strip-shaped electrode film and the width of the slit between the electrode films can be easily miniaturized, making it possible to easily manufacture a high-precision piezoelectric magnetic head IJ sensor with high productivity. . Since the piezoelectric film is thin, for example, about 10 μm, the overall thickness of the sensor can be made thinner. Because it can be made thin and can perform a variety of functions,
If the sensor of the present invention is attached to a robot,
It is possible to make the robot smaller and lighter while providing the sensory functions required of the robot. Furthermore, it can be used not only as a sensory sensor for robots, but also for purposes similar to strain gauges as mentioned above, and because it has excellent functions, it can be used as an effective sensor in a wide variety of fields. can.

In the manufacturing process of the senna of the present invention, if masking and etching are used to provide electrode films on both sides of the piezoelectric film, a piezoelectric matrix sensor body having a band-shaped electrode film can be easily and reliably formed. Can be done.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional side view showing an embodiment of the piezoelectric matrix sensor of the present invention, and FIGS. 2 and 3 are piezoelectric matrix sensors, respectively.
FIG. 4 is a plan view showing another embodiment of the piezoelectric matrix sensor of the present invention; FIG. 5 is an explanatory view showing a piezoelectric film in g51 mode; FIG. The figure is a partial plan view showing an embodiment of the piezoelectric matrix sensor of the present invention using the piezoelectric film shown in FIG. 5, FIG. 7 is a side view showing a deformed state of the piezoelectric matrix sensor shown in FIG. FIG. 8 is a block diagram showing an example of application of the present invention. 1... Piezoelectric film, 2, 3... Electrode film, 4...
・Piezoelectric matrix sensor body, 5... Insulating coating, 6
...Insulating board, 71y72 ...Lead wire.

Claims (2)

[Claims] (1) A large number of strip-shaped electrode films are provided on the surface of the piezoelectric film in parallel and spaced from each other, and a large number of strip-shaped electrode films are provided on the back surface of the piezoelectric film, spaced apart from each other and perpendicular to the electrode film on the front surface. are arranged in parallel to form a piezoelectric matrix sensor main body, a lead portion is connected to each of the electrode films, and an insulating substrate and an elastic insulating coating are attached to the back and front sides of the piezoelectric matrix sensor main body, respectively. A piezoelectric matrix sensor characterized by: (2) An electrode film is provided on the surface of the piezoelectric film so as to cover the entire detection area, and a large number of strip-shaped mask materials are provided in parallel at intervals on this electrode film, and the electrode film is exposed. After removing the portion by etching, the mask material is removed and the portion covered by this is left, and an electrode film is provided on the back side of the piezoelectric film so as to cover the entire detection area, and a large number of electrodes are placed on this electrode film. Strip-shaped mask materials were provided in parallel to each other at a distance from each other and perpendicular to the mask material on the front side, and the exposed portion of the electrode film was removed by etching, and then the mask material was removed and covered by this. Obtain the piezoelectric matrix sensor body by leaving the part,
A method for manufacturing a piezoelectric matrix sensor, comprising: connecting lead portions to each of the remaining electrode films, and pasting an insulating substrate and an elastic insulating coating on the back side and front side of the piezoelectric matrix sensor body, respectively. .